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US5395769A Expired / Lapsed US ⏱️ 0.0 years remaining

Method for controlling silicon etch depth

Assignee: International Business Machines Corp
•
Filing: 1992-06-26
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Granted: 1995-03-07
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Expires: 2012-06-26
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Abstract

Abstract The present invention is a structure and method for controlling the depth of an etching process. In particular, the method and structure of the present invention creates a marker layer which resides between a layer to be etched and a protected layer. The marker layer is detected during the etch process and the etch process is controlled based on the detection of the marker layer. The marker layer has physical characteristics which are very similar to the layers being etched or protected. The marker layer has a similar lattice constant and electrical behavior to either the etched layer or the protected layer. The marker layer has very different optical properties from the etched or protected layers so that even a thin marker layer can be easily detected using in-situ ellipsometric measurements. A specific embodiment of the present invention is a layer of SiGe interposed between a thick silicon layer and a thin silicon layer. In particular, the SiGe layer has a composition of approximately 10% of germanium and has a thickness of approximately 10Å. The thick silicon layer has a thickness of approximately 5,000Å and the thin silicon layer has a thickness of approximately 1,000Å. A method of etching the thick silicon layer, incorporating one embodiment of the present invention, is to perform a RIE process on the thick silicon layer while monitoring the RIE process with an ellipsometer. When the RIE process encounters the underlying marker layer, the ellipsometer measurements show a marked change. The marked change in the ellipsometer measurements indicate when to stop the RIE process. When the marker layer is very thin, such as 10Å, the RIE process is stopped immediately and the underlying thin silicon layer is not etched into. Even though the RIE process is not uniform, and parts of the marker layer will remain on the surface of the protected layer, this will not affect the electrical behavior of the resulting semiconductor device using this process. This is because the thin SiGe marker layer has electrical characteristics which are very similar to the underlying silicon layer.

Inventors

  • 👤 Maurizio Arienzo
  • 👤 David L. Harame
  • 👤 Gottlieb S. Oehrlein

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-06 15:37
CPC Classifications
H; H10; H10D; H10D10/00; H10D10/01; H10D10/051; H10D10/054; H10P; H10P50/00; H10P50/20; H10P50/24; H10P50/242

Claims Analysis

Total Claims: 19
Claim 1
Independent Claim 217 words
In a method for making an electronic device, a method for etching an aperture through a first layer and stopping at an adjacent second layer, without any significant etching of said second layer, when said first and second layers have similar etching properties and the indexes of refraction of said first and second layers are too close to each other to be readily distinguishable optically, comprising the steps of: interposing a marker layer between said first layer and said second layer, said marker layer having a sufficiently small thickness and a composition sufficiently close to either said first or said second layer that the electrical behavior of said electronic device is not substantially affected by said interposed marker layer, said first layer having a first index of refraction and said marker layer having a second index of refraction different from said first index of refraction by an amount sufficient to be optically detectable; etching an aperture through said first layer; optically monitoring said etching step during said etching step to detect when said etching step etches into said underlying marker layer; and terminating said etching step after said monitoring step detects that said marker layer has been etched into; whereby said aperture is etched through said first layer and said second layer has not been significantly etched.
Claim 2
Dependent Claim 217 words
In a method for making an electronic device, a method for etching an aperture through a first layer and stopping at an adjacent second layer, without any significant etching of said second layer, when said first and second layers have similar etching properties and the indexes of refraction of said first and second layers are too close to each other to be readily distinguishable optically, comprising the steps of: interposing a marker layer between said first layer and said second layer, said marker layer having a sufficiently small thickness and a composition sufficiently close to either said first or said second layer that the electrical behavior of said electronic device is not substantially affected by said interposed marker layer, said first layer having a first index of refraction and said marker layer having a second index of refraction different from said first index of refraction by an amount sufficient to be optically detectable; etching an aperture through said first layer; optically monitoring said etching step during said etching step to detect when said etching step etches into said underlying marker layer; and terminating said etching step after said monitoring step detects that said marker layer has been etched into; whereby said aperture is etched through said first layer and said second layer has not been significantly etched.
Claim 3
Dependent Claim 23 words
A method for making an electronic device, as in claim 1, wherein: said marker layer has a thickness of less than approximately 50Å.
Claim 4
Dependent Claim 55 words
A method for making an electronic device, as in claim 2, wherein: said first and second indexes of refraction differ by at least 0.002, and said monitoring step detects a change in index of refraction between said first layer and said marker layer to determine when said etching step etches into said underlying marker layer.
Claim 5
Dependent Claim 24 words
A method for making an electronic device, as in claim 3, wherein: said marker layer is composed of Si x Ge 1-x wherein 0≦x≦1.
Claim 6
Dependent Claim 24 words
A method for making an electronic device, as in claim 4, wherein: said first layer is composed of Si x Ge 1-x wherein 0≦x≦1.
Claim 7
Dependent Claim 25 words
A method as defined in claim 1 wherein said optically monitoring step detects that said marker layer has been etched into through use of ellipsometry.
Claim 8
Dependent Claim 21 words
A method as defined in claim 6 wherein said first and second indexes of refraction differ by an amount about 0.002.
Claim 9
Dependent Claim 30 words
A method as defined in claim 1 wherein said etching step is terminated as soon as said monitoring step detects that said etching step has etched into said marker layer.
Claim 10
Dependent Claim 32 words
A method as defined in claim 1 wherein said etching step is terminated after a delay following detection by said monitoring step that said etching step has etched into said marker layer.
Claim 11
Dependent Claim 18 words
A method as defined in claim 1 wherein said first and second layers are substantially identical in composition.
Claim 12
Dependent Claim 18 words
A method as defined in claim 1 wherein said first and second layers are both made of silicon.
Claim 13
Dependent Claim 19 words
A method as defined in claim 11 wherein said first and second layers of silicon are not both doped.
Claim 14
Dependent Claim 18 words
A method as defined in claim 11 wherein said first and second layers of silicon are doped differently.
Claim 15
Dependent Claim 31 words
A method as defined in claim 11 wherein said marker layer is made of SiGe with the proportion of germanium being between approximately 0.3 atomic percent and approximately 20 atomic percent.
Claim 16
Dependent Claim 17 words
A method as defined in claim 14 wherein said proportion of germanium is approximately 10 atomic percent.
Claim 17
Dependent Claim 35 words
A method as defined in claim 1 wherein said second layer has a thickness between approximately 100 angstroms and approximately 1000 angstroms and said marker layer has a thickness of less than approximately 15 angstroms.
Claim 18
Dependent Claim 20 words
A method as defined in claim 16 wherein said marker layer has a thickness of about 5 to 10 angstroms.
Claim 19
Dependent Claim 24 words
A method as defined in claim 1 wherein said etching step is terminated before said marker layer has been totally removed in said aperture.

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1998-03-06 1998-09-05 1999-03-07 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2002-03-06 2002-09-05 2003-03-07 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2006-03-06 2006-09-05 2007-03-07 $7700.00 Window Closed / Lapsed

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