US5458688A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Heat treatment boat
Assignee: Tokyo Electron Ltd
•
Filing: 1994-03-08
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Granted: 1995-10-17
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Expires: 2014-03-08
Abstract
Abstract A heat treatment boat for mounting a number of disc-shaped objects to be treated at a vertical interval for heat treatment thereof in a vertical heat treatment furnace comprises arcuate or ring-shaped support members provided on support rods at a vertical interval for supporting the objects to be treated in surface contact with the undersides of peripheral parts of the objects to be treated. The heat treatment boat is disposed on a ring-shaped intermediate member of high radiant heat absorption disposed on a heat insulating cylinder. The heat treatment boat comprises support rods which are planted on an annular support member circumferentially in accordance with a contour of the objects to be treated and whose upper ends are secured to an annular fixation member. The heat treatment boat of such constitution can reduce occurrences of slips in the disc-shaped objects when heat treated.
Inventors
- 👤 Shingo Watanabe
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:01
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/10; H10P72/12; C; C23; C23C; C23C16/00; C23C16/44; C23C16/458; C23C16/4582; C23C16/4583; C23C16/4585; C30; C30B; C30B31/00; C30B31/06; C30B31/14; H10P72/127
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
67 words
A heat treatment boat for mounting a number of disc-shaped objects to be treated at a vertical interval for heat treatment thereof in a vertical heat treatment furnace, the heat treatment boat comprising two semi-arcuate support members provided on support rods at a vertical interval for supporting the objects to be treated in surface contact with the undersides of peripheral parts of the objects to be treated.
Claim 2
Dependent Claim
67 words
A heat treatment boat for mounting a number of disc-shaped objects to be treated at a vertical interval for heat treatment thereof in a vertical heat treatment furnace, the heat treatment boat comprising two semi-arcuate support members provided on support rods at a vertical interval for supporting the objects to be treated in surface contact with the undersides of peripheral parts of the objects to be treated.
Claim 3
Dependent Claim
19 words
The heat treatment boat according to claim 1, wherein the support members are removably mounted on the support rods.
Claim 4
Dependent Claim
24 words
The heat treatment boat according to claim 1, wherein the support members are formed of the same material as the object to be treated.
Claim 5
Dependent Claim
24 words
The heat treatment boat according to claim 1, wherein the support members are formed of a different material from the object to be treated.
Claim 6
Dependent Claim
44 words
The heat treatment boat according to claim 1 further comprising fixation shafts extending vertically with said support rods, and said support members each including an elongated outer diameter section with a through-hole formed therein through which a respective one of said fixation shafts extends.
Claim 7
Dependent Claim
100 words
The heat treatment boat according to claim 1 wherein said support rods each include vertically spaced grooves, said grooves each having a lower support surface for contact with an underside, peripheral portion of a respective one of said support members and an upper surface vertically spaced from said lower support surface, said grooves and said support members being dimensioned and arranged such that a peripheral edge of one of the disc shaped objects is positionable between an upperside of the one of said support members and the upper surface of the groove supporting said one of the disc shaped objects.
Claim 8
Dependent Claim
33 words
The heat treatment boat according to claim 1 wherein said semi-arcuate support members have ends spaced a fixed distance apart with said distance being designed for receiving therethrough a horizontally extending transfer arm.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-10-16 | 1999-04-17 | 1999-10-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-10-16 | 2003-04-17 | 2003-10-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-10-16 | 2007-04-17 | 2007-10-17 | $7700.00 | Window Closed / Lapsed |