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US5506008A
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Method of applying a lacquer film sensitive to ultraviolet and/or electron radiation
Assignee: Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung eV
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Filing: 1994-07-19
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Granted: 1996-04-09
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Expires: 2014-07-19
Abstract
Abstract Lacquer films sensitive to ultraviolet (UV) and/or electron beam radiationre applied to substrates as masking layers by a process known as the "spin on process". This invention is a new method of applying a lacquer film sensitive to UV and/or electron beam radiation. A vinyl-containing substance and a linear or cyclic siloxane are vaporized and then deposited onto the substrate to be masked. In the preferred embodiment of the invention, the substances utilized are octamethylcyclotetrasiloxane and trivinylmethylsilane.
Inventors
- 👤 Armin Klumpp
- 👤 Erwin Hacker
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 11:00
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/075; G03F7/0757; G03F7/16; G03F7/167; H; H10; H10P; H10P14/00; H10P14/60; H10P14/66; H10P14/668; H10P14/6681
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
54 words
A method of applying a lacquer film which is sensitive to UV or electron beam radiation to a substrate to be masked, comprising the method steps of: vaporizing a vinyl-containing substance and a linear or cyclic siloxane substance to form a vapor mixture; and depositing the vapor mixture onto the substrate to be masked.
Claim 2
Independent Claim
54 words
A method of applying a lacquer film which is sensitive to UV or electron beam radiation to a substrate to be masked, comprising the method steps of: vaporizing a vinyl-containing substance and a linear or cyclic siloxane substance to form a vapor mixture; and depositing the vapor mixture onto the substrate to be masked.
Claim 3
Dependent Claim
11 words
A method according to claim 1, wherein said siloxane is octamethylcyclotetrasiloxane.
Claim 4
Dependent Claim
12 words
A method according to claim 1, wherein said vinyl-containing substance is trivinylmethylsilane.
Claim 5
Dependent Claim
20 words
A method according to claim 1, wherein the vapor mixture is deposited at a pressure of 0.3 to 1.5 mbar.
Claim 6
Dependent Claim
22 words
A method according to claim 1, further comprising the step of heating said substrate to a temperature between 20° and 90° C.
Claim 7
Independent Claim
81 words
A method of applying a lacquer film which is sensitive to UV or electron beam radiation to a substrate to be masked, comprising the method steps of: vaporizing a vinyl-containing substance and a linear or cyclic siloxane substance to form a vapor mixture; introducing the vapor mixture into a reaction chamber via a discharge shower; carrying out a chemical reaction of the substances in a high frequency (HF) field; and depositing the chemically reacted substances onto the substrate to be masked.
Claim 8
Independent Claim
81 words
A method of applying a lacquer film which is sensitive to UV or electron beam radiation to a substrate to be masked, comprising the method steps of: vaporizing a vinyl-containing substance and a linear or cyclic siloxane substance to form a vapor mixture; introducing the vapor mixture into a reaction chamber via a discharge shower; carrying out a chemical reaction of the substances in a high frequency (HF) field; and depositing the chemically reacted substances onto the substrate to be masked.
Claim 9
Dependent Claim
29 words
A method according to claim 6, wherein said chemical reaction of the substances is carried out at an HF power density of from 0.06 to 0.6 W/cm 2 .
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-04-09 | 1999-10-09 | 2000-04-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-04-09 | 2003-10-09 | 2004-04-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-04-09 | 2007-10-09 | 2008-04-09 | $7700.00 | Window Closed / Lapsed |