Radiation-sensing device comprising an array of photodiodes and switching devices in a body of semiconductor material

Claim 2

A radiation-sensing device as defined in claim 2 adapted to receive radiation on said first major surface thereof, said device further comprising a coating of relatively transparent insulating material on said surface and conductive means on said insulating material for establishing electrical contact to said first region.

Claim 3

A radiation-sensing device as defined in claim 3 wherein each said conductive means has a ring-shaped portion adapted to admit radiation through the opening thereof to said photodiodes.

Claim 4

A radiation-sensing device as defined in claim 1 wherein said body outside of said regions is substantially intrinsic.

Claim 5

A radiation-sensing device as defined in claim 5 wherein said first and second regions are spaced from each other by a predetermined distance.

Claim 6

A radiation-sensing device as defined in claim 6 wherein said body has recesses adjacent to each of said second regions, each recess having a surface spaced from said first major surface by a distance greater than said predetermined distance by an amount equal to the sum of the depths of diffusion of said first and second regions.

Claim 7

A radiation-sensing device comprising a body of substantially intrinsic monocrystalline silicon having first and second spaced, parallel major surfaces, said body being of predetermined thickness and having a plurality of recesses in said second major surface for defining a plurality of minor surfaces, each spaced from said first major surface by a predetermined distance, said recesses being arranged in rows and columns, means in said body defining an array of photodiodes arranged in rows and columns, each photodiode comprising a region of one type conductivity in said body adjacent to said first major surface and disposed opposite to a recess and a region of conductivity type opposite to that of said first-mentioned region in said body adjacent to a recess, means in said body defining a plurality of switching devices, each switching device including a region of said opposite type conductivity in said body adjacent to said first major surface and adjacent to one of said first-mentioned regions, a coating of electrically insulative material on each of said major surfaces, said coatings having a plurality of openings, one adjacent to each of said regions, conductive means joining the switching devices in each row in series, said conductive means comprising a plurality of deposited metal conductors each extending in the row direction from one of said regions of one type conductivity adjacent to said first major surface, and conductive means interconnecting each of said regions of opposite type conductivity adjacent to said recesses in each column.

Claim 8

A radiation-sensing device as defined in claim 8 wherein said regions of said photodiodes are spaced from each other whereby said photodiodes are PIN structures.

Claim 9

A radiation-sensing device as defined in claim 9 wherein the regions of said switching devices are spaced from each other whereby said switching devices are PIN structures.