US5238546A
Expired / Lapsed
US
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Method and apparatus for vaporizing materials by plasma arc discharge
Assignee: OC Oerlikon Balzers AG
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Filing: 1992-08-25
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Granted: 1993-08-24
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Expires: 2012-08-25
Abstract
Abstract In order to ignite a vaporizing arc on a target which includes at least at its surface a material of a high melting point to be vaporized, and to stabilize and guide same, an electron beam gun or a laser is forseen for generating of a local vapor cloud or a premelted spot on the surface of the target in order to therewith ignite and guide the arc spot.
Inventors
- 👤 Erich Bergmann
- 👤 Helmut Rudigier
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 19:02
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/28; C23C14/30; C23C14/32; C23C14/325
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
206 words
An apparatus for vaporizing material under vacuum conditions by means of an arc, and with a target which includes at least at a part of its surface, a material to be vaporized, comprising: means for wiring the target as cathode of an arc evaporator of the cathode spot type wherein an arc discharge burns on the material to be vaporized at a small defined spot on the material; means for forming an arc discharge and for directing the arc discharge onto an area of the material, and where a substantial part of an arc current from the means for wiring flows mostly through the small spot on the material; means for creating a beam directed toward the target for locally melting the material of the target and thus producing a local vapor cloud on the surface of the target near the spot, the means for creating the beam being spaced from the means for forming the arc discharge, the beam being in addition to the arc discharge and the spot following the local melting; and means for guiding the beam over the surface of the target in order to stabilize and guide movement of the spot as it follows the local melting and the vapor cloud.
Claim 2
Independent Claim
206 words
An apparatus for vaporizing material under vacuum conditions by means of an arc, and with a target which includes at least at a part of its surface, a material to be vaporized, comprising: means for wiring the target as cathode of an arc evaporator of the cathode spot type wherein an arc discharge burns on the material to be vaporized at a small defined spot on the material; means for forming an arc discharge and for directing the arc discharge onto an area of the material, and where a substantial part of an arc current from the means for wiring flows mostly through the small spot on the material; means for creating a beam directed toward the target for locally melting the material of the target and thus producing a local vapor cloud on the surface of the target near the spot, the means for creating the beam being spaced from the means for forming the arc discharge, the beam being in addition to the arc discharge and the spot following the local melting; and means for guiding the beam over the surface of the target in order to stabilize and guide movement of the spot as it follows the local melting and the vapor cloud.
Claim 3
Dependent Claim
70 words
The apparatus of claim 1, wherein said means for creating a beam comprises a laser, the beam comprising a laser beam, the means for guiding comprising an object lens through which the laser beam passes, and means for displacing the object lens for moving the small spot formed by the laser beam on the material to be vaporized, in a guided periodically moving manner on the surface of the target.
Claim 4
Dependent Claim
57 words
The apparatus of claim 1, wherein said means for creating a beam comprises a laser for creating a laser beam, the means for guiding comprising a moveable mounted mirror for deflecting the laser beam onto the material to be vaporized at the small spot, for guiding and moving the small spot on the surface of the target.
Claim 5
Dependent Claim
35 words
The apparatus of claim 1, wherein the means for guiding comprises means for displacing the target to move in a periodic repeating manner so that the small spot moves on the surface of the target.
Claim 6
Dependent Claim
42 words
The apparatus of claim 1, wherein the means for creating a beam comprises a laser for creating a laser beam including lens means for focusing the laser beam onto the small spot, the lens means having a focal length exceeding 40 millimeters.
Claim 7
Dependent Claim
16 words
The apparatus of claim 5, wherein the laser comprises a pulsed laser for igniting the arc.
Claim 8
Independent Claim
134 words
A method of vaporizing material in a vacuum by means of an arc at a target wired as a cathode, which target includes at least at a portion of its surface, a material to be vaporized, the method comprising: forming an arc discharge within an area where a substantial part of an arc current of the discharge flows mostly through a small spot at the surface of the target which is wired as a cathode, for defining a footprint; forming a local vapor cloud by means of a beam at the surface of the target, wherein the footprint follow the cloud, the beam being created at a location spaced from the arc discharge; and stabilizing the footprint of the arc, by guiding the beam to control the vapor cloud to be over the footprint.
Claim 9
Independent Claim
134 words
A method of vaporizing material in a vacuum by means of an arc at a target wired as a cathode, which target includes at least at a portion of its surface, a material to be vaporized, the method comprising: forming an arc discharge within an area where a substantial part of an arc current of the discharge flows mostly through a small spot at the surface of the target which is wired as a cathode, for defining a footprint; forming a local vapor cloud by means of a beam at the surface of the target, wherein the footprint follow the cloud, the beam being created at a location spaced from the arc discharge; and stabilizing the footprint of the arc, by guiding the beam to control the vapor cloud to be over the footprint.
Claim 10
Dependent Claim
21 words
The method of claim 7, comprising the production of a puddle below the vapor cloud on the surface of the target.
Claim 11
Dependent Claim
54 words
The method of claim 8, wherein the surface of the target consists a melting material and the beam is defocussed to such an extent that the puddle around the base point of the arc forms continuously a funnel into which further liquid target material flows continuously wherewith the arc is stabilized without any guiding.
Claim 12
Dependent Claim
17 words
The method of claim 7, in which the beam is guided on the surface of the target.
Claim 13
Dependent Claim
23 words
The method of claim 7, in which at a mean time span an output of the arc exceeds the output of the beam.
Claim 14
Dependent Claim
38 words
The method of claim 7, in which an energy density of the beam is controlled such that a discharge current of more than 10 amperes at a discharge voltage of merely 10 to 15 volts is made possible.
Claim 15
Dependent Claim
38 words
The method of claim 7, in which an atmosphere of an inert gas, oxygen, nitrogen, a gaseous carbon compound, a metal-organic gaseous compound or a compound containing boron is maintained in the vaporization space located above the target.
Claim 16
Dependent Claim
51 words
The method of claim 7 wherein the beam comprises an electron beam or a laser beam having a focal point, and wherein the movement of the electron beam or the laser beam focal point proceeds with such speed that the movement proper of the footprint of the arc discharge is suppressed.
Claim 17
Dependent Claim
29 words
The method of claim 11, including a substrate in the vacuum and means for utilizing the vaporized material in a vapor depositing by plasma arc on to the substrate.
Claim 18
Dependent Claim
55 words
The method of claim 15 including providing an atmosphere in the vacuum selected from the group consisting of nitrogen, oxygen and a gaseous carbon compound, so that the vaporized material reacts with the atmosphere and condenses on the substrate in the form of a coating selected from the group consisting of carbides, oxides and nitrites.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-08-23 | 1997-02-22 | 1997-08-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-08-23 | 2001-02-22 | 2001-08-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-08-23 | 2005-02-22 | 2005-08-24 | $7700.00 | Window Closed / Lapsed |