US4981550A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor device having tungsten plugs
Assignee: Nokia Bell Labs
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Filing: 1988-11-09
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Granted: 1991-01-01
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Expires: 2008-11-09
Abstract
Abstract A metallization scheme useful for integrated circuits uses a buffer layer to ensure that the etch back of a contact metal, such as tungsten, deposited over the buffer layer, can be controlled to form a complete tungsten plug in a via while the tungsten on the dielectric is completely removed. The buffer layer, once exposed, reacts with the plasma etch to form non-volatile compounds which decrease the free surface mobility of the etching species. This active species depletion thus decreases the etch rate of the tungsten within the vias. Continued exposure of unreacted buffer material is ensured by performing a sputter cleaning simultaneously with the plasma etch.
Inventors
- 👤 Robert D. Huttemann
- 👤 Nun-Sian Tsai
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 18:48
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/20; H10P50/26; H10P50/264; H10P50/266; H10P50/267; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/056; H10W20/059
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
147 words
A method of making a semiconductor integrated circuit having a metalization comprising the steps of: depositing a dielectric layer on a substrate; patterning said dielectric layer to form windows in selected areas above said substrate; depositing a buffer layer over said dielectric layer; blanket depositing a contact layer so as to completely cover said buffer layer and at least fill said windows formed by the patterning, said contact layer being of a different material than said buffer layer; plasma-etching said contact layer and underlying buffer layer with a fluorine-based etch which preferentially forms non-volatile fluoride compounds with said buffer layer as compared to reacting with said contact layer; and simultaneously with the preceding step, sputtering said buffer layer to remove fluoride compounds and expose unreacted buffer material, the simultaneous plasma-etching and sputtering operations continuing until essentially all of the contact layer outside of the windows is removed.
Claim 2
Independent Claim
147 words
A method of making a semiconductor integrated circuit having a metalization comprising the steps of: depositing a dielectric layer on a substrate; patterning said dielectric layer to form windows in selected areas above said substrate; depositing a buffer layer over said dielectric layer; blanket depositing a contact layer so as to completely cover said buffer layer and at least fill said windows formed by the patterning, said contact layer being of a different material than said buffer layer; plasma-etching said contact layer and underlying buffer layer with a fluorine-based etch which preferentially forms non-volatile fluoride compounds with said buffer layer as compared to reacting with said contact layer; and simultaneously with the preceding step, sputtering said buffer layer to remove fluoride compounds and expose unreacted buffer material, the simultaneous plasma-etching and sputtering operations continuing until essentially all of the contact layer outside of the windows is removed.
Claim 3
Dependent Claim
14 words
A method as recited in claim 1 in which said contact layer comprises tungsten.
Claim 4
Dependent Claim
32 words
A method as recited in claim 2 in which said buffer layer comprises at least one material selected from the group consisting of aluminum, titanium, tantalum, silicon nitride, titanium nitride and PSG.
Claim 5
Dependent Claim
16 words
A method as recited in claim 3 in which said at least one material comprises aluminum.
Claim 6
Dependent Claim
31 words
A method as recited in claim 1 in which said buffer layer is deposited before said patterning step is performed such that both the dielectric layer and buffer layer are patterned.
Claim 7
Dependent Claim
16 words
A method as recited in claim 3 in which said at least one material comprises titanium.
Claim 8
Dependent Claim
24 words
A method as recited in claim 1 in which the buffer material is deposited to a thickness in the range of approximately 150-300 nm.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-12-31 | 1994-07-02 | 1995-01-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-12-31 | 1998-07-02 | 1999-01-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-12-31 | 2002-07-02 | 2003-01-01 | $7700.00 | Window Closed / Lapsed |