Protection and packaging system for semiconductor devices

Claim 2

A protection and packaging system for a semiconductor circuit with a planar surface having an active region thereon, comprising: a flat, hermetically impermeable protective member at least as large as the semiconductor circuit active region having an electrically insulative surface for entirely covering and sealing the region; and an adhesive substance entirely covering the semiconductor circuit active region for securely bonding said protective member directly to the semiconductor circuit active region to seal, protect and package the active region.

Claim 3

A thermally matched and sealed protection and packaging system for a semiconductor circuit having a predetermined coefficient of thermal expansion and with a planar surface having an active region thereon, comprising: a flat, hermetically impermeable protective member at least as large as the semiconductor circuit active region having an electrically insulative surface for entirely covering and sealing the region, said protective member having a coefficient of thermal expansion the same as or closely matching that of the semiconductor circuit; and an adhesive substance entirely covering the semiconductor circuit active region for securely bonding said protective member directly to the semiconductor circuit active region to seal, protect and package the active region.

Claim 4

A thermally matched and sealed protection and packaging system for a semiconductor circuit having a predetermined coefficient of thermal expansion and with a planar surface having an active region thereon, comprising: a flat, hermetically impermeable protective member at least as large as the semiconductor circuit active region having an electrically insulative surface for entirely covering and sealing the region, said protective member having a coefficient of thermal expansion the same as or closely matching that of the semiconductor circuit; and an adhesive substance entirely covering the semiconductor circuit active region for securely bonding said protective member directly to the semiconductor circuit active region to seal, protect and package the active region.

Claim 5

An electronic circuit packaging and protection assembly for an electronic circuit with a planar surface having an active region thereon and a plurality of electrical contact pads within the active region, comprising: a multiple-layer, flat, hermetically impermeable protective member at least as large as the electronic circuit active region having an electrically insulative surface for covering and sealing at least a portion of the active region, said protective member including a partially electrically conductive layer and at least one opening therein for exposing at least some of the contact pads to allow electrical connection between at least one of the exposed pads and said partially electrically conductive layer; and an adhesive substance entirely covering the portion of the electronic circuit active region to be sealed by said protective member, for securely bonding said protective member to the electronic circuit active region to be sealed to seal, protect and package the active region.

Claim 6

An electronic circuit packaging and protection assembly for an electronic circuit with a planar surface having an active region thereon and a plurality of electrical contact pads within the active region, comprising: a multiple-layer, flat, hermetically impermeable protective member at least as large as the electronic circuit active region having an electrically insulative surface for covering and sealing at least a portion of the active region, said protective member including a partially electrically conductive layer and at least one opening therein for exposing at least some of the contact pads to allow electrical connection between at least one of the exposed pads and said partially electrically conductive layer; and an adhesive substance entirely covering the portion of the electronic circuit active region to be sealed by said protective member, for securely bonding said protective member to the electronic circuit active region to be sealed to seal, protect and package the active region.

Claim 7

The system of claim 1 further including edge sealing means for sealing and protecting the periphery of said semiconductor circuit.

Claim 8

The system of claim 2 in which said edge sealing means includes an organic material.

Claim 9

The system of claim 1 in which said protective member has a coefficient of thermal expansion which matches or closely matches that of said semiconductor circuit.

Claim 10

The system of claim 6 in which said semiconductor circuit and said protective member include silicon.

Claim 11

The system of claim 6 in which said semiconductor circuit and said protective member include gallium arsenide.

Claim 12

The system of claim 1 in which said protective member is selected from the group containing silicon, aluminum nitride, silicon carbide, gallium arsenide, alumina and a carbon/metal composite material.

Claim 13

The system of claim 1 in which said protective member is thermally conductive.

Claim 14

The system of claim 1 in which at least one surface of said protective member is electrically insulative.

Claim 15

The system of claim 11 in which said protective member is made of electrically insulative material.

Claim 16

The system of claim 11 in which said electrically insulative surface is adjacent to the active region of the semiconductor circuit.

Claim 17

A system of claim 1 in which said adhesive substance includes glass or an organic adhesive.

Claim 18

A system of claim 1 in which said adhesive substance and said protective member form a low-permeability seal for said semiconductor circuit.

Claim 19

The system of claim 2 further including edge sealing means for sealing and protecting the periphery of said semiconductor circuit.

Claim 20

The system of claim 16 in which said edge sealing means includes an organic material.

Claim 21

The assembly of claim 3 in which said protective member has a coefficient of thermal expansion which matches or closely matches that of said electronic circuit.

Claim 22

The assembly of claim 3 in which said protective member includes silicon.

Claim 23

The assembly of claim 3 in which said adhesive means is electrically insulative and thermally conductive.

Claim 24

The assembly of claim 3 in which said protective member includes at least two at least partially electrically conductive layers separated by an insulaing layer, all bonded together, for allowing electrical connection between the exposed pads and both said conductive layers.