US5028955A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Exposure apparatus
Assignee: Tokyo Electron Ltd
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Filing: 1990-02-14
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Granted: 1991-07-02
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Expires: 2010-02-14
Abstract
Abstract An exposure apparatus of this invention is used in an exposure process of semiconductor and LCD devices. The exposure apparatus includes a stage on which a semiconductor wafer is placed, a rotating mechanism for rotating the stage, a radiation unit arranged to oppose a support surface of the stage, a slider mechanism for reciprocating the radiation unit along a straight line passing through the center of the support surface of the stage, an exposure range input unit for inputting a desired exposure range of the wafer, an exposure range memory unit for storing the input exposure range, a CCD image sensor for detecting a reference position of the wafer, a relative position detector for detecting a relative position between the detected reference position and the radiation unit, a controller for controlling the sliding mechanism in correspondence with the relative position and the exposure range, and a light amount control mechanism for controlling an amount of light radiated from the irradiation mechanism to the wafer in correspondence with the relative position and the exposure range.
Inventors
- 👤 Yasushi Hayashida
- 👤 Noriyuki Anai
- 👤 Osamu Hirakawa
- 👤 Masami Akimoto
- 👤 Yasuhiro Sakamoto
- 👤 Keisuke Shigaki
- 👤 Masashi Moriyama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 20:31
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/70716; G03F7/70725; H; H10; H10P; H10P76/00
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
186 words
An exposure apparatus comprising: stage means on which an object is placed, said object being coated with a film for forming a device pattern; rotating means for rotating said stage means; radiating means for radiating a light on said object and arranged to oppose said object on said stage means; move means for moving said radiating means across a peripheral edge of the object on the stage means; exposure range input means for inputting a desired exposure range of the object; exposure range storage means for storing an information of input exposure range; position detecting means for detecting a position of said radiating means and a reference position of the object; positional relationship obtaining means for obtaining a positional relationship between the detected position of the radiating means and the reference position; control means for controlling said move means in correspondence with the positional relationship and the exposure range read out from said exposure range storage means; and light amount control means for controlling an amount of light radiated from said radiating means to the object in correspondence with the positional relationship and the exposure range.
Claim 2
Dependent Claim
186 words
An exposure apparatus comprising: stage means on which an object is placed, said object being coated with a film for forming a device pattern; rotating means for rotating said stage means; radiating means for radiating a light on said object and arranged to oppose said object on said stage means; move means for moving said radiating means across a peripheral edge of the object on the stage means; exposure range input means for inputting a desired exposure range of the object; exposure range storage means for storing an information of input exposure range; position detecting means for detecting a position of said radiating means and a reference position of the object; positional relationship obtaining means for obtaining a positional relationship between the detected position of the radiating means and the reference position; control means for controlling said move means in correspondence with the positional relationship and the exposure range read out from said exposure range storage means; and light amount control means for controlling an amount of light radiated from said radiating means to the object in correspondence with the positional relationship and the exposure range.
Claim 3
Dependent Claim
21 words
The apparatus according to claim 1, wherein said exposure range input means comprises a two-dimensional sensor for detecting a two-dimensional data.
Claim 4
Dependent Claim
16 words
The apparatus according to claim 1, wherein said position detecting means comprises a CCD image sensor.
Claim 5
Dependent Claim
22 words
The apparatus according to claim 3, wherein said position detecting means comprises a back light for contrasting a signal from the sensor.
Claim 6
Dependent Claim
18 words
The apparatus according to claim 1, wherein said light amount control means selectively controls the desired exposure range.
Claim 7
Dependent Claim
14 words
The apparatus according to claim 1, wherein said radiating means comprises an optical fiber.
Claim 8
Dependent Claim
13 words
The apparatus according to claim 1, wherein said radiating means comprises two lenses.
Claim 9
Dependent Claim
13 words
The apparatus according to claim 1, wherein said radiating means comprises an aperture.
Claim 10
Dependent Claim
25 words
The apparatus according to claim 1, wherein said rotating means comprises a stepping motor so that said radiating means is synchronized with said rotating means.
Claim 11
Dependent Claim
16 words
The apparatus according to claim 1, wherein said radiating means is mounted on a stationary member.
References Cited (Backward Citations)
JPS5337706A
Cited
JPS5512750A
Cited
JPS5858731A
Cited
JPS5881932A
Cited
JPS58159535A
Cited
JPS58191434A
Cited
JPS58200537A
Cited
JPS5967930A
Cited
JPS59117123A
Cited
JPS6094660A
Cited
JPS6094661A
Cited
JPS60110118A
Cited
JPS60189937A
Cited
JPS60121719A
Cited
JPS6173330A
Cited
JPS61111151A
Cited
JPS61121333A
Cited
JPS61184824A
Cited
JPS61219135A
Cited
JPS61239625A
Cited
US4647172A
Cited
JPS62142321A
Cited
US4910549A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-07-01 | 1994-12-31 | 1995-07-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-07-01 | 1998-12-31 | 1999-07-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-07-01 | 2002-12-31 | 2003-07-02 | $7700.00 | Window Closed / Lapsed |