US4716491A
Expired / Lapsed
US
⏱️ 0.0 years remaining
High frequency plasma generation apparatus
Assignee: Hitachi Ltd
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Filing: 1985-12-09
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Granted: 1987-12-29
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Expires: 2005-12-09
Abstract
Abstract In a high frequency plasma generation apparatus used in a reactive ion etching apparatus, an ion shower apparatus, a sputter apparatus, etc. for fabricating thin films or semiconductor devices for which a fine patterning process is required, electrical breakdown is apt to be provoked at the surface of a high frequency coil, because the high frequency coil is usually inserted in a plasma. In order to remove this drawback, according to this invention, the high frequency coil is disposed in the plasma production chamber at the neighborhood of the cylindrical side wall, and thus a plasma confinement domain is formed inside of this high frequency coil by use of a magnetic field production device which generates a multi-cusp magnetic field so that the plasma confinement domain is separated from the high frequency coil. In this way, electrical breakdown on the surface of the high frequency coil is prevented and thus the apparatus according to this invention can work stably for a long time.
Inventors
- 👤 Yasunori Ohno
- 👤 Tomoe Kurosawa
- 👤 Tadashi Sato
- 👤 Youichi Ohshita
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 22:29
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32082; H01J37/321; H01J37/32431; H01J37/32623; H01J37/3266; H01J37/32688; H05; H05H; H05H1/00; H05H1/02; H05H1/10; H05H1/11
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
129 words
A high frequency plasma generation apparatus comprising: cylindrical wall means; means for hermetically sealing two ends of said cylindrical wall means, so as to form a high frequency plasma production chamber within said cylindrical wall means; means for introducing a gas into said high frequency plasma production chamber; a high frequency coil, disposed in said high frequency plasma production chamber in the neighborhood of said cylindrical wall means, for providing high frequency electric power to said gas so as to produce a plasma; and magnetic field generation means for generating a multi-cusp magnetic field for producing a plasma confinement domain inside of said high frequency coil, wherein said plasma is confined within said plasma confinement domain so as to prevent contact between said plasma and said high frequency coil.
Claim 2
Dependent Claim
129 words
A high frequency plasma generation apparatus comprising: cylindrical wall means; means for hermetically sealing two ends of said cylindrical wall means, so as to form a high frequency plasma production chamber within said cylindrical wall means; means for introducing a gas into said high frequency plasma production chamber; a high frequency coil, disposed in said high frequency plasma production chamber in the neighborhood of said cylindrical wall means, for providing high frequency electric power to said gas so as to produce a plasma; and magnetic field generation means for generating a multi-cusp magnetic field for producing a plasma confinement domain inside of said high frequency coil, wherein said plasma is confined within said plasma confinement domain so as to prevent contact between said plasma and said high frequency coil.
Claim 3
Dependent Claim
40 words
A high frequency plasma generation apparatus according to claim 1, in which said high frequency coil is mounted at an end of each of insulating supporters, the other end of said insulating supporters being fixed to said cylindrical wall means.
Claim 4
Dependent Claim
49 words
A high frequency plasma generation apparatus according to claim 1, in which said magnetic field generation means is disposed in said plasma production chamber inside of said high frequency coil and constructed so as to have poles whose polarity varies alternately in the circumferential direction of said wall means.
Claim 5
Dependent Claim
37 words
A high frequency plasma generation apparatus according to claim 3, in which said magnetic field generation means is provided with magnetic bodies forming magnetic return paths for said multi-cusp magnetic field inside of said cylindrical wall means.
Claim 6
Dependent Claim
23 words
A high frequency plasma generation apparatus according to claim 3, in which said magnetic field generation means is disposed in a cooled case.
Claim 7
Dependent Claim
60 words
A high frequency plasma generation apparatus according to claim 1, in which said magnetic field generation means is disposed on the outer surface of said cylindrical wall mean and constructed so as to have poles whose polarity varies alternately in the axial direction of said wall means and is unchanged almost continuously in the circumferential direction of said side wall.
References Cited (Backward Citations)
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US3527977A
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US4233109A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-12-28 | 1991-06-29 | 1991-12-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-12-28 | 1995-06-29 | 1995-12-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-12-28 | 1999-06-29 | 1999-12-29 | $7700.00 | Window Closed / Lapsed |