US5361121A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Periphery exposing method and apparatus therefor
Assignee: Nikon Corp
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Filing: 1991-05-02
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Granted: 1994-11-01
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Expires: 2011-05-02
Abstract
Abstract Prior to a periphery exposing operation, a light emitting unit and a light receiving unit are retracted to a position separate from a wafer, and a calibrating operation is conducted in the retracted position utilizing a light shield plate different from the wafer to be exposed, thereby obtaining a servo control reference signal for the exposure. At the exposure of the periphery portion of the wafer, the exposure width is controlled according to the reference signal. It is therefore rendered possible to achieve exact peripheral exposure, including the intensity and intensity distribution of the exposing light beam immediately before the irradiation of the peripheral portion of the wafer.
Inventors
- 👤 Ken Hattori
- 👤 Kesayoshi Amano
- 👤 Masao Nakajima
- 👤 Masayoshi Naito
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 14:47
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/20; G03F7/2022
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
208 words
A periphery exposure apparatus for exposing a peripheral part of a substrate coated thereon with photoresist, comprising: irradiating means for emitting a light beam actinic to the photoresist on said substrate; light receiving means so positioned as to receive said light beam; a light shield member having a reference edge corresponding to a periphery of said substrate; switch means for switching a relative positional relationship of said light beam, said light shield member and said substrate between a first state in which the reference edge of said light shield member and said light beam are so aligned that said light shield member intercepts said light beam by a predetermined proportion, and a second state in which the periphery of said substrate and said light beam are so aligned that said substrate intercepts a part of said light beam; memory means for storing, as a reference signal, a signal based on an output of said light receiving means in said first state; and regulation means for regulating the positional relationship between said light beam and said substrate in said second state such that a signal based on an output of said light receiving means in said second state is constantly maintained in a predetermined relationship with said reference signal.
Claim 2
Dependent Claim
208 words
A periphery exposure apparatus for exposing a peripheral part of a substrate coated thereon with photoresist, comprising: irradiating means for emitting a light beam actinic to the photoresist on said substrate; light receiving means so positioned as to receive said light beam; a light shield member having a reference edge corresponding to a periphery of said substrate; switch means for switching a relative positional relationship of said light beam, said light shield member and said substrate between a first state in which the reference edge of said light shield member and said light beam are so aligned that said light shield member intercepts said light beam by a predetermined proportion, and a second state in which the periphery of said substrate and said light beam are so aligned that said substrate intercepts a part of said light beam; memory means for storing, as a reference signal, a signal based on an output of said light receiving means in said first state; and regulation means for regulating the positional relationship between said light beam and said substrate in said second state such that a signal based on an output of said light receiving means in said second state is constantly maintained in a predetermined relationship with said reference signal.
Claim 3
Dependent Claim
14 words
An apparatus according to claim 1, further comprising rotation means for rotating said substrate.
Claim 4
Dependent Claim
64 words
An apparatus according to claim 1, further comprising light path splitting means positioned between said substrate and said light receiving means in a path of said light beam, with a predetermined angle thereto, and adapted to irradiate the peripheral part of a rear face of said substrate by part of the light beam emitted by said irradiating means and not intercepted by said substrate.
Claim 5
Dependent Claim
49 words
An apparatus according to claim 1, wherein said light shield member and said substrate are arranged in a predetermined positional relationship, and said switch means is adapted to move said light beam relative to said light shield member and said substrate for switching between said first and second states.
References Cited (Backward Citations)
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JPS6060724A
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US4910549A
Cited
US4899195A
Cited
JPH0256924A
Cited
US5028955A
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US5229811A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-10-31 | 1998-05-02 | 1998-11-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-10-31 | 2002-05-02 | 2002-11-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-10-31 | 2006-05-02 | 2006-11-01 | $7700.00 | Window Closed / Lapsed |