US5308461A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method to deposit multilayer films
Assignee: University of Rochester
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Filing: 1992-01-14
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Granted: 1994-05-03
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Expires: 2012-01-14
Abstract
Abstract The present invention discloses a method to deposit thin films on a substrate. An inert gas is introduced into a radio-frequency excited ion beam gun. The ions thus produced are directed to a target where molecules of the target are sputtered off and deposited on a substrate. A method of translating different targets into the ion beam is provided in order to produce multilayer films with different properties in each layer. A method is also provided to rotate the substrates into and out of the path of the sputtered molecules to insure a uniform film.
Inventors
- 👤 Robert G. Ahonen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 18:42
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/50; C23C14/505; C23C14/34; C23C14/46
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
205 words
A method to deposit multilayer films comprising the steps of: a) attaching an ion beam gun to a vacuum chamber; b) evacuating said vacuum chamber; c) placing a pair of anode plates inside said ion beam gun near a first end of said ion beam gun; d) placing a resonator inside said ion beam gun near a second end of said ion beam gun; e) introducing an inert gas into said ion beam gun; f) exciting said ion beam gun with radio-frequency energy to ionize said gas into a plasma of positively charged ions; g) containing said plasma inside said ion beam gun between said anodes and said resonator; h) extracting said positively charged ions from said ion beam gun as an ion beam; i) impacting a first target with said ion beam to sputter a first material off of said first target; j) depositing said first material on a substrate to form a first layer of sputtered material on said substrate; k) translating a second target into said ion beam; l) impacting said second target with said ion beam to sputter a second material off of said second target; and m) depositing said second material on said first layer to form a multilayer film.
Claim 2
Independent Claim
205 words
A method to deposit multilayer films comprising the steps of: a) attaching an ion beam gun to a vacuum chamber; b) evacuating said vacuum chamber; c) placing a pair of anode plates inside said ion beam gun near a first end of said ion beam gun; d) placing a resonator inside said ion beam gun near a second end of said ion beam gun; e) introducing an inert gas into said ion beam gun; f) exciting said ion beam gun with radio-frequency energy to ionize said gas into a plasma of positively charged ions; g) containing said plasma inside said ion beam gun between said anodes and said resonator; h) extracting said positively charged ions from said ion beam gun as an ion beam; i) impacting a first target with said ion beam to sputter a first material off of said first target; j) depositing said first material on a substrate to form a first layer of sputtered material on said substrate; k) translating a second target into said ion beam; l) impacting said second target with said ion beam to sputter a second material off of said second target; and m) depositing said second material on said first layer to form a multilayer film.
Claim 3
Dependent Claim
45 words
A method to deposit multilayer films as recited in claim 1 wherein said step of exciting said ion beam gun includes exciting a coil wound about the exterior of said ion beam gun with radio-frequency energy having a frequency between 10 megahertz and 50 megahertz.
Claim 4
Dependent Claim
61 words
A method to deposit multilayer films as recited in claim 1 wherein the step of translating said second target includes laterally translating a target holder, wherein said first target and said second target are placed adjacent on said target holder, and said step of translating said target holder alternately places said first target or said second target into said ion beam.
Claim 5
Dependent Claim
39 words
A method to deposit multilayer films as recited in claim 1 wherein said steps of depositing said first material and depositing said second material further includes the step of rotating said substrate into and out of a deposition region.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-05-02 | 1997-11-01 | 1998-05-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-05-02 | 2001-11-01 | 2002-05-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-05-02 | 2005-11-01 | 2006-05-03 | $7700.00 | Window Closed / Lapsed |