Patent US5382999A successfully refreshed from Google Patents.
US5382999A
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Optical pattern projecting apparatus
Assignee: Renesas Electronics Corp
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Filing: 1993-12-10
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Granted: 1995-01-17
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Expires: 2013-12-10
Abstract
Abstract An optical pattern projecting apparatus comprising a divergent mirror 16 for converting a light beam 13 from a light source 11 into a radially outwardly divergent light beam 13b and a convergent mirror 18 for converting the divergent light beam 13b into a radially inwardly convergent light beam 13d. The convergent light beam 13d is converted by a parallelizing mirror 17 into a parallel zonal ringed light beam 13e which is focused onto a surface of the work piece 15. A polarization beam splitter may be used for deflection-angular polarizing and splitting the light beam into an S-polarized light and a P-polarized light.
Inventors
- 👤 Kazuya Kamon
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 15:27
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/7055; G03F7/70566; G02; G02B; G02B19/00; G02B19/0004; G02B19/0028; G02B19/0033; G02B19/0047; G02B27/00; G02B27/28; G02B27/283; G02B5/00; G02B5/001; G03F7/70375
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
135 words
An optical pattern projecting apparatus comprising: a light source for emitting a light beam along an axis for projecting a pattern onto a work piece; a divergent mirror for reflecting and converting the light beam emitted from said light source into a divergent light beam diverging with a radially outward component relative to the axis of the light beam; a convergent mirror for reflecting and converting the divergent light beam into a convergent light beam converging with a radially inward component relative to the axis of the light beam; a parallelizing mirror for reflecting and converting the convergent light beam into a parallel zonal ringed light beam along the axis of the light beam; and a condenser lens for condensing and focusing the parallel zonal ringed light beam onto a surface of the work piece.
Claim 2
Dependent Claim
135 words
An optical pattern projecting apparatus comprising: a light source for emitting a light beam along an axis for projecting a pattern onto a work piece; a divergent mirror for reflecting and converting the light beam emitted from said light source into a divergent light beam diverging with a radially outward component relative to the axis of the light beam; a convergent mirror for reflecting and converting the divergent light beam into a convergent light beam converging with a radially inward component relative to the axis of the light beam; a parallelizing mirror for reflecting and converting the convergent light beam into a parallel zonal ringed light beam along the axis of the light beam; and a condenser lens for condensing and focusing the parallel zonal ringed light beam onto a surface of the work piece.
Claim 3
Dependent Claim
20 words
The optical pattern projection apparatus as claimed in claim 1 wherein the divergent mirror and parallelizing mirrors have conical surfaces.
Claim 4
Dependent Claim
20 words
The optical pattern projection apparatus as claimed in claim 1 wherein the divergent mirror and parallelizing mirrors have pyramidal surfaces.
Claim 5
Dependent Claim
155 words
An optical pattern projecting apparatus comprising: a light source for emitting a light beam along an axis for projecting a pattern onto a work piece; a divergent polarization beam splitter for polarizing and splitting the light beam emitted from said light source into an S-polarized light component and a P-polarized light component and reflecting and converting the S-polarized light component into a divergent light beam diverging with a radially outward component relative to the axis of the light beam; a convergent mirror for reflecting and converting the divergent light beam into a convergent light beam converging with a radially inward component relative to the axis of the light beam; a parallelizing mirror for reflecting and converting the convergent light beam into a parallel zonal ringed light beam along the axis of the light beam; and a condenser lens for condensing and focusing the parallel zonal ringed light beam onto a surface of the work piece.
Claim 6
Dependent Claim
155 words
An optical pattern projecting apparatus comprising: a light source for emitting a light beam along an axis for projecting a pattern onto a work piece; a divergent polarization beam splitter for polarizing and splitting the light beam emitted from said light source into an S-polarized light component and a P-polarized light component and reflecting and converting the S-polarized light component into a divergent light beam diverging with a radially outward component relative to the axis of the light beam; a convergent mirror for reflecting and converting the divergent light beam into a convergent light beam converging with a radially inward component relative to the axis of the light beam; a parallelizing mirror for reflecting and converting the convergent light beam into a parallel zonal ringed light beam along the axis of the light beam; and a condenser lens for condensing and focusing the parallel zonal ringed light beam onto a surface of the work piece.
Claim 7
Dependent Claim
67 words
The optical pattern projecting apparatus as claimed in claim 4 wherein said divergent polarization beam splitter comprises; a first conical lens having a total reflection surface and an index of refraction; and a second conical lens having a surface complementary to said total reflection surface of said first conical lens and having an index of refraction different from the index of refraction of said first conical lens.
Claim 8
Dependent Claim
18 words
The optical pattern projection apparatus as claimed in claim 4 wherein the parallelizing mirror has a conical surface.
Claim 9
Dependent Claim
18 words
The optical pattern projection apparatus as claimed in claim 4 wherein the parallizing mirror has a pyramidal surface.
Claim 10
Dependent Claim
155 words
An optical pattern projecting apparatus comprising: a light source for emitting a light beam along an axis for projecting a pattern onto a work piece; a divergent mirror for reflecting and converting the light beam emitted from said light source into a divergent light beam diverging with a radially outward component relative to the axis of the light beam; a convergent mirror for reflecting and converting the divergent light beam into a convergent light beam converging with a radially inward component relative to the axis of the light beam; a parallelizing polarization beam splitter for polarizing and splitting the convergent light beam into an S-polarized light component and a P-polarized light component and reflecting and converting the S-polarized light component into a parallel zonal ringed light beam along the axis of the light beam; and a condenser lens for condensing and focusing the parallel zonal ringed light beam onto a surface of the work piece.
Claim 11
Dependent Claim
155 words
An optical pattern projecting apparatus comprising: a light source for emitting a light beam along an axis for projecting a pattern onto a work piece; a divergent mirror for reflecting and converting the light beam emitted from said light source into a divergent light beam diverging with a radially outward component relative to the axis of the light beam; a convergent mirror for reflecting and converting the divergent light beam into a convergent light beam converging with a radially inward component relative to the axis of the light beam; a parallelizing polarization beam splitter for polarizing and splitting the convergent light beam into an S-polarized light component and a P-polarized light component and reflecting and converting the S-polarized light component into a parallel zonal ringed light beam along the axis of the light beam; and a condenser lens for condensing and focusing the parallel zonal ringed light beam onto a surface of the work piece.
Claim 12
Dependent Claim
67 words
The optical pattern projecting apparatus as claimed in claim 8 wherein said divergent polarization beam splitter comprises: a first conical lens having a total reflection surface and an index of refraction; and a second conical lens having a surface complementary to said total reflection surface of said first conical lens and having an index of refraction different from the index of refraction of said first conical lens.
Claim 13
Dependent Claim
18 words
The optical pattern projection apparatus as claimed in claim 8 wherein the divergent mirror has a conical surface.
Claim 14
Dependent Claim
18 words
The optical pattern projection apparatus as claimed in claim 8 wherein the divergent mirror has a pyramidal surface.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-01-16 | 1998-07-18 | 1999-01-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-01-16 | 2002-07-18 | 2003-01-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-01-16 | 2006-07-18 | 2007-01-17 | $7700.00 | Window Closed / Lapsed |