Patent US1999067A successfully refreshed from Google Patents.
US5489233A
Expired / Lapsed
US
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Polishing pads and methods for their use
Assignee: DuPont Electronic Materials Holding Inc
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Filing: 1994-04-08
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Granted: 1996-02-06
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Expires: 2014-04-08
Abstract
Abstract An improved polishing pad is provided comprising a solid uniform polymer sheet having no intrinsic ability to absorb or transport slurry particles having during use a surface texture or pattern which has both large and small flow channels present simultaneously which permit the transport of slurry across the surface of the polishing pad, where said channels are not part of the material structure but are mechanically produced upon the pad surface. In a preferred version of the invention, the pad texture consists of a macrotexture produced prior to use and a microtexture which is produced by abrasion by a multiplicity of small abrasive points at a regular selected interval during the use of the pad.
Inventors
- 👤 Lee M. Cook
- 👤 John V. H. Roberts
- 👤 Charles W. Jenkins
- 👤 Raj R. Pillai
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 17:00
CPC Classifications
B; B24; B24D; B24D11/00; B24B; B24B37/00; B24B37/11; B24B37/20; B24B37/26; A; A47; A47L; A47L13/00; A47L13/10; A47L13/28; B24D11/001; B24D11/005; B24D11/02; B24D13/00; B24D3/00; B24D3/02; B24D3/20; B24D3/28; B24D2203/00
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
72 words
An improved polishing pad comprising a solid uniform polymer sheet with no intrinsic ability to absorb or transport slurry particles, said sheet in use having a surface texture or pattern comprising both large and smell flow channels which together permit the transport of polishing slurry containing particles across the surface of the polishing pad, said surface texture being produced solely by external means upon the surface of said solid uniform polymer sheet.
Claim 2
Dependent Claim
72 words
An improved polishing pad comprising a solid uniform polymer sheet with no intrinsic ability to absorb or transport slurry particles, said sheet in use having a surface texture or pattern comprising both large and smell flow channels which together permit the transport of polishing slurry containing particles across the surface of the polishing pad, said surface texture being produced solely by external means upon the surface of said solid uniform polymer sheet.
Claim 3
Dependent Claim
29 words
A pad according to claim 1 wherein the projecting surfaces between said large flow channels are of dimensions ranging from 0.5 mm to 5 mm in largest lateral dimension.
Claim 4
Dependent Claim
38 words
A pad according to claim 1 wherein the width and depth of said large flow channels are equal and do not exceed more than half of the largest lateral dimension of projecting surfaces between said large flow channels.
Claim 5
Dependent Claim
30 words
A pad according to claim 1 wherein said large flow channels have a depth greater than width, said depth not to exceed 90% of the overall thickness of said pad.
Claim 6
Dependent Claim
19 words
A pad according to claim 1 wherein said large flow channels are of several widths and depths present together.
Claim 7
Dependent Claim
15 words
A pad according to claim 1 wherein said solid uniform polymer sheet is a polyurethane.
Claim 8
Dependent Claim
15 words
A pad according to claim 1 wherein said solid uniform polymer sheet is a polycarbonate.
Claim 9
Dependent Claim
15 words
A pad according to claim 1 wherein said solid uniform polymer sheet is a nylon.
Claim 10
Dependent Claim
16 words
A pad according to claim 1 wherein said solid uniform polymer sheet is an acrylic polymer.
Claim 11
Dependent Claim
15 words
A pad according to claim 1 wherein said solid uniform polymer sheet is a polyester.
Claim 12
Dependent Claim
23 words
A pad according to claim 1, 2, 3, 4 or 5 wherein said large flow channels are arranged in a concentric annular fashion.
Claim 13
Dependent Claim
33 words
A pad according to claim 1, 2, 3, 4 or 5 wherein said large flow channels are arranged in a regular square grid pattern to produce projecting surface features of substantially rectangular outline.
Claim 14
Dependent Claim
32 words
A pad according to claim 1, 2, 3, 4 or 5 wherein said large flow channels are arranged in a regular grid pattern to produce projecting surface features of substantially triangular outline.
Claim 15
Dependent Claim
27 words
A pad according to claim 1, 2, 3, 4 or 5 wherein said large flow channels are straight and are randomly oriented with respect to each other.
Claim 16
Dependent Claim
46 words
A pad according to claim 1, 2, 3, 4 or 5 wherein the width of said small flow channels is constant and is of a dimension ranging from 0.25 mm to no less than 10 times the average size of the particles in the polishing slurry.
Claim 17
Dependent Claim
44 words
A pad according to claim 1, 2, 3, 4 or 5 wherein said small flow channels are of a multiplicity of widths and depths ranging from 0.25 mm to no less than 10 times the average size of the particles in the polishing slurry.
Claim 18
Dependent Claim
22 words
A pad according to claim 15 wherein said small flow channels are straight and are randomly oriented with respect to each other.
Claim 19
Dependent Claim
22 words
A pad according to claim 16 wherein said small flow channels are straight and are randomly oriented with respect to each other.
Claim 20
Dependent Claim
86 words
A layered polishing pad comprising two or more layers of polymeric materials wherein the surface layer is comprised of a solid uniform polymer sheet with no intrinsic ability to absorb or transport slurry particles, said sheet in use having a surface texture or pattern comprising both large and small flow channels which together permit the transport of polishing slurry containing particles across the surface of the polishing pad, said surface texture being produced solely by external means upon the surface of said solid uniform polymer sheet.
Claim 21
Dependent Claim
86 words
A layered polishing pad comprising two or more layers of polymeric materials wherein the surface layer is comprised of a solid uniform polymer sheet with no intrinsic ability to absorb or transport slurry particles, said sheet in use having a surface texture or pattern comprising both large and small flow channels which together permit the transport of polishing slurry containing particles across the surface of the polishing pad, said surface texture being produced solely by external means upon the surface of said solid uniform polymer sheet.
Claim 22
Dependent Claim
22 words
A layered polishing pad according to claim 19 wherein the non-surface layer or layers is substantially more compliant than said surface layer.
Claim 23
Dependent Claim
22 words
A layered polishing pad according to claim 19 wherein the non-surface layer or layers is substantially less compliant than said surface layer.
Claim 24
Independent Claim
115 words
A method for polishing the surface of an article comprising: pressing said article against a polishing pad while polishing slurry containing particles is present on said pad and there is relative lateral motion between said article and said pad, in which said polishing pad is comprised of a solid uniform polymer sheet with no intrinsic ability to absorb or transport slurry particles, said sheet in use having a surface texture or pattern comprising both large and small flow channels which together permit the transport of said polishing slurry containing particles across the surface of said polishing pad, said surface texture being produced solely by external means upon the surface of said solid uniform polymer sheet.
Claim 25
Independent Claim
115 words
A method for polishing the surface of an article comprising: pressing said article against a polishing pad while polishing slurry containing particles is present on said pad and there is relative lateral motion between said article and said pad, in which said polishing pad is comprised of a solid uniform polymer sheet with no intrinsic ability to absorb or transport slurry particles, said sheet in use having a surface texture or pattern comprising both large and small flow channels which together permit the transport of said polishing slurry containing particles across the surface of said polishing pad, said surface texture being produced solely by external means upon the surface of said solid uniform polymer sheet.
Claim 26
Dependent Claim
16 words
A method according to claim 22 wherein said large flow channels are produced prior to use.
Claim 27
Dependent Claim
19 words
A method according to claim 22 wherein said large flow channels are produced at intervals during the polishing process.
Claim 28
Dependent Claim
18 words
A method according to claim 22 wherein said large flow channels are produced continuously during the polishing process.
Claim 29
Dependent Claim
19 words
A method according to claim 23, 24 or 25 wherein said small flow channels are produced prior to use.
Claim 30
Dependent Claim
22 words
A method according to claim 23, 24 or 25 wherein said small flow channels are produced at intervals during the polishing process.
Claim 31
Dependent Claim
21 words
A method according to claim 23, 24 or 25 wherein said small flow channels are produced continuously during the polishing process.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-02-05 | 1999-08-07 | 2000-02-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-02-05 | 2003-08-07 | 2004-02-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-02-05 | 2007-08-07 | 2008-02-06 | $7700.00 | Window Closed / Lapsed |