Patent US5407866A successfully refreshed from Google Patents.
US5407866A
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Method for forming a dielectric layer on a high temperature metal layer
Assignee: Motorola Solutions Inc
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Filing: 1994-02-02
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Granted: 1995-04-18
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Expires: 2014-02-02
Abstract
Abstract A method for forming a dielectric layer (16) on a high temperature metal layer (14) is provided. By processing the high temperature metal layer (14) with a non-oxidizing photoresist stripper and absent a photoresist hardening step, adhesion between the high temperature metal layer (14) and a dielectric layer (16) subsequently formed on the high temperature metal layer (14) is significantly improved. The dielectric layer (16) will adhere to the high temperature metal layer (14) in high temperature environments. The method is suitable for forming multi-layer metallization and buried layer structures for semiconductor integrated circuits.
Inventors
- 👤 James A. Sellers
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:41
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/0698; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/6336; H10P14/65; H10P14/6516; H10W20/40; H10W20/41; H10W20/44; H10W20/4403; H10W20/45; H10W20/48; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/948; Y10S438/974
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
176 words
A method for forming a dielectric layer on a high temperature metal layer so that the dielectric layer adheres to the high temperature metal layer when exposed to elevated temperature comprising the steps of: providing a substrate having a first and second surface; forming a high temperature metal layer on the first surface of the substrate, wherein the high temperature metal layer has a favorable free energy of oxide formation; depositing a photoresist layer on the high temperature metal layer; selectively exposing the photoresist layer to light; developing the photoresist layer to selectively remove photoresist to form a pattern in the photoresist layer; etching the high temperature metal layer to conform to the pattern in the photoresist layer; removing the remaining photoresist layer using a non-oxidizing photoresist stripper; forming a dielectric layer on the high temperature metal layer, wherein the dielectric layer adheres to the high temperature metal layer when the substrate is subsequently exposed to elevated temperature; and annealing the dielectric in an inert gas to stabilize the dielectric layer for further high temperature processing.
Claim 2
Independent Claim
176 words
A method for forming a dielectric layer on a high temperature metal layer so that the dielectric layer adheres to the high temperature metal layer when exposed to elevated temperature comprising the steps of: providing a substrate having a first and second surface; forming a high temperature metal layer on the first surface of the substrate, wherein the high temperature metal layer has a favorable free energy of oxide formation; depositing a photoresist layer on the high temperature metal layer; selectively exposing the photoresist layer to light; developing the photoresist layer to selectively remove photoresist to form a pattern in the photoresist layer; etching the high temperature metal layer to conform to the pattern in the photoresist layer; removing the remaining photoresist layer using a non-oxidizing photoresist stripper; forming a dielectric layer on the high temperature metal layer, wherein the dielectric layer adheres to the high temperature metal layer when the substrate is subsequently exposed to elevated temperature; and annealing the dielectric in an inert gas to stabilize the dielectric layer for further high temperature processing.
Claim 3
Dependent Claim
70 words
The method of claim 1 wherein the step of forming the high temperature metal layer on the first surface of the substrate comprises forming a metal layer wherein the metal layer is selected from the group consisting of titanium, titanium-nitride, vanadium, vanadium-nitride, chromium, chromium-nitride, tantalum, and tantalum-nitride; and wherein the step of forming the dielectric layer comprises depositing a layer of silicon oxide using plasma-enhanced chemical vapor deposition from TEOS.
Claim 4
Dependent Claim
32 words
The method of claim 1 wherein the step of developing the photoresist layer comprises developing the photoresist layer absent a photoresist hardening step before the step of etching the high temperature metal.
Claim 5
Dependent Claim
46 words
The method of claim 1 wherein the step of depositing the photoresist layer comprises depositing a positive photoresist and the step of removing the photoresist layer using the non-oxidizing photoresist stripper comprises removing the photoresist layer with a stripper comprising n-methyl pyrrolidone having a basic pH.
Claim 6
Dependent Claim
56 words
The method of claim 4 wherein the step of removing the photoresist layer comprises the steps of removing the photoresist layer in a first bath of n-methyl pyrrolidone maintained at a temperature of approximately 75° to 85° C. and removing residual photoresist in a second bath of n-methyl pyrrolidone maintained at approximately 45° to 55° C.
Claim 7
Dependent Claim
31 words
The method of claim 1 wherein the step of etching the high temperature metal layer comprises etching the high temperature metal layer in a reactive ion etchant consisting essentially of chlorine.
Claim 8
Dependent Claim
21 words
The method of claim 1 wherein the step of annealing comprises heating the dielectric layer to approximately 1000° C. in nitrogen.
Claim 9
Independent Claim
154 words
A method for forming a dielectric layer on a high temperature metal layer wherein the dielectric layer adheres to the high temperature metal layer under high temperature conditions-comprising the steps of: providing a substrate having a first and second surface; forming a high temperature metal layer on the first surface, wherein the high temperature metal is selected from the group consisting of titanium, titanium-nitride, vanadium, vanadium-nitride, chromium, chromium-nitride, tantalum, and tantalum-nitride; forming a photoresist layer on the high temperature metal layer; selectively exposing the photoresist layer to light; developing the photoresist layer to selectively remove photoresist to form a pattern; etching the high temperature metal layer to conform to the pattern in the photoresist layer; removing the remaining photoresist layer using a non-oxidizing photoresist stripper; and depositing a first dielectric layer on the high temperature metal, and wherein the first dielectric layer adheres to the high temperature metal layer during subsequent high temperature environments.
Claim 10
Independent Claim
154 words
A method for forming a dielectric layer on a high temperature metal layer wherein the dielectric layer adheres to the high temperature metal layer under high temperature conditions-comprising the steps of: providing a substrate having a first and second surface; forming a high temperature metal layer on the first surface, wherein the high temperature metal is selected from the group consisting of titanium, titanium-nitride, vanadium, vanadium-nitride, chromium, chromium-nitride, tantalum, and tantalum-nitride; forming a photoresist layer on the high temperature metal layer; selectively exposing the photoresist layer to light; developing the photoresist layer to selectively remove photoresist to form a pattern; etching the high temperature metal layer to conform to the pattern in the photoresist layer; removing the remaining photoresist layer using a non-oxidizing photoresist stripper; and depositing a first dielectric layer on the high temperature metal, and wherein the first dielectric layer adheres to the high temperature metal layer during subsequent high temperature environments.
Claim 11
Dependent Claim
32 words
The method of claim 8 wherein the step of developing the photoresist layer comprises developing the photoresist layer absent a photoresist hardening step before the step of etching the high temperature metal.
Claim 12
Dependent Claim
46 words
The method of claim 8 wherein the step of depositing the photoresist layer comprises depositing a positive photoresist and the step of removing the photoresist layer using the non-oxidizing photoresist stripper comprises removing the photoresist layer with a stripper comprising n-methyl pyrrolidone having a basic pH.
Claim 13
Dependent Claim
56 words
The method of claim 10 wherein the step of removing the photoresist layer comprises the steps of removing the photoresist layer in a first bath of n-methyl pyrrolidone maintained at a temperature of approximately 75° to 85° C. and removing residual photoresist in a second bath of n-methyl pyrrolidone maintained at approximately 45° to 55° C.
Claim 14
Dependent Claim
26 words
The method of claim 8 wherein the step of depositing a first dielectric layer comprises: depositing a silicon oxide layer using a plasma-enhanced source comprising TEOS.
Claim 15
Dependent Claim
23 words
The method of claim 8 further comprising the step of annealing the first dielectric layer in an inert ambient at approximately 1000° C.
Claim 16
Dependent Claim
20 words
The method of claim 8 further comprising the step of forming a second dielectric layer on the first dielectric layer.
Claim 17
Dependent Claim
20 words
The method of claim 14 wherein the step of forming a second dielectric layer comprises depositing a silicon nitride layer.
Claim 18
Independent Claim
137 words
A method for forming a dielectric layer on titanium-nitride wherein the dielectric layer adheres to the titanium-nitride layer under high temperature conditions comprising the steps of: providing a semiconductor substrate having a first and a second surface; forming a titanium-nitride layer on the first surface; depositing a photoresist layer on the titanium-nitride layer; selectively exposing the photoresist layer to light; developing the photoresist layer to selectively remove photoresist to form a pattern in the photoresist layer, wherein the photoresist layer is developed absent a subsequent photoresist hardening step; etching the titanium-nitride layer to conform the titanium-nitride layer to the pattern in the photoresist layer; removing the remaining photoresist layer using a non-oxidizing photoresist stripper; depositing a dielectric layer on the titanium-nitride layer; and annealing the dielectric layer in an inert ambient having less than 3000 ppm oxygen.
Claim 19
Independent Claim
137 words
A method for forming a dielectric layer on titanium-nitride wherein the dielectric layer adheres to the titanium-nitride layer under high temperature conditions comprising the steps of: providing a semiconductor substrate having a first and a second surface; forming a titanium-nitride layer on the first surface; depositing a photoresist layer on the titanium-nitride layer; selectively exposing the photoresist layer to light; developing the photoresist layer to selectively remove photoresist to form a pattern in the photoresist layer, wherein the photoresist layer is developed absent a subsequent photoresist hardening step; etching the titanium-nitride layer to conform the titanium-nitride layer to the pattern in the photoresist layer; removing the remaining photoresist layer using a non-oxidizing photoresist stripper; depositing a dielectric layer on the titanium-nitride layer; and annealing the dielectric layer in an inert ambient having less than 3000 ppm oxygen.
Claim 20
Dependent Claim
87 words
The method of claim 16 wherein the step of depositing the photoresist layer comprises depositing a positive photoresist and the step of removing the photoresist layer using the non-oxidizing photoresist stripper comprises removing the photoresist layer using a stripper comprising n-methyl pyrrolidone having a basic pH, wherein the photoresist layer is removed in a first bath of n-methyl pyrrolidone maintained at a temperature of approximately 75° to 85° C. and removing residual photoresist in a second bath of n-methyl pyrrolidone maintained at approximately 45° to 55° C.
Claim 21
Dependent Claim
25 words
The method of claim 16 wherein the step of depositing the dielectric layer comprises: depositing a silicon oxide layer using a plasma-enhanced source comprising TEOS.
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