US5420663A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for exposing peripheral portion of substrate
Assignee: Nikon Corp
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Filing: 1994-03-18
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Granted: 1995-05-30
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Expires: 2014-03-18
Abstract
Abstract An exposure apparatus for exposing a peripheral portion of a substrate to light comprises a rotating member for rotating a substrate to which a resist is applied, an irradiating system for irradiating the substrate with light which is sensed by the resist, a position detecting system for detecting a relative position between the light and the substrate in a radial direction of the substrate, a moving system for making a relative movement between the light and the substrate in the radial direction of the substrate, a periphery detecting member for detecting outer-periphery information corresponding to a shape of an outer periphery of the substrate, a control system for servo-controlling the moving system in accordance with the outer periphery of the substrate to make the width of the light emitted on the substrate constant, a characteristic detecting member for detecting a specific part of the peripheral portion of the substrate, and a control characteristic changing member for changing a control quantity of the control system at the specific part of the peripheral portion of the substrate.
Inventors
- 👤 Masao Nakajima
- 👤 Masayoshi Naito
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 09:16
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/20; G03F7/2022
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
175 words
An exposure apparatus for exposing a peripheral portion of a substrate on which a resist is applied, said apparatus comprising: a rotating member for rotating said substrate; a first irradiating system for irradiating said substrate with light which is sensed by said resist; a position detecting system for detecting a relative position between said light and said substrate in a radial direction of said substrate; a moving system for making relative movement between said light and said substrate in said radial direction of said substrate; a periphery detecting system for detecting outer-periphery information corresponding to a shape of an outer periphery of said substrate; a control system for servo-controlling said moving system in accordance with said outer periphery of said substrate to keep said width of said light emitted on said substrate constant; a characteristic detecting means for detecting a specific part of said peripheral portion of said substrate; and a control characteristic changing means for changing a control quantity of said control system at said specific part of said peripheral portion of said substrate.
Claim 2
Dependent Claim
175 words
An exposure apparatus for exposing a peripheral portion of a substrate on which a resist is applied, said apparatus comprising: a rotating member for rotating said substrate; a first irradiating system for irradiating said substrate with light which is sensed by said resist; a position detecting system for detecting a relative position between said light and said substrate in a radial direction of said substrate; a moving system for making relative movement between said light and said substrate in said radial direction of said substrate; a periphery detecting system for detecting outer-periphery information corresponding to a shape of an outer periphery of said substrate; a control system for servo-controlling said moving system in accordance with said outer periphery of said substrate to keep said width of said light emitted on said substrate constant; a characteristic detecting means for detecting a specific part of said peripheral portion of said substrate; and a control characteristic changing means for changing a control quantity of said control system at said specific part of said peripheral portion of said substrate.
Claim 3
Dependent Claim
21 words
An exposure apparatus according to claim 1, wherein said specific part comprises a notch or a cutout formed in said substrate.
Claim 4
Dependent Claim
20 words
An exposure apparatus according to claim 1, wherein said specific part comprises ends of a cut portion of said substrate.
Claim 5
Dependent Claim
44 words
An exposure apparatus according to claim 2, wherein said periphery detecting means memorizes said detected outer-periphery information, and said control characteristic changing means changes said control quantity of said control system in response to said outer-periphery information except for information on said specific part.
Claim 6
Dependent Claim
31 words
An exposure apparatus according to claim 4, wherein said control characteristic changing means changes said control quantity in response to said outer-periphery information at two adjacent positions on said specific part.
Claim 7
Dependent Claim
24 words
An exposure apparatus according to claim 1, wherein said control characteristic changing means lowers a gain of said control system at said specific part.
Claim 8
Dependent Claim
42 words
An exposure apparatus according to claim 6, wherein said periphery detecting means outputs a deviation signal corresponding to a deviation from a target value of said width, and said characteristic detecting means detects said specific part in response to said deviation signal.
Claim 9
Dependent Claim
24 words
An exposure apparatus according to claim 7, wherein said characteristic detecting means detects said specific part when said deviation signal exceeds a predetermined value.
Claim 10
Dependent Claim
22 words
An exposure apparatus according to claim 7, wherein said characteristic detecting means detects said specific part when said deviation signal is divergent.
Claim 11
Dependent Claim
110 words
An exposure apparatus according to claim 1, further comprising: a second irradiating system for emitting non-exposure light which is not sensed by said resist; a light receiving system confronting said second irradiating system, for receiving said non-exposure light; and said moving system making a relative movement between said non-exposure light and said substrate; a controlling and memorizing system for servo-controlling said moving system to irradiate said peripheral portion of said substrate at a predetermined width with said non-exposure light and for memorizing a relative position between said non-exposure light and said substrate; and wherein said control member controls said moving system in response to said memorized relative position upon exposure.
Claim 12
Dependent Claim
157 words
An exposure apparatus for exposing a peripheral portion of a substrate on which a resist is applied, said apparatus comprising: an irradiating system for irradiating a substrate to light which is sensed by the resist mounted on said substrate; a first moving system for moving said light along said substrate; a second moving system for making a relative movement between said light and said substrate to change an exposure width of a peripheral portion of said substrate; an output means for outputting a deviation signal corresponding to a deviation from a target value of a relative position between said irradiating system and said substrate; a first control system for controlling said second moving system to reduce said deviation signal to substantially zero; a detecting means for detecting wave form-information of said deviation signal; and a second control system for lowering a servo gain for said deviation signal in response to said wave form-information of said deviation signal.
Claim 13
Dependent Claim
157 words
An exposure apparatus for exposing a peripheral portion of a substrate on which a resist is applied, said apparatus comprising: an irradiating system for irradiating a substrate to light which is sensed by the resist mounted on said substrate; a first moving system for moving said light along said substrate; a second moving system for making a relative movement between said light and said substrate to change an exposure width of a peripheral portion of said substrate; an output means for outputting a deviation signal corresponding to a deviation from a target value of a relative position between said irradiating system and said substrate; a first control system for controlling said second moving system to reduce said deviation signal to substantially zero; a detecting means for detecting wave form-information of said deviation signal; and a second control system for lowering a servo gain for said deviation signal in response to said wave form-information of said deviation signal.
Claim 14
Independent Claim
107 words
A method of exposing a peripheral portion of a substrate to light, said method comprising: the step of irradiating a substrate to light which is sensed by a resist mounted on said substrate while said light is relatively moved with said substrate along an outer periphery of said substrate; the step of making a relative radial movement between said light and said substrate to adjust an exposure width to a predetermined value; the step of detecting a specific part of said peripheral portion of said substrate; and the step of adjusting a control quantity for said relative radial movement when said light is at said specific part.
Claim 15
Independent Claim
107 words
A method of exposing a peripheral portion of a substrate to light, said method comprising: the step of irradiating a substrate to light which is sensed by a resist mounted on said substrate while said light is relatively moved with said substrate along an outer periphery of said substrate; the step of making a relative radial movement between said light and said substrate to adjust an exposure width to a predetermined value; the step of detecting a specific part of said peripheral portion of said substrate; and the step of adjusting a control quantity for said relative radial movement when said light is at said specific part.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-05-29 | 1998-11-28 | 1999-05-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-05-29 | 2002-11-28 | 2003-05-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-05-29 | 2006-11-28 | 2007-05-30 | $7700.00 | Window Closed / Lapsed |