Integrated vlsi radiation/particle detector with biased pin diodes

Claim 2

A monolithic device for detecting ionization, comprising: a charge depletable substrate of high purity first conductivity type silicon having first and second surfaces, and a substrate thickness therebetween; a plurality of spaced-apart collection electrodes of highly doped first conductivity type material disposed adjacent said first surface; voltage-biasable doped well regions of second conductivity type material forming a first diode junction region at an interface with said substrate, disposed adjacent said first surface between adjacent said collection electrodes; a region of highly doped second conductivity type material forming a second diode junction region at an interface with said substrate, disposed adjacent said second surface and underlying said collection electrodes; wherein voltage differentials coupled between said collection electrodes and said well regions, and coupled between said collection electrodes and said region of highly doped second conductivity type material substantially deplete adjacent regions of said substrate and produce an electric field extending from said first and second diode junction regions into said substrate and then to said collection electrodes; wherein in the presence of ionization said substrate releases charges, released charges of a first polarity tending to follow force lines resulting from said electric field and be directed to said collection electrodes which then collects said first type charges, and wherein released charges of opposite polarity tend to be directed by said force lines to a said first or second diode junction region.

Claim 3

The device of claim 1, wherein said first conductivity type is P-type, and said second conductivity type is N-type.

Claim 4

The device of claim 1, wherein said first conductivity type is N-type, and said second conductivity type is P-type.

Claim 5

The device of claim 1, wherein said ionization is produced by at least one phenomenon selected from the group consisting of (a) incoming charged radiation directly producing primary ionization within said device, and (b) incoming neutral radiation that causes charged particles within said device to be released and to produce secondary ionization, which secondary ionization is detected by said device.

Claim 6

The device of claim 1, wherein said incoming neutral radiation is electromagnetic radiation.

Claim 7

The device of claim 1, wherein said collection electrodes occupy a small surface area relative to said doped well regions; and wherein said electric field force lines cause substantially all ionization-released charges of a given polarity to be collected by said collection electrodes, notwithstanding that said collection electrodes occupy a small surface area relative to said doped well regions.

Claim 8

The device of claim 1, a first end of said force lines terminates upon said collection electrodes, wherein a second end of some of said force lines terminates on a junction present at an interface between said substrate and said voltage-biasable doped well regions, and wherein a second end of remaining said force lines terminates on a junction present at an interface between said substrate and said region of highly doped second conductivity type material.

Claim 9

The device of claim 1, further including means for collecting charge from said collection electrodes, said means for collecting having an input node coupled to said collection electrodes and being fabricated within a said voltage-biasable doped well region.

Claim 10

A monolithic device for detecting ionization in at least two dimensions, comprising: a charge depletable substrate of high purity first conductivity type silicon having first and second surfaces, and a substrate thickness therebetween; a plurality of spaced-apart collection electrodes of highly doped first conductivity type material disposed adjacent said first surface, said electrodes disposed in an array having an x-axis and a y-axis; voltage-biasable doped well regions of second conductivity type material forming a first diode junction region at an interface with said substrate, disposed adjacent said first surface between adjacent said collection electrodes; a region of highly doped second conductivity type material forming a second diode junction region at an interface with said substrate, disposed adjacent said second surface and underlying said collection electrodes; wherein voltage differentials coupled between said collection electrodes and said well regions, and coupled between said collection electrodes and said region of highly doped second conductivity type material substantially deplete adjacent regions of said substrate and produce an electric field extending from said first and second diode junction regions into said substrate and then to said collection electrodes; wherein in the presence of ionization said substrate releases charges, released charges of a first polarity tending to follow force lines resulting from said electric field and be directed to said collection electrodes which then collects said first type charges, and wherein released charges of opposite polarity tend to be directed by said force lines to a said first or second diode junction region; and means for determining which among said collection electrodes received said released charge and for identifying where on said device said ionization was present.

Claim 11

A monolithic device for detecting ionization in at least two dimensions, comprising: a charge depletable substrate of high purity first conductivity type silicon having first and second surfaces, and a substrate thickness therebetween; a plurality of spaced-apart collection electrodes of highly doped first conductivity type material disposed adjacent said first surface, said electrodes disposed in an array having an x-axis and a y-axis; voltage-biasable doped well regions of second conductivity type material forming a first diode junction region at an interface with said substrate, disposed adjacent said first surface between adjacent said collection electrodes; a region of highly doped second conductivity type material forming a second diode junction region at an interface with said substrate, disposed adjacent said second surface and underlying said collection electrodes; wherein voltage differentials coupled between said collection electrodes and said well regions, and coupled between said collection electrodes and said region of highly doped second conductivity type material substantially deplete adjacent regions of said substrate and produce an electric field extending from said first and second diode junction regions into said substrate and then to said collection electrodes; wherein in the presence of ionization said substrate releases charges, released charges of a first polarity tending to follow force lines resulting from said electric field and be directed to said collection electrodes which then collects said first type charges, and wherein released charges of opposite polarity tend to be directed by said force lines to a said first or second diode junction region; and means for determining which among said collection electrodes received said released charge and for identifying where on said device said ionization was present.

Claim 12

The device of claim 9, wherein said means for determining includes read-out means, fabricated in said well region, for reading-out charge, said read-out means having an input node coupled to an associated said collection electrode.

Claim 13

The device of claim 10, wherein said read-out means includes a plurality of metal-on-semiconductor transistors, each said transistor having a gate node coupled to an associated said collection electrode; wherein charge collected by the associated said collection electrode remains at said gate node to modulate drain-source current flow through said transistor.

Claim 14

The device of claim 9, wherein said first conductivity type is P-type, and said second conductivity type is N-type.

Claim 15

The device of claim 9, wherein said first conductivity type is N-type, and said second conductivity type is P-type.

Claim 16

The device of claim 9, wherein said ionization is produced by at least one phenomenon selected from the group consisting of (a) incoming charged radiation directly producing primary ionization within said device, and (b) incoming neutral radiation that causes charged particles within said device to be released and to produce secondary ionization, which secondary ionization is detected by said device.

Claim 17

The device of claim 9, wherein said incoming neutral radiation is electromagnetic radiation.

Claim 18

The device of claim 9, wherein said collection electrodes occupy a small surface area relative to said doped well regions; and wherein said electric field force lines cause substantially all ionization-released charges of a given polarity to be collected by said collection electrodes, notwithstanding that said collection electrodes occupy a small surface area relative to said doped well regions.

Claim 19

The device of claim 9, wherein a first end of said force lines terminates upon said collection electrodes, wherein a second end of some of said force lines terminates on a junction present at an interface between said substrate and said voltage-biasable doped well regions, and wherein a second end of remaining said force lines terminates on a junction present at an interface between said substrate and said region of highly doped second conductivity type material.