Liquid cooling system for LSI packages

Claim 2

A liquid cooling system comprising: a heat exchanger for producing liquid coolant; a feed pump for receiving the liquid coolant from said heat exchanger and generating pressurized liquid coolant; a cooling chamber including a plurality of integrated circuit packages, a plurality heat sinks disposed in heat transfer contact with said integrated circuit packages, respectively, and a plurality of nozzles for receiving the pressurized liquid coolant from said feed pump and ejecting droplets of coolant to said heat sinks; a suction pump for discharging liquid from said cooling chamber to said heat exchanger; first detector means for detecting a coolant flow supplied to said cooling chamber; second detector means for detecting a coolant flow discharged from said cooling chamber; difference detector means for detecting a difference between the detected coolant flows; and control means for controlling said suction pump according to the difference detected by said difference detector means to maintain the pressure inside of said cooling chamber at a sub-atmospheric level.

Claim 3

A liquid cooling system as claimed in claim 1, wherein each of said first and second detector means is a flow sensor for detecting the volume of coolant flow.

Claim 4

A liquid cooling system as claimed in claim 1, wherein each of said first and second detector means is a pressure sensor for detecting the pressure of coolant flow.

Claim 5

A liquid cooling system comprising: a heat exchanger for producing liquid coolant; a feed pump for receiving the liquid coolant from said heat exchanger and generating pressurized liquid coolant; a cooling chamber including a plurality of integrated circuit packages, a plurality heat sinks disposed in heat transfer contact with said integrated circuit packages, respectively, and a plurality of nozzles for receiving the pressurized liquid coolant from said feed pump and ejecting droplets of coolant to said heat sinks; a suction pump for discharging liquid from said cooling chamber to said heat exchanger; a first flow sensor for detecting the volume of coolant flow supplied to said cooling chamber; a first pressure sensor for detecting the pressure of coolant flow supplied to said cooling chamber; a second flow sensor for detecting the volume of coolant flow discharged from said cooling chamber; a second pressure detector for detecting the pressure of coolant flow discharged from said cooling chamber; first difference detector means for detecting a difference between the detected volumes; second difference detector means for detecting a difference between the detected pressures; and control means for controlling said suction pump according to the differences detected by said first and second difference detector means to maintain the pressure inside of said cooling chamber at a sub-atmospheric level.

Claim 6

A liquid cooling system comprising: a heat exchanger for producing liquid coolant; a feed pump for receiving the liquid coolant from said heat exchanger and generating pressurized liquid coolant; a cooling chamber including a plurality of integrated circuit packages, a plurality heat sinks disposed in heat transfer contact with said integrated circuit packages, respectively, and a plurality of nozzles for receiving the pressurized liquid coolant from said feed pump and ejecting droplets of coolant to said heat sinks; a suction pump for discharging liquid from said cooling chamber to said heat exchanger; a first flow sensor for detecting the volume of coolant flow supplied to said cooling chamber; a first pressure sensor for detecting the pressure of coolant flow supplied to said cooling chamber; a second flow sensor for detecting the volume of coolant flow discharged from said cooling chamber; a second pressure detector for detecting the pressure of coolant flow discharged from said cooling chamber; first difference detector means for detecting a difference between the detected volumes; second difference detector means for detecting a difference between the detected pressures; and control means for controlling said suction pump according to the differences detected by said first and second difference detector means to maintain the pressure inside of said cooling chamber at a sub-atmospheric level.

Claim 7

A liquid cooling system comprising: a heat exchanger for producing liquid coolant; a feed pump for receiving the liquid coolant from said heat exchanger and generating pressurized liquid coolant; a cooling chamber including a plurality of integrated circuit packages, a plurality heat sinks disposed in heat transfer contact with said integrated circuit packages, respectively, and a plurality of nozzles for receiving the pressurized liquid coolant from said feed pump and ejecting droplets of coolant to said heat sinks; a suction pump for discharging liquid from said cooling chamber to said heat exchanger; detector means for detecting a coolant flow supplied to said nozzles; setting means for establishing a reference value; difference detector means for detecting a difference between the detected coolant flow and said reference value; and control means for controlling said feed pump and said suction pump according to the difference detected by said difference detector means to maintain the pressure inside of said cooling chamber at a sub-atmospheric level.

Claim 8

A liquid cooling system comprising: a heat exchanger for producing liquid coolant; a feed pump for receiving the liquid coolant from said heat exchanger and generating pressurized liquid coolant; a cooling chamber including a plurality of integrated circuit packages, a plurality heat sinks disposed in heat transfer contact with said integrated circuit packages, respectively, and a plurality of nozzles for receiving the pressurized liquid coolant from said feed pump and ejecting droplets of coolant to said heat sinks; a suction pump for discharging liquid from said cooling chamber to said heat exchanger; detector means for detecting a coolant flow supplied to said nozzles; setting means for establishing a reference value; difference detector means for detecting a difference between the detected coolant flow and said reference value; and control means for controlling said feed pump and said suction pump according to the difference detected by said difference detector means to maintain the pressure inside of said cooling chamber at a sub-atmospheric level.

Claim 9

A liquid cooling system comprising: a heat exchanger for producing liquid coolant; a feed pump for receiving the liquid coolant from said heat exchanger and generating pressurized liquid coolant; a cooling chamber including a plurality of integrated circuit packages, a plurality heat sinks disposed in heat transfer contact with said integrated circuit packages, respectively, and a plurality of nozzles for receiving the pressurized liquid coolant from said feed pump and ejecting droplets of coolant to said heat sinks; a suction pump for discharging liquid from said cooling chamber to said heat exchanger; detector means for detecting a coolant flow discharged from said cooling chamber; setting means for establishing a reference value; difference detector means for detecting a difference between the detected coolant flow and said reference value; and control means for controlling said feed pump and said suction pump according to the difference detected by said difference detector means to maintain the pressure inside of said cooling chamber at a sub-atmospheric level.

Claim 10

A liquid cooling system comprising: a heat exchanger for producing liquid coolant; a feed pump for receiving the liquid coolant from said heat exchanger and generating pressurized liquid coolant; a cooling chamber including a plurality of integrated circuit packages, a plurality heat sinks disposed in heat transfer contact with said integrated circuit packages, respectively, and a plurality of nozzles for receiving the pressurized liquid coolant from said feed pump and ejecting droplets of coolant to said heat sinks; a suction pump for discharging liquid from said cooling chamber to said heat exchanger; detector means for detecting a coolant flow discharged from said cooling chamber; setting means for establishing a reference value; difference detector means for detecting a difference between the detected coolant flow and said reference value; and control means for controlling said feed pump and said suction pump according to the difference detected by said difference detector means to maintain the pressure inside of said cooling chamber at a sub-atmospheric level.

Claim 11

A liquid cooling system comprising: a heat exchanger for producing liquid coolant; a feed pump for receiving the liquid coolant from said heat exchanger and generating pressurized liquid coolant; a cooling chamber including a plurality of integrated circuit packages, a plurality heat sinks disposed in heat transfer contact with said integrated circuit packages, respectively, and a plurality of suction pipes respectively disposed adjacent said heat sinks, said packages, said heat sinks and said suction pipes being submerged in liquid coolant; a suction pump for discharging liquid from said cooling chamber to said heat exchanger; first detector means for detecting a coolant flow supplied to said cooling chamber; second detector means for detecting a coolant flow discharged from said cooling chamber; difference detector means for detecting a difference between the detected coolant flows; and control means for controlling said suction pump according to the difference detected by said difference detector means to maintain the pressure inside of said cooling chamber at a sub-atmospheric level.

Claim 12

A liquid cooling system comprising: a heat exchanger for producing liquid coolant; a feed pump for receiving the liquid coolant from said heat exchanger and generating pressurized liquid coolant; a cooling chamber including a plurality of integrated circuit packages, a plurality heat sinks disposed in heat transfer contact with said integrated circuit packages, respectively, and a plurality of suction pipes respectively disposed adjacent said heat sinks, said packages, said heat sinks and said suction pipes being submerged in liquid coolant; a suction pump for discharging liquid from said cooling chamber to said heat exchanger; first detector means for detecting a coolant flow supplied to said cooling chamber; second detector means for detecting a coolant flow discharged from said cooling chamber; difference detector means for detecting a difference between the detected coolant flows; and control means for controlling said suction pump according to the difference detected by said difference detector means to maintain the pressure inside of said cooling chamber at a sub-atmospheric level.

Claim 13

A liquid cooling system as claimed in claim 7, wherein each of said first and second detector means is a flow sensor for detecting the volume of coolant flow.

Claim 14

A liquid cooling system as claimed in claim 7, wherein each of said first arid second detector means is a pressure sensor for detecting the pressure of coolant flow.

Claim 15

A liquid cooling system comprising: a heat exchanger for producing liquid coolant; a feed pump for receiving the liquid coolant from said heat exchanger and generating pressurized liquid coolant; a cooling chamber including a plurality of integrated circuit packages, a plurality heat sinks disposed in heat transfer contact with said integrated circuit packages, respectively, and a plurality of suction pipes respectively disposed adjacent said heat sinks, said packages, said heat sinks and said suction pipes being submerged in liquid coolant; a suction pump for discharging liquid from said cooling chamber to said heat exchanger; a first flow sensor for detecting the volume of coolant flow supplied to said cooling chamber; a first pressure sensor for detecting the pressure of coolant flow supplied to said cooling chamber; a second flow sensor for detecting the volume of coolant flow discharged from said cooling chamber; a second pressure detector for detecting the pressure of coolant flow discharged from said cooling chamber; first difference detector means for detecting a difference between the detected volumes; second difference detector means for detecting a difference between the detected pressures; and control means for controlling said suction pump according to the differences detected by said first and second difference detector means to maintain the pressure inside of said cooling chamber at a sub-atmospheric level.

Claim 16

A liquid cooling system comprising: a heat exchanger for producing liquid coolant; a feed pump for receiving the liquid coolant from said heat exchanger and generating pressurized liquid coolant; a cooling chamber including a plurality of integrated circuit packages, a plurality heat sinks disposed in heat transfer contact with said integrated circuit packages, respectively, and a plurality of suction pipes respectively disposed adjacent said heat sinks, said packages, said heat sinks and said suction pipes being submerged in liquid coolant; a suction pump for discharging liquid from said cooling chamber to said heat exchanger; a first flow sensor for detecting the volume of coolant flow supplied to said cooling chamber; a first pressure sensor for detecting the pressure of coolant flow supplied to said cooling chamber; a second flow sensor for detecting the volume of coolant flow discharged from said cooling chamber; a second pressure detector for detecting the pressure of coolant flow discharged from said cooling chamber; first difference detector means for detecting a difference between the detected volumes; second difference detector means for detecting a difference between the detected pressures; and control means for controlling said suction pump according to the differences detected by said first and second difference detector means to maintain the pressure inside of said cooling chamber at a sub-atmospheric level.

Claim 17

A liquid cooling system comprising: a heat exchanger for producing liquid coolant; a feed pump for receiving the liquid coolant from said heat exchanger and generating pressurized liquid coolant; a cooling chamber including a plurality of integrated circuit packages, a plurality heat sinks disposed in heat transfer contact with said integrated circuit packages, respectively, and a plurality of suction pipes respectively disposed adjacent said heat sinks, said packages, said heat sinks and said suction pipes being submerged in liquid coolant; a suction pump for discharging liquid from said cooling chamber to said heat exchanger; detector means for detecting a coolant flow supplied to said nozzles; setting means for establishing a reference value; difference detector means for detecting a difference between the detected coolant flow and said reference value; and control means for controlling said feed pump and said suction pump according to the difference detected by said difference detector means to maintain the pressure inside of said cooling chamber at a sub-atmospheric level.

Claim 18

A liquid cooling system comprising: a heat exchanger for producing liquid coolant; a feed pump for receiving the liquid coolant from said heat exchanger and generating pressurized liquid coolant; a cooling chamber including a plurality of integrated circuit packages, a plurality heat sinks disposed in heat transfer contact with said integrated circuit packages, respectively, and a plurality of suction pipes respectively disposed adjacent said heat sinks, said packages, said heat sinks and said suction pipes being submerged in liquid coolant; a suction pump for discharging liquid from said cooling chamber to said heat exchanger; detector means for detecting a coolant flow supplied to said nozzles; setting means for establishing a reference value; difference detector means for detecting a difference between the detected coolant flow and said reference value; and control means for controlling said feed pump and said suction pump according to the difference detected by said difference detector means to maintain the pressure inside of said cooling chamber at a sub-atmospheric level.

Claim 19

A liquid cooling system comprising: a heat exchanger for producing liquid coolant; a feed pump for receiving the liquid coolant from said heat exchanger and generating pressurized liquid coolant; a cooling chamber including a plurality of integrated circuit packages, a plurality heat sinks disposed in heat transfer contact with said integrated circuit packages, respectively, and a plurality of suction pipes respectively disposed adjacent said heat sinks, said packages, said heat sinks and said suction pipes being submerged in liquid coolant; a suction pump for discharging liquid from said cooling chamber to said heat exchanger; detector means for detecting a coolant flow discharged from said cooling chamber; setting means for establishing a reference value; difference detector means for detecting a difference between the detected coolant flow and said reference value; and control means for controlling said feed pump and said suction pump according to the difference detected by said difference detector means to maintain the pressure inside of said cooling chamber at a sub-atmospheric level.

Claim 20

A liquid cooling system comprising: a heat exchanger for producing liquid coolant; a feed pump for receiving the liquid coolant from said heat exchanger and generating pressurized liquid coolant; a cooling chamber including a plurality of integrated circuit packages, a plurality heat sinks disposed in heat transfer contact with said integrated circuit packages, respectively, and a plurality of suction pipes respectively disposed adjacent said heat sinks, said packages, said heat sinks and said suction pipes being submerged in liquid coolant; a suction pump for discharging liquid from said cooling chamber to said heat exchanger; detector means for detecting a coolant flow discharged from said cooling chamber; setting means for establishing a reference value; difference detector means for detecting a difference between the detected coolant flow and said reference value; and control means for controlling said feed pump and said suction pump according to the difference detected by said difference detector means to maintain the pressure inside of said cooling chamber at a sub-atmospheric level.