US5496750A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Elevated source/drain junction metal oxide semiconductor field-effect transistor using blanket silicon deposition
Assignee: Texas Instruments Inc
•
Filing: 1994-09-19
•
Granted: 1996-03-05
•
Expires: 2014-09-19
Abstract
Abstract The described embodiments of the present invention provide a method for fabricating elevated source/drain junction metal oxide semiconductor field-effect transistors. The process does not require the use of selective or epitaxial silicon growth processes. In one embodiment, first a three layer gate stack is formed having a gate dielectric layer (20) beneath a polycrystalline silicon gate layer (22) and a disposable spacer layer (24), such as silicon nitride formed on top of the polycrystalline silicon gate. A conformal dielectric layer is formed overall and anisotropically etched to form sidewall spacers layers (26) on the sides of the gate, and spacer layer stack. The spacer layer (24) is then selectively removed and a layer of amorphous or polycrystalline silicon (30) is deposited overall. A layer of silicon nitride is then deposited on the surface of the polycrystalline silicon layer using chemical-vapor deposition techniques. The silicon nitride layer is etched anisotropically to leave sidewall silicon nitride layers (32) on the portion of the polycrystalline silicon layer over the sidewalls of the gate structure. The exposed layer portion of the polycrystalline silicon layer is then selectively oxidized and a selective silicon nitride etch is then used to remove the sidewall nitride oxidation mask layers, followed by a selective silicon etch to remove the sidewall portion of the polycrystalline silicon layer exposed by the removal of the silicon nitride sidewalls. This leaves elevated source and drain junction regions extending from the sidewalls of the gate on to the field isolation structures surrounding the field-effect transistor area. The silicon layer 40 and 42 extending over the field insulating layer (18) can be patterned and used for local interconnects. The microlithography patterning and silicon dioxide/silicon etch processes for definition of the local interconnect layers can be performed after the selective oxidation process step and prior or after the sidewall nitride and silicon removal.
Inventors
- 👤 Mehrdad Moslehi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 12:46
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/01; H10D30/021; H10D30/0223; H10D30/0227; H10D62/00; H10D62/80; H10D62/83; H10D64/00; H10D64/01; H10D64/017; H10D64/20; H10D64/23; H10D64/251; H10D64/258; H10D64/259; H10D64/60; H10D64/62; H10D64/66; H10D64/661; H10D64/662; H10D64/663; H10D64/667; H10D64/668
Claims Analysis
Total Claims: 63
Claim 1
Independent Claim
152 words
A method for forming an insulated-gate field-effect transistor comprising the steps of: forming a field isolation region surrounding active transistor device regions in a semiconductor substrate; forming a gate dielectric layer on the surface of said transistor device regions; forming a gate structure on the surface of said gate dielectric layer; forming sidewall dielectric spacers on the sidewalls of said gate structure; forming a blanket conductive layer overall; forming protective sidewall mask spacers on the portions of said conductive layer extending approximately vertically adjacent to said sidewall dielectric spacers; forming a protective hard mask layer on the portions of said conductive layer not covered by said protective sidewall mask spacers; selectively removing said protective sidewall mask spacers; and selectively etching through exposed regions of said conductive layer where said protective sidewall mask spacers were removed to expose said portions of said conductive layer extending approximately vertically adjacent to said sidewall dielectric spacers.
Claim 2
Independent Claim
152 words
A method for forming an insulated-gate field-effect transistor comprising the steps of: forming a field isolation region surrounding active transistor device regions in a semiconductor substrate; forming a gate dielectric layer on the surface of said transistor device regions; forming a gate structure on the surface of said gate dielectric layer; forming sidewall dielectric spacers on the sidewalls of said gate structure; forming a blanket conductive layer overall; forming protective sidewall mask spacers on the portions of said conductive layer extending approximately vertically adjacent to said sidewall dielectric spacers; forming a protective hard mask layer on the portions of said conductive layer not covered by said protective sidewall mask spacers; selectively removing said protective sidewall mask spacers; and selectively etching through exposed regions of said conductive layer where said protective sidewall mask spacers were removed to expose said portions of said conductive layer extending approximately vertically adjacent to said sidewall dielectric spacers.
Claim 3
Dependent Claim
30 words
The method of claim 1 further comprising the step of: microlithography patterning and patterned etching of said conductive layer over said field isolation region to form the device local interconnects.
Claim 4
Dependent Claim
39 words
The method of claim 1 further comprising the step of: microlithography patterning and patterned etching of said conductive layer over said field isolation region to form the transistor device connections using electrical contact pads over said field isolation region.
Claim 5
Independent Claim
58 words
A method as in claims 2 or 3 further comprising the steps of: depositing a refractory metal layer; forming a refractory metal silicide layer on the transistor device regions with exposed patterned conductive layer or exposed semiconductive surfaces; and selectively removing the refractory metal nitride and any unreacted refractory metal portions in order to form self-aligned silicide regions.
Claim 6
Dependent Claim
40 words
The methods of claims 2 or 3 wherein said microlithography patterning and patterned etching process steps are performed after said selective etching process for removal of portions of said conductive layer extending approximately vertically adjacent to said sidewall dielectric spacers.
Claim 7
Dependent Claim
41 words
The methods of claims 2 or 3 wherein said microlithography patterning and patterned etching process steps are performed prior to said selective etching process for removal of portions of said conductive layer extending approximately vertically adjacent to said sidewall dielectric spacers.
Claim 8
Dependent Claim
15 words
The method of claim 1 wherein said gate structure consists of a polycrystalline semiconductor material.
Claim 9
Dependent Claim
12 words
The method of claim 7, wherein said polycrystalline semiconductor material is silicon.
Claim 10
Dependent Claim
14 words
The method of claim 4, wherein said polycrystalline semiconductor material is a silicon-germanium alloy.
Claim 11
Dependent Claim
29 words
The method of claim 1 wherein said gate structure consists of a first layer of a polycrystalline semiconductor material and a top second layer of a disposable spacer layer.
Claim 12
Dependent Claim
29 words
The method of claim 1 wherein said gate structure consists of a first layer of an amorphous semiconductor material and a top second layer of a disposable spacer layer.
Claim 13
Dependent Claim
16 words
The method of claim 1 wherein said conductive layer is deposited using a chemical-vapor deposition process.
Claim 14
Dependent Claim
15 words
The method of claim 1 wherein said gate structure consists of an amorphous semiconductor material.
Claim 15
Dependent Claim
15 words
The methods of claim 10 or 11 wherein said disposable spacer layer comprises silicon nitride.
Claim 16
Dependent Claim
41 words
The method of claim 1 further comprising the step of implanting dopant atoms into said conductive layer and thermally activating and diffusing said dopant atoms into said conductive layer and said substrate to form the transistor source and drain junction regions.
Claim 17
Dependent Claim
28 words
A method as in claim 15 wherein said dopant atoms comprise atoms selected from the group consisting of phosphorus, arsenic, and mixtures thereof for n-channel insulated-gate field-effect transistor.
Claim 18
Dependent Claim
17 words
A method as in claim 15 wherein said dopant atoms comprise boron for p-channel insulated-gate field-effect transistor.
Claim 19
Dependent Claim
18 words
A method as in claim 14 wherein said disposable spacer layer is deposited using a chemical-vapor deposition process.
Claim 20
Dependent Claim
15 words
The method of claim 1 wherein said conductive layer is deposited using an evaporation process.
Claim 21
Dependent Claim
15 words
The method of claim 1 wherein said conductive layer is deposited using a sputtering process.
Claim 22
Dependent Claim
14 words
A method as in claim 1 wherein said field isolation region comprises silicon dioxide.
Claim 23
Dependent Claim
14 words
A method as in claim 1 wherein said gate dielectric layer comprises silicon dioxide.
Claim 24
Dependent Claim
14 words
A method as in claim 1 wherein said sidewall dielectric spacers comprise silicon dioxide.
Claim 25
Dependent Claim
15 words
A method as in claim 1 wherein said protective sidewall mask spacers comprise silicon nitride.
Claim 26
Dependent Claim
50 words
A method as in claim 24 wherein said protective sidewall mask spacers comprising silicon nitride are used as oxidation masks protecting sidewall portions of said conductive layer adjacent to said sidewall dielectric spacers against thermal oxidation during a selective thermal oxidation process for formation of said protective hard mask layer.
Claim 27
Dependent Claim
19 words
A method as in claim 1 wherein said protective hard mask layer comprises silicon dioxide formed by thermal oxidation.
Claim 28
Dependent Claim
46 words
A method as in claim 1 further comprising the step of implanting dopant atoms into said substrate after the formation of said gate structure but before the formation of said conductive layer to form doped junction regions adjacent to said gate structure in said semiconductor substrate.
Claim 29
Dependent Claim
21 words
A method as in claim 1 wherein said gate structure is formed by microlithography patterning and anisotropic plasma etching process steps.
Claim 30
Independent Claim
245 words
A method for forming an insulated-gate field-effect transistor comprising the steps of: forming field isolation regions surrounding active transistor regions in a semiconductor substrate; forming a gate dielectric layer on the surface of said transistor device regions; forming a gate structure consisting of a stacked bilayer of a disposable spacer layer on a semiconductor gate electrode on the surface of said gate dielectric layer; forming sidewall dielectric spacers on the sidewalls of said gate structure; removing said disposable spacer layer; forming a blanket conductive layer overall; forming first protective layers on the portions of said conductive layer extending approximately vertically along the sidewall dielectric spacers; forming second protective layer on the portions of said conductive layer not covered by said first protective layer; selectively removing said first protective layers; etching through said conductive layer where said first protective layers were removed to expose said conductive layer extending approximately vertically along the sidewall dielectric spacers; implanting dopant atoms in to said conductive layer and diffusing said dopant atoms in to said substrate to form source and drain junction regions; patterning said conductive layer over said field isolation regions using microlithography and etch process steps to form the transistor electrical contacts; depositing a second conductive layer which can react with said conductive layer; heating said second conductive layer to cause said second conductive layer to react with said conductive layer; and selectively removing the portions of said second conductive which did not react with said conductive layer.
Claim 31
Independent Claim
245 words
A method for forming an insulated-gate field-effect transistor comprising the steps of: forming field isolation regions surrounding active transistor regions in a semiconductor substrate; forming a gate dielectric layer on the surface of said transistor device regions; forming a gate structure consisting of a stacked bilayer of a disposable spacer layer on a semiconductor gate electrode on the surface of said gate dielectric layer; forming sidewall dielectric spacers on the sidewalls of said gate structure; removing said disposable spacer layer; forming a blanket conductive layer overall; forming first protective layers on the portions of said conductive layer extending approximately vertically along the sidewall dielectric spacers; forming second protective layer on the portions of said conductive layer not covered by said first protective layer; selectively removing said first protective layers; etching through said conductive layer where said first protective layers were removed to expose said conductive layer extending approximately vertically along the sidewall dielectric spacers; implanting dopant atoms in to said conductive layer and diffusing said dopant atoms in to said substrate to form source and drain junction regions; patterning said conductive layer over said field isolation regions using microlithography and etch process steps to form the transistor electrical contacts; depositing a second conductive layer which can react with said conductive layer; heating said second conductive layer to cause said second conductive layer to react with said conductive layer; and selectively removing the portions of said second conductive which did not react with said conductive layer.
Claim 32
Dependent Claim
14 words
A method as in claim 29 wherein said field isolation regions comprise silicon dioxide.
Claim 33
Dependent Claim
14 words
A method as in claim 29 wherein said gate dielectric layer comprises silicon dioxide.
Claim 34
Dependent Claim
14 words
A method as in claim 29 wherein said disposable spacer layer comprises silicon nitride.
Claim 35
Dependent Claim
14 words
A method as in claim 29 wherein said sidewall dielectric spacers comprise silicon dioxide.
Claim 36
Dependent Claim
14 words
A method as in claim 29 wherein said first protective layers comprise silicon nitride.
Claim 37
Dependent Claim
14 words
A method as in claim 29 wherein said second protective layer comprises silicon dioxide.
Claim 38
Dependent Claim
30 words
A method as in claim 29 wherein said dopant atoms comprise atoms selected from the group consisting of phosphorus, arsenic, and mixtures thereof for n-channel and boron for p-channel transistors.
Claim 39
Dependent Claim
43 words
A method as in claim 29 further comprising the step of implanting said dopant atoms into said substrate after the formation of said gate structure but before the formation of said conductive layer to form doped junction regions adjacent to said gate structure.
Claim 40
Dependent Claim
13 words
A method as in claim 29 wherein said second conductive layer comprises titanium.
Claim 41
Dependent Claim
13 words
A method as in claim 29 wherein said second conductive layer comprises cobalt.
Claim 42
Dependent Claim
22 words
A method as in claim 29 wherein said blanket conductive layer is deposited using a chemical-vapor deposition or a physical-vapor deposition process.
Claim 43
Independent Claim
152 words
A method for forming a field-effect transistor comprising the steps of: forming field isolation regions surrounding a transistor region in a semiconductor substrate; forming a gate insulator layer on the surface of said transistor region; forming a gate on the surface of said gate insulator layer; forming a spacer layer on the surface of said gate; forming from said spacer layer sidewall regions on the sidewalls of said gate; forming a blanket conductive layer overall; forming first protective regions on the portions of said conductive layer extending approximately vertical; forming second protective regions on the portions of said conductive layer not covered by said first protective regions; selectively removing said first protective regions; etching through said conductive layer where said first protective regions were removed to expose said sidewall layers; and implanting dopant atoms into said conductive layer and diffusing said dopant atoms into said substrate to form source and drain regions.
Claim 44
Independent Claim
152 words
A method for forming a field-effect transistor comprising the steps of: forming field isolation regions surrounding a transistor region in a semiconductor substrate; forming a gate insulator layer on the surface of said transistor region; forming a gate on the surface of said gate insulator layer; forming a spacer layer on the surface of said gate; forming from said spacer layer sidewall regions on the sidewalls of said gate; forming a blanket conductive layer overall; forming first protective regions on the portions of said conductive layer extending approximately vertical; forming second protective regions on the portions of said conductive layer not covered by said first protective regions; selectively removing said first protective regions; etching through said conductive layer where said first protective regions were removed to expose said sidewall layers; and implanting dopant atoms into said conductive layer and diffusing said dopant atoms into said substrate to form source and drain regions.
Claim 45
Dependent Claim
14 words
A method as in claim 41 wherein said field isolation regions comprise silicon dioxide.
Claim 46
Dependent Claim
14 words
A method as in claim 41 wherein said gate insulator layer comprises silicon dioxide.
Claim 47
Dependent Claim
13 words
A method as in claim 41 wherein said spacer layer comprises silicon nitride.
Claim 48
Dependent Claim
13 words
A method as in claim 41 wherein said sidewall regions comprise silicon dioxide.
Claim 49
Dependent Claim
14 words
A method as in claim 41 wherein said first protective layers comprise silicon nitride.
Claim 50
Dependent Claim
14 words
A method as in claim 41 wherein said second protective layer comprises silicon dioxide.
Claim 51
Dependent Claim
15 words
A method as in claim 41 wherein said dopant atoms comprise N type dopant atoms.
Claim 52
Dependent Claim
41 words
A method as in claim 41 further comprising the step of implanting second dopant atoms into said substrate after the formation of said sidewall regions but before the formation of said conductive layer to form doped regions beneath said sidewall regions.
Claim 53
Independent Claim
195 words
A method for forming a field-effect transistor comprising the steps of: forming field isolation regions surrounding a transistor region in a semiconductor substrate; forming a gate insulator layer on the surface of said transistor region; forming a gate on the surface of said gate insulator layer; forming a spacer layer on the surface of said gate; forming from said spacer layer sidewall regions on the sidewalls of said gate; forming a blanket conductive layer overall; forming first protective regions on the portions of said conductive layer extending approximately vertical; forming second protective regions on the portions of said conductive layer not covered by said first protective regions; selectively removing said first protective regions; etching through said conductive layer where said first protective regions were removed to expose said sidewall layers; implanting dopant atoms into said conductive layer and diffusing said dopant atoms into said substrate to form source and drain regions; depositing a second conductive layer which reacts with said conductive layer; heating said second conductive layer to cause said second conductive layer to react with said conductive layer; and removing the portions of said second conductive which did not react with said conductive layer.
Claim 54
Independent Claim
195 words
A method for forming a field-effect transistor comprising the steps of: forming field isolation regions surrounding a transistor region in a semiconductor substrate; forming a gate insulator layer on the surface of said transistor region; forming a gate on the surface of said gate insulator layer; forming a spacer layer on the surface of said gate; forming from said spacer layer sidewall regions on the sidewalls of said gate; forming a blanket conductive layer overall; forming first protective regions on the portions of said conductive layer extending approximately vertical; forming second protective regions on the portions of said conductive layer not covered by said first protective regions; selectively removing said first protective regions; etching through said conductive layer where said first protective regions were removed to expose said sidewall layers; implanting dopant atoms into said conductive layer and diffusing said dopant atoms into said substrate to form source and drain regions; depositing a second conductive layer which reacts with said conductive layer; heating said second conductive layer to cause said second conductive layer to react with said conductive layer; and removing the portions of said second conductive which did not react with said conductive layer.
Claim 55
Dependent Claim
14 words
A method as in claim 50 wherein said field isolation regions comprise silicon dioxide.
Claim 56
Dependent Claim
14 words
A method as in claim 50 wherein said gate insulator layer comprises silicon dioxide.
Claim 57
Dependent Claim
13 words
A method as in claim 50 wherein said spacer layer comprises silicon nitride.
Claim 58
Dependent Claim
13 words
A method as in claim 50 wherein said sidewall regions comprise silicon dioxide.
Claim 59
Dependent Claim
14 words
A method as in claim 50 wherein said first protective layers comprise silicon nitride.
Claim 60
Dependent Claim
14 words
A method as in claim 50 wherein said second protective layer comprises silicon dioxide.
Claim 61
Dependent Claim
15 words
A method as in claim 50 wherein said dopant atoms comprise N type dopant atoms.
Claim 62
Dependent Claim
41 words
A method as in claim 50 further comprising the step of implanting second dopant atoms into said substrate after the formation of said sidewall regions but before the formation of said conductive layer to form doped regions beneath said sidewall regions.
Claim 63
Dependent Claim
13 words
A method as in claim 50 wherein said second conductive layer comprises titanium.
References Cited (Backward Citations)
US4521448A
Cited
US4822754A
Cited
US4824796A
Cited
US4735916A
Cited
US4788160A
Cited
US4833099A
Cited
US5366928A
Cited
US5198378A
Cited
US4948745A
Cited
US5314832A
Cited
US5162263A
Cited
US5168072A
Cited
US5156994A
Cited
US5316977A
Cited
US5340761A
Cited
US5286667A
Cited
US5352631A
Cited
US5322809A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-03-05 | 1999-09-04 | 2000-03-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-03-05 | 2003-09-04 | 2004-03-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-03-05 | 2007-09-04 | 2008-03-05 | $7700.00 | Window Closed / Lapsed |