Patent US5452177A successfully refreshed from Google Patents.
US5452177A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electrostatic wafer clamp
Assignee: Varian Semiconductor Equipment Associates Inc
•
Filing: 1995-01-31
•
Granted: 1995-09-19
•
Expires: 2015-01-31
Abstract
Abstract Apparatus for electrostatic clamping of a semiconductor wafer in a vacuum processing chamber wherein an ion beam is applied to the wafer. In a first embodiment, the apparatus includes an electrically conductive platen, a resilient, thermally-conductive dielectric layer affixed to the platen and one or more conductive wires positioned on the clamping surface. A clamping voltage is applied between the wires and the platen to firmly clamp the wafer against the clamping surface and depress the wires into the resilient dielectric layer. In a second embodiment, a three-phase wafer clamping apparatus includes a platen divided into three electrically isolated sections. One phase of a three-phase clamping voltage is connected to each of the platen sections. In the three-phase configuration, the wafer charging current is very small, and the clamping force is essentially constant. In a third embodiment, a six phase wafer clamping apparatus includes a platen having six symmetrically located electrodes. Voltages with six different phases are applied to the electrodes, with the voltages applied to electrodes on opposite sides of the platen being one-half cycle out of phase. The applied voltages are preferably bipolar square waves.
Inventors
- 👤 William A. Frutiger
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 07:08
CPC Classifications
H; H02; H02N; H02N13/00; H10; H10P; H10P72/00; H10P72/70; H10P72/72; H10P72/722; Y; Y10; Y10T; Y10T279/00; Y10T279/23
Claims Analysis
Total Claims: 43
Claim 1
Independent Claim
255 words
Apparatus for electrostatic clamping of a workpiece, comprising: a platen having a substantially circular, electrically insulating clamping surface for receiving a workpiece and at least six platen sectors each having a conductive electrode underlying and electrically isolated from said clamping surface said electrodes being configured in pairs symmetrically disposed about a center of said clamping surface, said clamping surface comprising a dielectric material selected to avoid sticking of the workpiece thereto after clamping; and clamping control means for applying AC voltages to said electrodes when clamping of the workpiece is desired, the workpiece being electrostatically clamped in a fixed position on said clamping surface when said AC voltages are applied to said electrodes, said clamping control means comprising means for generating at least six bipolar square wave voltages having relative phases of 0°, 60°, 120°, 180°, 240° and 300°, said square wave voltages defining a first set having phases 0° and 180°, a second set having phases 60° and 240°, and a third set having phases 120° and 300° each of said sets including positive and negative, equal amplitude, bipolar square wave voltages that are one half cycle out of phase, each of said bipolar square wave voltages having a predetermined switching speed selected to limit transients which could potentially damage the workpiece, and means for coupling said sets of square wave voltages to said Symmetrically disposed electrode pairs so as to provide symmetrical clamping of said workpiece to said clamping surface providing reliable high speed clamping with reduced risk of damage to said workpiece.
Claim 2
Dependent Claim
255 words
Apparatus for electrostatic clamping of a workpiece, comprising: a platen having a substantially circular, electrically insulating clamping surface for receiving a workpiece and at least six platen sectors each having a conductive electrode underlying and electrically isolated from said clamping surface said electrodes being configured in pairs symmetrically disposed about a center of said clamping surface, said clamping surface comprising a dielectric material selected to avoid sticking of the workpiece thereto after clamping; and clamping control means for applying AC voltages to said electrodes when clamping of the workpiece is desired, the workpiece being electrostatically clamped in a fixed position on said clamping surface when said AC voltages are applied to said electrodes, said clamping control means comprising means for generating at least six bipolar square wave voltages having relative phases of 0°, 60°, 120°, 180°, 240° and 300°, said square wave voltages defining a first set having phases 0° and 180°, a second set having phases 60° and 240°, and a third set having phases 120° and 300° each of said sets including positive and negative, equal amplitude, bipolar square wave voltages that are one half cycle out of phase, each of said bipolar square wave voltages having a predetermined switching speed selected to limit transients which could potentially damage the workpiece, and means for coupling said sets of square wave voltages to said Symmetrically disposed electrode pairs so as to provide symmetrical clamping of said workpiece to said clamping surface providing reliable high speed clamping with reduced risk of damage to said workpiece.
Claim 3
Dependent Claim
16 words
Apparatus as defined in claim 1 wherein said electrodes comprise metal layers underlying said dielectric material.
Claim 4
Dependent Claim
12 words
Apparatus as defined in claim 1 wherein said electrodes have equal areas.
Claim 5
Dependent Claim
12 words
Apparatus as defined in claim 2 wherein said clamping surface is flat.
Claim 6
Dependent Claim
26 words
Apparatus as defined in claim 2 wherein said dielectric material does not exhibit bulk polarization at the frequency and voltage used for clamping of the workpiece.
Claim 7
Dependent Claim
22 words
Apparatus as defined in claim 2 wherein said dielectric material is selected from the group consisting of alumina, sapphire and aluminum nitride.
Claim 8
Dependent Claim
12 words
Apparatus as defined in claim 2 wherein said dielectric material comprises alumina.
Claim 9
Dependent Claim
13 words
Apparatus as defined in claim 2 wherein said dielectric material is thermally conductive.
Claim 10
Dependent Claim
32 words
Apparatus as defined in claim 2 wherein said platen further includes an insulating substrate for supporting each of said electrodes and said dielectric material, and a support plate for said insulating substrate.
Claim 11
Dependent Claim
19 words
Apparatus as defined in claim 9 wherein said support plate includes a passage for circulation of a cooling fluid.
Claim 12
Dependent Claim
19 words
Apparatus as defined in claim 9 wherein said platen further includes a peripheral grounding ring for contacting said workpiece.
Claim 13
Dependent Claim
40 words
Apparatus as defined in claim 1 wherein said dielectric material comprises six dielectric insulators, one for each of said electrodes, and said electrodes each comprise a metal layer formed on a lower surface of respective ones of said dielectric insulators.
Claim 14
Dependent Claim
32 words
Apparatus as defined in claim 12 wherein said dielectric insulators comprise alumina and said electrodes comprise a molybdenum layer and a thin titanium layer between said molybdenum layer and said dielectric insulator.
Claim 15
Dependent Claim
19 words
Apparatus as defined in claim 13 wherein said electrodes are evaporated on the lower surfaces of said dielectric insulators.
Claim 16
Dependent Claim
44 words
Apparatus as defined in claim 12 wherein said platen further comprises an insulating substrate for support of said dielectric insulators and said electrodes, and wherein said dielectric insulators, having electrodes formed on lower surfaces thereof, are bonded to said insulating substrate by tetrafluoroethylene fasteners.
Claim 17
Dependent Claim
27 words
Apparatus as defined in claim 1 wherein each of said square wave voltages has a fundamental frequency in a range of about 1 Hz to 300 Hz.
Claim 18
Dependent Claim
13 words
Apparatus as defined in claim 1 wherein said workpiece comprises a semiconductor wafer.
Claim 19
Dependent Claim
27 words
Apparatus as defined in claim 1 wherein each of said square wave voltages has a fundamental frequency in a range of about 20 Hz to 50 Hz.
Claim 20
Dependent Claim
21 words
Apparatus as defined in claim 1 wherein each of said square wave voltages has a fundamental frequency of about 30 Hz.
Claim 21
Dependent Claim
14 words
Apparatus as defined in claim 19 wherein said switching speed is about 3 milliseconds.
Claim 22
Dependent Claim
28 words
Apparatus as defined in claim 19 wherein each of said bipolar square wave voltages has a peak amplitude in a range of about 900 volts to 1200 volts.
Claim 23
Dependent Claim
43 words
Apparatus as defined in claim 1 further including means for introducing a gas into a region between said workpiece and said clamping surface for conducting thermal energy between said workpiece and said clamping surface when said apparatus is utilized in a vacuum environment.
Claim 24
Dependent Claim
34 words
Apparatus as defined in claim 22 further including means for sealing the region between said workpiece and said clamping surface near an outer periphery thereof to prevent escape of said gas from said region.
Claim 25
Dependent Claim
13 words
Apparatus as defined in claim 1 further including means for cooling said platen.
Claim 26
Dependent Claim
53 words
Apparatus as defined in claim 1 wherein said electrodes comprise sector-shaped electrodes having equal areas, wherein said dielectric material is selected from the group consisting of alumina, sapphire and aluminum nitride, and wherein each of said square wave voltages has a fundamental frequency in a range of about 20 Hz to 50 Hz.
Claim 27
Dependent Claim
180 words
Apparatus for electrostatic clamping of a workpiece, comprising: a platen having an electrically insulating clamping surface for receiving a workpiece and 2n conductive electrodes, where n is an integer equal to or greater than three, underlying and electrically isolated from said clamping surface; and clamping control means for applying AC voltage to said electrodes when clamping of the workpiece is desired, the workpiece being electrostatically clamped in a fixed position on said clamping surface when said AC voltages are applied to said electrodes, said clamping control means comprising means for generating 2n bipolar square wave voltages having equally shifted relative phases, said square wave voltages defining n sets of square wave voltages, each of said sets including positive and negative, bipolar square wave voltages that are one half cycle out of phase, each of said bipolar square wave voltages having a predetermined switching speed selected to limit transients which could potentially damage the workpiece, and means for coupling said sets of square wave voltages to said electrodes so as to provide symmetrical clamping of the workpiece to said clamping surface.
Claim 28
Dependent Claim
180 words
Apparatus for electrostatic clamping of a workpiece, comprising: a platen having an electrically insulating clamping surface for receiving a workpiece and 2n conductive electrodes, where n is an integer equal to or greater than three, underlying and electrically isolated from said clamping surface; and clamping control means for applying AC voltage to said electrodes when clamping of the workpiece is desired, the workpiece being electrostatically clamped in a fixed position on said clamping surface when said AC voltages are applied to said electrodes, said clamping control means comprising means for generating 2n bipolar square wave voltages having equally shifted relative phases, said square wave voltages defining n sets of square wave voltages, each of said sets including positive and negative, bipolar square wave voltages that are one half cycle out of phase, each of said bipolar square wave voltages having a predetermined switching speed selected to limit transients which could potentially damage the workpiece, and means for coupling said sets of square wave voltages to said electrodes so as to provide symmetrical clamping of the workpiece to said clamping surface.
Claim 29
Dependent Claim
41 words
Apparatus as defined in claim 26 wherein said clamping surface is defined by dielectric insulators, one for each of said electrodes, and said electrodes each comprise a metal layer formed on a lower surface of respective ones of said dielectric insulators.
Claim 30
Dependent Claim
26 words
Apparatus as defined in claim 27 wherein said dielectric insulators are fabricated from a material selected from the group consisting of alumina, sapphire and aluminum nitride.
Claim 31
Dependent Claim
32 words
Apparatus as defined in claim 27 wherein said dielectric insulators comprise alumina and said electrodes comprise a molybdenum layer and a thin titanium layer between said molybdenum layer and said dielectric insulator.
Claim 32
Dependent Claim
27 words
Apparatus as defined in claim 26 wherein each of said square wave voltages has a fundamental frequency in a range of about 20 Hz to 50 Hz.
Claim 33
Dependent Claim
28 words
Apparatus as defined in claim 30 wherein each of said bipolar square wave voltages has a peak amplitude in a range of about 900 volts to 1200 volts.
Claim 34
Dependent Claim
43 words
Apparatus as defined in claim 26 further including means for introducing a gas into a region between said workpiece and said clamping surface for conducting thermal energy between said workpiece and said clamping surface when said apparatus is utilized in a vacuum environment.
Claim 35
Dependent Claim
34 words
Apparatus as defined in claim 32 further including means for sealing the region between said workpiece and said clamping surface near an outer periphery thereof to prevent escape of said gas from said region,
Claim 36
Dependent Claim
13 words
Apparatus as defined in claim 26 further including means for cooling said platen.
Claim 37
Dependent Claim
56 words
Apparatus as defined in claim 27 wherein said electrodes comprise sector-shaped electrodes having equal areas, wherein said clamping surface comprises a dielectric material selected from the group consisting of alumina, sapphire and aluminum nitride, and wherein each of said square wave voltages has a fundamental frequency in a range of about 20 Hz to 50 Hz.
Claim 38
Dependent Claim
235 words
Apparatus for electrostatic clamping of a workpiece in a vacuum chamber, comprising: a platen having a circular, electrically insulating clamping surface for receiving a workpiece, said clamping surface being defined by six dielectric insulators, said platen further including six electrodes underlying said dielectric insulators and an insulating substrate for supporting said electrodes and said dielectric insulators; clamping control means for applying AC voltages to said electrodes when clamping of the workpiece is desired, the workpiece being electrostatically clamped in a fixed position on said clamping surface when said AC voltages are applied to said electrodes, said clamping control means comprising means for generating six bipolar square wave voltages having relative phases of 0°, 60°, 120°, 180°, 240° and 300°, said square wave voltages defining first, second and third sets of square wave voltages, each of said sets including positive and negative, equal amplitude, bipolar square wave voltages that are one half cycle out of phase, each of said bipolar square wave voltages having a predetermined switching speed selected to limit transients which could potentially damage the workpiece, and means for coupling said sets of square wave voltages to said electrodes so as to provide symmetrical clamping of the workpiece to said clamping surface; means for introducing a gas into a region between said workpiece and said clamping surface for conducting thermal energy between said workpiece and said clamping surface; and means for cooling said platen.
Claim 39
Dependent Claim
235 words
Apparatus for electrostatic clamping of a workpiece in a vacuum chamber, comprising: a platen having a circular, electrically insulating clamping surface for receiving a workpiece, said clamping surface being defined by six dielectric insulators, said platen further including six electrodes underlying said dielectric insulators and an insulating substrate for supporting said electrodes and said dielectric insulators; clamping control means for applying AC voltages to said electrodes when clamping of the workpiece is desired, the workpiece being electrostatically clamped in a fixed position on said clamping surface when said AC voltages are applied to said electrodes, said clamping control means comprising means for generating six bipolar square wave voltages having relative phases of 0°, 60°, 120°, 180°, 240° and 300°, said square wave voltages defining first, second and third sets of square wave voltages, each of said sets including positive and negative, equal amplitude, bipolar square wave voltages that are one half cycle out of phase, each of said bipolar square wave voltages having a predetermined switching speed selected to limit transients which could potentially damage the workpiece, and means for coupling said sets of square wave voltages to said electrodes so as to provide symmetrical clamping of the workpiece to said clamping surface; means for introducing a gas into a region between said workpiece and said clamping surface for conducting thermal energy between said workpiece and said clamping surface; and means for cooling said platen.
Claim 40
Dependent Claim
57 words
Apparatus as defined in claim 36 wherein said electrodes comprise sector-shaped electrodes having equal areas, wherein said dielectric insulators are fabricated of a material selected from the group consisting of alumina, sapphire and aluminum nitride, and wherein each of said square wave voltages has a fundamental frequency in a range of about 20 Hz to 50 Hz.
Claim 41
Dependent Claim
190 words
Apparatus for electrostatic clamping of a workpiece, comprising: a platen having an electrically insulating clamping surface for receiving a workpiece and 2n conductive electrodes, where n is an integer equal to or greater than three, underlying and electrically isolated from said clamping surface; and clamping control means for applying AC voltages to said electrodes when clamping of the workpiece is desired, the workpiece being electrostatically clamped in a fixed position on said clamping surface when said AC voltages are applied to said electrodes, said clamping control means comprising means for generating six bipolar square wave voltages having relative phases of 0°, 60°, 120°, 180°, 240° and 300°, said square wave voltages defining first, second and third sets of square wave voltages, each of said sets including positive and negative, equal amplitude, bipolar square wave voltages that are one-half cycle out of phase, each of said bipolar square wave voltages having a predetermined switching speed selected to limit transients which could potentially damage the workpiece, and means for coupling said sets of square wave voltages to said electrodes so as to provide symmetrical clamping of the workpiece to said clamping surface.
Claim 42
Dependent Claim
190 words
Apparatus for electrostatic clamping of a workpiece, comprising: a platen having an electrically insulating clamping surface for receiving a workpiece and 2n conductive electrodes, where n is an integer equal to or greater than three, underlying and electrically isolated from said clamping surface; and clamping control means for applying AC voltages to said electrodes when clamping of the workpiece is desired, the workpiece being electrostatically clamped in a fixed position on said clamping surface when said AC voltages are applied to said electrodes, said clamping control means comprising means for generating six bipolar square wave voltages having relative phases of 0°, 60°, 120°, 180°, 240° and 300°, said square wave voltages defining first, second and third sets of square wave voltages, each of said sets including positive and negative, equal amplitude, bipolar square wave voltages that are one-half cycle out of phase, each of said bipolar square wave voltages having a predetermined switching speed selected to limit transients which could potentially damage the workpiece, and means for coupling said sets of square wave voltages to said electrodes so as to provide symmetrical clamping of the workpiece to said clamping surface.
Claim 43
Dependent Claim
56 words
Apparatus as defined in claim 38 wherein said electrodes comprise sector-shaped electrodes having equal areas, wherein said clamping surface comprises a dielectric material selected from the group consisting of alumina, sapphire and aluminum nitride, and wherein each of said square wave voltages has a fundamental frequency in a range of about 20 Hz to 50 Hz.
References Cited (Backward Citations)
US3717801A
Cited
US3993509A
Cited
US3916270A
Cited
US4139051A
Cited
US4184188A
Cited
US4282924A
Cited
US4384918A
Cited
US4502094A
Cited
US4412133A
Cited
US4480284A
Cited
US4535835A
Cited
US4457359A
Cited
US4520421A
Cited
US4922099A
Cited
US4665463A
Cited
US4692836A
Cited
US4554611A
Cited
US4724510A
Cited
US4864461A
Cited
US5103367A
Cited
US4832781A
Cited
US5179498A
Cited
JPH04132239A
Cited
US5166856A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-09-18 | 1999-03-20 | 1999-09-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-09-18 | 2003-03-20 | 2003-09-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-09-18 | 2007-03-20 | 2007-09-19 | $7700.00 | Window Closed / Lapsed |