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Patent US5507930A successfully refreshed from Google Patents.
US5507930A
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Method of sputtering a carbon protective film on a magnetic disk by superimposing an AC voltage on a DC bias voltage
Assignee: WD Media LLC
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Filing: 1994-09-01
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Granted: 1996-04-16
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Expires: 2014-09-01
Abstract
Abstract A carbon film for protecting a magnetic disk is sputtered by a DC magnetron sputtering method, with the addition of superimposed AC power on the DC power applied to the carbon target. When the carbon film is sputtered for extended period in a production sputtering machine, nodular growth occurs over the sputtering surface of the carbon target. Such nodules are variously called "warts" or "mushrooms" in the industry and they are detrimental to the productivity of the sputtering machine. The size and quantity of the nodules over the target surface increase as the target is sputtered longer, and because these region do not contribute to sputtering, the efficiency of the target decreases. As sputter efficiency decreases, power input must be increased to the target to make up for the loss in the effective sputtering area of the target. Eventually, the power input must be increased to a point where arcing occurs continuously and sputtering cannot be continued. By superimposing AC power onto the DC power applied to the target, virtually all arcing on the carbon target is eliminated, thereby significantly reducing the nodular growth and extending the use of the target.
Inventors
- 👤 Tsutomu T. Yamashita
- 👤 Kyou H. Lee
- 👤 Rajiv Y. Ranjan
- 👤 Yuri Trachuk
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 11:37
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/35; C23C14/06; C23C14/0605; G; G11; G11B; G11B5/00; G11B5/62; G11B5/72; G11B5/727; G11B5/84; G11B5/8408
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
45 words
A method of sputtering a carbon film comprising the step of applying DC power to a target, said target comprising substantially elemental carbon, and superimposing AC power on the DC power so as to inhibit the formation of nodules on the surface of said target.
Claim 2
Independent Claim
45 words
A method of sputtering a carbon film comprising the step of applying DC power to a target, said target comprising substantially elemental carbon, and superimposing AC power on the DC power so as to inhibit the formation of nodules on the surface of said target.
Claim 3
Dependent Claim
31 words
The method of claim 1 wherein the amount of AC power superimposed on the DC power is between 20% and 80% of the amount of DC power applied to the target.
Claim 4
Dependent Claim
31 words
The method of claim 2 wherein the amount of AC power superimposed on the DC power is between 30% and 60% of the amount of DC power applied to the target.
Claim 5
Dependent Claim
25 words
The method of claim 1 wherein the AC power is in the form of a signal having a frequency between 100 KHz and 1000 KHz.
Claim 6
Dependent Claim
25 words
The method of claim 4 wherein the AC power is in the form of a signal having a frequency between 300 KHz and 500 KHz.
Claim 7
Dependent Claim
23 words
The method of claim 5 wherein the AC power is in the form of a signal having a frequency of about 400 KHz.
Claim 8
Dependent Claim
34 words
The method of claim 1 wherein said sputtering is performed in an atmosphere comprising hydrogen or a hydrogen liberating gas selected from a group consisting of CH 4 or C 2 H 6 .
Claim 9
Dependent Claim
20 words
The method of claim 7 wherein said sputtering is performed in an atmosphere comprising at least 20% hydrogen by volume.
Claim 10
Dependent Claim
11 words
The method of claim 1 wherein said target comprises substantially graphite.
Claim 11
Dependent Claim
11 words
The method of claim 1 wherein said target comprises crystalline graphite.
Claim 12
Independent Claim
72 words
A method of fabricating a magnetic disk comprising the steps of: providing a substrate; depositing a magnetic layer; and depositing a protective carbon film over said magnetic layer, said protective carbon film being deposited by a sputtering process, said sputtering process comprising applying DC power to a carbon target and superimposing AC power on the DC power so as to inhibit the formation of nodules on the surface of said carbon target.
Claim 13
Independent Claim
72 words
A method of fabricating a magnetic disk comprising the steps of: providing a substrate; depositing a magnetic layer; and depositing a protective carbon film over said magnetic layer, said protective carbon film being deposited by a sputtering process, said sputtering process comprising applying DC power to a carbon target and superimposing AC power on the DC power so as to inhibit the formation of nodules on the surface of said carbon target.
Claim 14
Dependent Claim
15 words
The method of claim 11 further comprising depositing an undercoat layer under said magnetic layer.
Claim 15
Dependent Claim
10 words
The method of claim 12 wherein said substrate comprises aluminum.
Claim 16
Dependent Claim
18 words
The method of claim 13 further comprising depositing a NiP layer between said substrate and said undercoat layer.
Claim 17
Independent Claim
75 words
A method of inhibiting the growth of nodules on a target in a sputtering process, said target comprising substantially pure carbon, said method comprising the steps of: applying a DC voltage to said carbon target thereby causing said carbon target to function as a cathode; superimposing an AC signal on said DC voltage and applying said AC signal to said carbon target, said AC signal having a frequency of from 300 KHz to 500 KHz.
Claim 18
Independent Claim
75 words
A method of inhibiting the growth of nodules on a target in a sputtering process, said target comprising substantially pure carbon, said method comprising the steps of: applying a DC voltage to said carbon target thereby causing said carbon target to function as a cathode; superimposing an AC signal on said DC voltage and applying said AC signal to said carbon target, said AC signal having a frequency of from 300 KHz to 500 KHz.
Claim 19
Dependent Claim
20 words
The method of claim 15 wherein said AC signal functions to limit the occurrence of arcing events at said target.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-04-16 | 1999-10-16 | 2000-04-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-04-16 | 2003-10-16 | 2004-04-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-04-16 | 2007-10-16 | 2008-04-16 | $7700.00 | Window Closed / Lapsed |