US4647172A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Resist development method
Assignee: GCA Corp
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Filing: 1985-05-17
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Granted: 1987-03-03
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Expires: 2005-05-17
Abstract
Abstract In the resist development method disclosed herein, the spin development of a resist coating on the surface of a semiconductor wafer is monitored by measuring light scattered back from the wafer surface from an incandescent source. During development, the sensed light level oscillates due to optical fringing caused by the thinning of the resist layer in the exposed areas and the fringe generated oscillation essentially stops when the development breaks through in the exposed areas. By comparing sample data obtained from the sensed light level with template data representing a known or characteristic behavior, a control point corresonding to the last fringe may be determined. Development is then terminated a calculated time after the control point.
Inventors
- 👤 William T. Batchelder
- 👤 John A. Piatt
- 👤 Kenneth M. Sautter
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 07:39
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/30; G03F7/3021; G03F7/3028; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/948
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
163 words
Apparatus for developing exposed resist on the surface of a semiconductor wafer during fabrication of integrated circuits which comprises: means for spinning the wafer; means for spraying developer on the wafer surface to cause development of the resist; means illuminating at least a spot on the wafer surface from an incandescent light source; a photodetector, for sensing light scattered back from the illuminated spot on the wafer surface and generating therefrom a signal voltage; means for periodically digiting said voltage to generate sample data; means for storing reference data representing a template characteristic of a representative development process, said reference data including a reference control point which characterizes a known point in the reference development process; means for comparing the sample data and the reference data to obtain a best fit and to thereby locate a control point in the sample data which corresponds to the reference control point; and means for terminating development a calculated time interval after said sample control point.
Claim 2
Dependent Claim
163 words
Apparatus for developing exposed resist on the surface of a semiconductor wafer during fabrication of integrated circuits which comprises: means for spinning the wafer; means for spraying developer on the wafer surface to cause development of the resist; means illuminating at least a spot on the wafer surface from an incandescent light source; a photodetector, for sensing light scattered back from the illuminated spot on the wafer surface and generating therefrom a signal voltage; means for periodically digiting said voltage to generate sample data; means for storing reference data representing a template characteristic of a representative development process, said reference data including a reference control point which characterizes a known point in the reference development process; means for comparing the sample data and the reference data to obtain a best fit and to thereby locate a control point in the sample data which corresponds to the reference control point; and means for terminating development a calculated time interval after said sample control point.
Claim 3
Dependent Claim
162 words
Apparatus for developing exposed resist on the surface of a semiconductor wafer during fabrication of integrated circuits which comprises: means for spinning the wafer; means for spraying developer on the wafer surface to cause development of the resist; means illuminating at least a spot on the wafer surface; a photodetector, for sensing light scattered back from the illuminated spot on the wafer surface and generating therefrom a signal voltage; means for periodically digiting said voltage to generate sample data; means for storing reference data representing a template characteristic of optical fringes generated by a representative development process, said reference data including a reference control point which characterizes a last fringe in the reference development process; means for comparing the sample data and the reference data to obtain a best fit and to thereby locate a control point in the sample data which corresponds to the reference control point; and means for terminating development a calculated time interval after said sample control point.
Claim 4
Dependent Claim
162 words
Apparatus for developing exposed resist on the surface of a semiconductor wafer during fabrication of integrated circuits which comprises: means for spinning the wafer; means for spraying developer on the wafer surface to cause development of the resist; means illuminating at least a spot on the wafer surface; a photodetector, for sensing light scattered back from the illuminated spot on the wafer surface and generating therefrom a signal voltage; means for periodically digiting said voltage to generate sample data; means for storing reference data representing a template characteristic of optical fringes generated by a representative development process, said reference data including a reference control point which characterizes a last fringe in the reference development process; means for comparing the sample data and the reference data to obtain a best fit and to thereby locate a control point in the sample data which corresponds to the reference control point; and means for terminating development a calculated time interval after said sample control point.
Claim 5
Dependent Claim
157 words
Apparatus for developing exposed resist on the surface of a semiconductor wafer during fabrication of integrated circuits which comprises: means for spinning the wafer; means for spraying developer on the wafer surface to cause development of the resist; means illuminating at least a spot on the wafer surface during development from an incandescent light source filtered to provide only non-exposing wavelengths; a photodetector, for sensing light scattered back from the illuminated spot on the wafer surface and generating therefrom a signal voltage; means for periodically digiting said voltage to generate sample data; means for storing reference data representing a template characteristic of optical fringes generated by a representative development process, said reference data including a reference control point which means for analyzing the sample data to locate a control point in the sample data which characterizes a last fringe in the reference development process; and means for terminating development a calculated time interval after said control point.
Claim 6
Dependent Claim
157 words
Apparatus for developing exposed resist on the surface of a semiconductor wafer during fabrication of integrated circuits which comprises: means for spinning the wafer; means for spraying developer on the wafer surface to cause development of the resist; means illuminating at least a spot on the wafer surface during development from an incandescent light source filtered to provide only non-exposing wavelengths; a photodetector, for sensing light scattered back from the illuminated spot on the wafer surface and generating therefrom a signal voltage; means for periodically digiting said voltage to generate sample data; means for storing reference data representing a template characteristic of optical fringes generated by a representative development process, said reference data including a reference control point which means for analyzing the sample data to locate a control point in the sample data which characterizes a last fringe in the reference development process; and means for terminating development a calculated time interval after said control point.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1990-03-02 | 1990-09-01 | 1991-03-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-03-02 | 1994-09-01 | 1995-03-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-03-02 | 1998-09-01 | 1999-03-03 | $7700.00 | Window Closed / Lapsed |