Patent US5405806A successfully refreshed from Google Patents.
US5405806A
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US
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Method for forming a metal silicide interconnect in an integrated circuit
Assignee: Motorola Solutions Inc
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Filing: 1994-03-29
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Granted: 1995-04-11
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Expires: 2014-03-29
Abstract
Abstract A metal silicide interconnect (48, 92, 124) is formed in an integrated circuit using a sacrificial layer (30, 78, 108). In one embodiment a sacrificial layer of titanium nitride (30) is formed overlying a semiconductor substrate (12) and a polysilicon conductive member (20). The sacrificial titanium nitride layer (30) is then patterned and an underlying portion (40) of the semiconductor substrate (12), and a sidewall portion (42) of the polysilicon conductive member (20) are subsequently exposed. A metal layer (46) is deposited and then reacted with the exposed portion 40 of the semiconductor substrate (12) and the exposed sidewall (42) of the polysilicon conductive member (20) to form a metal silicide interconnect (48). The remaining portion of the sacrificial titanium nitride layer (38) is then removed after the metal silicide interconnect (48) has been formed without substantially altering the metal silicide interconnect (48).
Inventors
- 👤 James R. Pfiester
- 👤 James D. Hayden
- 👤 Michael P. Woo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 14:26
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/0698; H10W20/064; H10W20/066; Y; Y10; Y10S; Y10S148/00; Y10S148/019; Y10S148/147
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
391 words
A method for forming a metal silicide interconnect in an integrated circuit comprising the steps of: providing a semiconductor substrate; forming a field isolation region within a first portion of the semiconductor substrate; forming a gate dielectric layer overlying the semiconductor substrate, wherein the gate dielectric layer abuts the field isolation region; forming a conductive member overlying a portion of the gate dielectric layer and a portion of the field isolation region; forming a first electrode region having a first conductivity type within a second portion of the semiconductor substrate and a second electrode region having the first conductivity type within a third portion of the semiconductor substrate, wherein the field isolation region lies in between the first electrode region and the second electrode region and the conductive member overlies only the first electrode region; forming a sacrificial layer of material overlying the gate dielectric layer, the conductive member and the field isolation region; forming a photoresist mask overlying the sacrificial layer of material, wherein the photoresist mask defines an exposed portion of the sacrificial layer of material; etching the exposed portion of the sacrificial layer of material to leave a remaining portion of the sacrificial layer of material overlying the field isolation region, and to form an exposed portion of the gate dielectric layer; etching the exposed portion of the gate dielectric layer to form an exposed portion of the first electrode region and an exposed portion of the second electrode region; removing the photoresist mask; depositing a metal layer overlying the exposed portion of the first electrode region, the exposed portion of the second electrode region, and the remaining portion of the sacrificial layer of material after the photoresist mask has been removed; reacting the metal layer with the exposed portion of the first electrode region and the exposed portion of the second electrode region to form a metal silicide interconnect overlying the exposed portion of the first electrode region and the exposed portion of the second electrode region and to leave an unsilicided portion of the metal layer overlying the conductive member and the field isolation region; removing the unsilicided portion of the metal layer to expose the remaining portion of the sacrificial layer of material; and removing the remaining portion of the sacrificial layer of material to expose at least a portion of the field isolation region.
Claim 2
Independent Claim
391 words
A method for forming a metal silicide interconnect in an integrated circuit comprising the steps of: providing a semiconductor substrate; forming a field isolation region within a first portion of the semiconductor substrate; forming a gate dielectric layer overlying the semiconductor substrate, wherein the gate dielectric layer abuts the field isolation region; forming a conductive member overlying a portion of the gate dielectric layer and a portion of the field isolation region; forming a first electrode region having a first conductivity type within a second portion of the semiconductor substrate and a second electrode region having the first conductivity type within a third portion of the semiconductor substrate, wherein the field isolation region lies in between the first electrode region and the second electrode region and the conductive member overlies only the first electrode region; forming a sacrificial layer of material overlying the gate dielectric layer, the conductive member and the field isolation region; forming a photoresist mask overlying the sacrificial layer of material, wherein the photoresist mask defines an exposed portion of the sacrificial layer of material; etching the exposed portion of the sacrificial layer of material to leave a remaining portion of the sacrificial layer of material overlying the field isolation region, and to form an exposed portion of the gate dielectric layer; etching the exposed portion of the gate dielectric layer to form an exposed portion of the first electrode region and an exposed portion of the second electrode region; removing the photoresist mask; depositing a metal layer overlying the exposed portion of the first electrode region, the exposed portion of the second electrode region, and the remaining portion of the sacrificial layer of material after the photoresist mask has been removed; reacting the metal layer with the exposed portion of the first electrode region and the exposed portion of the second electrode region to form a metal silicide interconnect overlying the exposed portion of the first electrode region and the exposed portion of the second electrode region and to leave an unsilicided portion of the metal layer overlying the conductive member and the field isolation region; removing the unsilicided portion of the metal layer to expose the remaining portion of the sacrificial layer of material; and removing the remaining portion of the sacrificial layer of material to expose at least a portion of the field isolation region.
Claim 3
Dependent Claim
25 words
The method of claim 1, wherein the step of forming the sacrificial layer of material is further characterized as depositing a layer of silicon nitride.
Claim 4
Dependent Claim
34 words
The method of claim 2, wherein the step of removing the remaining portion of the sacrificial layer is further characterized as etching the remaining portion of the sacrificial layer with an isotropic dry etch.
Claim 5
Dependent Claim
34 words
The method of claim 2, wherein the step of removing the remaining portion of the sacrificial layer is further characterized as etching the remaining portion of the sacrificial layer with a phosphoric acid solution.
Claim 6
Dependent Claim
25 words
The method of claim 1, wherein the step of forming the sacrificial layer of material is further characterized as depositing a layer of titanium nitride.
Claim 7
Dependent Claim
49 words
The method of claim 5, wherein the step of removing the remaining portion of the sacrificial layer is further characterized as etching the remaining portion of the sacrificial layer with at least one etchant selected from the group consisting of hydrogen peroxide, ammonium hydroxide, phosphoric acid, and sulfuric acid.
Claim 8
Dependent Claim
22 words
The method of claim 1, wherein the step of depositing the metal layer is further characterized as depositing a layer of cobalt.
Claim 9
Dependent Claim
22 words
The method of claim 1, wherein the step of depositing the metal layer is further characterized as depositing a layer of titanium.
Claim 10
Dependent Claim
29 words
The method of claim 1, wherein the step of reacting the metal layer is further characterized as rapid thermally annealing the metal layer to form the metal silicide interconnect.
Claim 11
Dependent Claim
22 words
The method of claim 1, wherein the step of forming the conductive member comprises the step of: depositing a layer of polysilicon.
Claim 12
Independent Claim
353 words
A method for forming a metal silicide interconnect in an integrated circuit comprising the steps of: providing a semiconductor substrate; forming a field isolation region within a first portion of the semiconductor substrate; forming a gate dielectric layer overlying the semiconductor substrate, wherein the gate dielectric layer abuts the field isolation region; forming a first electrode region having a first conductivity type within a second portion of the semiconductor substrate and a second electrode region having the first conductivity type within a third portion of the semiconductor substrate, wherein the field isolation region lies in between the first electrode region and the second electrode region; forming a sacrificial layer of material overlying the gate dielectric layer and the field isolation region; forming a photoresist mask overlying the sacrificial layer of material, wherein the photoresist mask defines an exposed portion of the sacrificial layer of material; etching the exposed portion of the sacrificial layer of material to leave a remaining portion of the sacrificial layer of material overlying the field isolation region and to form an exposed portion of the first electrode region and an exposed portion of the second electrode region, wherein the exposed portion of the first electrode region and the exposed portion of the second electrode region are offset from the field isolation region; removing the photoresist mask; depositing a metal layer overlying the exposed portion of the first electrode region, the exposed portion of the second electrode region, and the remaining portion of the sacrificial layer of material after the photoresist mask has been removed; reacting the metal layer with the exposed portion of the first electrode region and the exposed portion of the second electrode region to form a metal silicide interconnect overlying the exposed portion of the first electrode region and the exposed portion of the second electrode region and to leave an unsilicided portion of the metal layer overlying the field isolation region; removing the unsilicided portion of the metal layer to expose the remaining portion of the sacrificial layer; and removing the remaining portion of the sacrificial layer of material to expose the field isolation region.
Claim 13
Independent Claim
353 words
A method for forming a metal silicide interconnect in an integrated circuit comprising the steps of: providing a semiconductor substrate; forming a field isolation region within a first portion of the semiconductor substrate; forming a gate dielectric layer overlying the semiconductor substrate, wherein the gate dielectric layer abuts the field isolation region; forming a first electrode region having a first conductivity type within a second portion of the semiconductor substrate and a second electrode region having the first conductivity type within a third portion of the semiconductor substrate, wherein the field isolation region lies in between the first electrode region and the second electrode region; forming a sacrificial layer of material overlying the gate dielectric layer and the field isolation region; forming a photoresist mask overlying the sacrificial layer of material, wherein the photoresist mask defines an exposed portion of the sacrificial layer of material; etching the exposed portion of the sacrificial layer of material to leave a remaining portion of the sacrificial layer of material overlying the field isolation region and to form an exposed portion of the first electrode region and an exposed portion of the second electrode region, wherein the exposed portion of the first electrode region and the exposed portion of the second electrode region are offset from the field isolation region; removing the photoresist mask; depositing a metal layer overlying the exposed portion of the first electrode region, the exposed portion of the second electrode region, and the remaining portion of the sacrificial layer of material after the photoresist mask has been removed; reacting the metal layer with the exposed portion of the first electrode region and the exposed portion of the second electrode region to form a metal silicide interconnect overlying the exposed portion of the first electrode region and the exposed portion of the second electrode region and to leave an unsilicided portion of the metal layer overlying the field isolation region; removing the unsilicided portion of the metal layer to expose the remaining portion of the sacrificial layer; and removing the remaining portion of the sacrificial layer of material to expose the field isolation region.
Claim 14
Dependent Claim
25 words
The method of claim 11, wherein the step of forming the sacrificial layer of material is further characterized as depositing a layer of silicon nitride.
Claim 15
Dependent Claim
34 words
The method of claim 11, wherein the step of removing the remaining portion of the sacrificial layer is further characterized as etching the remaining portion of the sacrificial layer with an isotropic dry etch.
Claim 16
Dependent Claim
34 words
The method of claim 11, wherein the step of removing the remaining portion of the sacrificial layer is further characterized as etching the remaining portion of the sacrificial layer with a phosphoric acid solution.
Claim 17
Dependent Claim
25 words
The method of claim 11, wherein the step of forming the sacrificial layer of material is further characterized as depositing a layer of titanium nitride.
Claim 18
Dependent Claim
22 words
The method of claim 11, wherein the step of depositing the metal layer is further characterized as depositing a layer of cobalt.
Claim 19
Dependent Claim
22 words
The method of claim 11, wherein the step of depositing the metal layer is further characterized as depositing a layer of titanium.
Claim 20
Dependent Claim
29 words
The method of claim 11, wherein the step of reacting the metal layer is further characterized as rapid thermally annealing the metal layer to form the metal silicide interconnect.
Claim 21
Dependent Claim
49 words
The method of claim 11, wherein the step of removing the remaining portion of the sacrificial layer is further characterized as etching the remaining portion of the sacrificial layer with at least one etchant selected from the group consisting of hydrogen peroxide, ammonium hydroxide, phosphoric acid, and sulfuric acid.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-04-10 | 1998-10-10 | 1999-04-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-04-10 | 2002-10-10 | 2003-04-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-04-10 | 2006-10-10 | 2007-04-11 | $7700.00 | Window Closed / Lapsed |