US5468930A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Laser sputtering apparatus
Assignee: Panasonic Holdings Corp
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Filing: 1993-03-10
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Granted: 1995-11-21
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Expires: 2013-03-10
Abstract
Abstract A laser sputtering apparatus includes a laser oscillator for emitting laser beams, a target-supporting member supporting a flat target thereon and being rotatable in a vacuum chamber while the target is inclined relative to the target-supporting member, a driving device for rotating the target-supporting member, a substrate-supporting member for supporting the substrate parallel with the target-supporting member, and an optical device for irradiating the target with the beams emitted by the laser oscillator.
Inventors
- 👤 Yukio Nishikawa
- 👤 Kunio Tanaka
- 👤 Yoshikazu Yoshida
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 14:56
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/06; H01J37/075; C; C23; C23C; C23C14/00; C23C14/22; C23C14/50; C23C14/505; C23C14/24; C23C14/28; H01J37/32; H01J37/34; H01J37/3411; H01J37/3414; H01J37/3423
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
186 words
A laser sputtering apparatus comprising: a vacuum chamber; a target-supporting member rotatably mounted in said vacuum chamber for supporting a target for rotation about a first rotational axis; a target-inclining member mounted on said target-supporting member for inclining the target relative to said target-supporting member; a substrate-supporting member for supporting a substrate parallel with said target-supporting member, said substrate-supporting member being rotatably mounted in said vacuum chamber for rotation about a second rotational axis, said second rotational axis being not coaxial with said first rotational axis; first and second rotary driving devices for rotating said target-supporting member and said substrate-supporting member about said first and second rotational axes, respectively, such that at least one of a rotational direction and an angular velocity of said substrate-supporting member is different than that of said target-supporting member; a laser oscillator for emitting a laser beam; and an optical device for causing irradiation of the target supported on said target-supporting member, said optical device comprising a condenser lens and a moving mechanism for moving said condenser lens along an optical axis of the laser beam emitted by said laser oscillator.
Claim 2
Dependent Claim
186 words
A laser sputtering apparatus comprising: a vacuum chamber; a target-supporting member rotatably mounted in said vacuum chamber for supporting a target for rotation about a first rotational axis; a target-inclining member mounted on said target-supporting member for inclining the target relative to said target-supporting member; a substrate-supporting member for supporting a substrate parallel with said target-supporting member, said substrate-supporting member being rotatably mounted in said vacuum chamber for rotation about a second rotational axis, said second rotational axis being not coaxial with said first rotational axis; first and second rotary driving devices for rotating said target-supporting member and said substrate-supporting member about said first and second rotational axes, respectively, such that at least one of a rotational direction and an angular velocity of said substrate-supporting member is different than that of said target-supporting member; a laser oscillator for emitting a laser beam; and an optical device for causing irradiation of the target supported on said target-supporting member, said optical device comprising a condenser lens and a moving mechanism for moving said condenser lens along an optical axis of the laser beam emitted by said laser oscillator.
Claim 3
Dependent Claim
48 words
A laser sputtering apparatus as recited in claim 1, wherein said optical device comprises a means for causing the laser beam to have an elliptical configuration with which it irradiates the target, with a major axis of the elliptical configuration pointing at a rotational center of the target.
Claim 4
Dependent Claim
48 words
A laser sputtering apparatus as recited in claim 1, wherein said moving mechanism comprises a means for moving said condenser lens in synchronization with rotation of the target-supporting member by said first rotary device so that an entire configuration of the laser beam on the target is constant.
Claim 5
Dependent Claim
57 words
A laser sputtering apparatus as recited in claim 1, wherein said first and second rotary driving devices are operable to rotate said target-supporting member and said substrate-supporting member about said first and second rotational axes, respectively, such that the rotational direction and the angular velocity of said substrate-supporting member are different than those of said target-supporting member.
Claim 6
Dependent Claim
53 words
A laser sputtering apparatus as recited in claim 1, wherein said first and second rotary driving devices are operable to rotate said target-supporting member and said substrate-supporting member about said first and second rotational axes, respectively, such that the rotational direction of said substrate-supporting member is different than that of said target-supporting member.
Claim 7
Dependent Claim
53 words
A laser sputtering apparatus as recited in claim 1, wherein said first and second rotary driving devices are operable to rotate said target-supporting member and said substrate-supporting member about said first and second rotational axes, respectively, such that the angular velocity of said substrate-supporting member is different than that of said target-supporting member.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-11-20 | 1999-05-22 | 1999-11-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-11-20 | 2003-05-22 | 2003-11-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-11-20 | 2007-05-22 | 2007-11-21 | $7700.00 | Window Closed / Lapsed |