Patent US5380566A successfully refreshed from Google Patents.
US5380566A
Expired / Lapsed
US
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Method of limiting sticking of body to susceptor in a deposition treatment
Assignee: Applied Materials Inc
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Filing: 1993-06-21
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Granted: 1995-01-10
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Expires: 2013-06-21
Abstract
Abstract A method of limiting sticking of a body (substrate) to a susceptor after the body has been coated with a layer in a deposition chamber by plasma chemical vapor deposition includes subjecting the coated body to a plasma of an inactive gas, e.g., hydrogen, nitrogen, argon or ammonia, which does not adversely affect the coating and does not add additional layers to the body. After the coated body is subjected to the plasma of the inactive gas, the body is separated from the susceptor.
Inventors
- 👤 Robert Robertson
- 👤 Marc M. Kollrack
- 👤 Angela T. Lee
- 👤 Kam Law
- 👤 Dan Maydan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 12:14
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/56; C23C16/44; C23C16/50; C23C16/505; C23C16/509
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
77 words
A method of limiting sticking of a body to a susceptor resulting from processing of a surface of the body by plasma processing while the body is mounted on the susceptor in a processing chamber, the method comprising the step of: after the body is processed, subjecting the body to a plasma of a gas which does not chemically react with the processed surface on the body and which does not deposit a layer on the body.
Claim 2
Independent Claim
77 words
A method of limiting sticking of a body to a susceptor resulting from processing of a surface of the body by plasma processing while the body is mounted on the susceptor in a processing chamber, the method comprising the step of: after the body is processed, subjecting the body to a plasma of a gas which does not chemically react with the processed surface on the body and which does not deposit a layer on the body.
Claim 3
Dependent Claim
27 words
The method of claim 1 further comprising the step of separating the body from the susceptor after the body is subjected to the plasma of the gas.
Claim 4
Dependent Claim
21 words
The method of claim 2 in which the gas is selected from the group consisting of hydrogen, nitrogen, argon and ammonia.
Claim 5
Dependent Claim
50 words
The method of claim 3 in which the plasma of the gas is formed by subjecting the gas to an rf power of between 0.03 and 0.14 watts/cm 2 times the area of an electrode spaced from the susceptor and to which a voltage is applied to form the plasma.
Claim 6
Dependent Claim
22 words
The method of claim 4 in which a pressure is provided in the processing chamber which is between 0.2 and 3.5 Torr.
Claim 7
Dependent Claim
27 words
The method of claim 5 in which the body is subjected to the plasma of the gas for a period of between about 2 and 15 seconds.
Claim 8
Dependent Claim
27 words
The method of claim 6 further comprising continuing to subject the body to the plasma of the gas while the body is being separated from the susceptor.
Claim 9
Dependent Claim
20 words
The method of claim 2 wherein the body is processed by subjecting it to a plasma of a processing gas.
Claim 10
Dependent Claim
21 words
The method of claim 8 wherein an essentially continuous plasma is maintained when the processing gas is changed to the gas.
Claim 11
Independent Claim
137 words
A method of treating a body comprising the steps of: placing the body on a susceptor within a deposition chamber having an electrode spaced from the susceptor; flowing a deposition gas within the chamber; applying a voltage across the electrode and the susceptor at a rf power which generates a plasma in the deposition gas so as to react the deposition gas and deposit a layer on a surface of the body; discontinuing the flow of the deposition gas; flowing a second gas into the chamber which second gas does not react with the layer on the body or the body and does not add another layer; applying a rf power to the second gas to generate a plasma of the second gas which is applied to the body; and then separating the body from the susceptor.
Claim 12
Independent Claim
137 words
A method of treating a body comprising the steps of: placing the body on a susceptor within a deposition chamber having an electrode spaced from the susceptor; flowing a deposition gas within the chamber; applying a voltage across the electrode and the susceptor at a rf power which generates a plasma in the deposition gas so as to react the deposition gas and deposit a layer on a surface of the body; discontinuing the flow of the deposition gas; flowing a second gas into the chamber which second gas does not react with the layer on the body or the body and does not add another layer; applying a rf power to the second gas to generate a plasma of the second gas which is applied to the body; and then separating the body from the susceptor.
Claim 13
Dependent Claim
22 words
The method of claim 10 in which the second gas is selected from the group consisting of hydrogen, nitrogen, argon and ammonia.
Claim 14
Dependent Claim
30 words
The method of claim 11 in which the plasma in the second gas is formed at a power less than that used to form the plasma of the deposition gas.
Claim 15
Dependent Claim
39 words
The method of claim 12 in which the second gas is subjected to an rf power of between 0.03 and 0.14 watts/cm 2 times the area of the electrode to which the voltage is applied to form the plasma.
Claim 16
Dependent Claim
22 words
The method of claim 13 in which a pressure is provided in the deposition chamber which is between 0.2 and 3.5 Torr.
Claim 17
Dependent Claim
26 words
The method of claim 14 in which the body is subjected to the plasma of the second gas for a period of 2 to 15 seconds.
Claim 18
Dependent Claim
29 words
The method of claim 15 in which the body is subjected to the plasma of the second gas for the period prior to separating the body from the susceptor.
Claim 19
Dependent Claim
28 words
The method of claim 16 further comprising continuing to subject the body to the plasma of the second gas while the body is being separated from the susceptor.
Claim 20
Dependent Claim
28 words
The method of claim 10 in which the plasma is maintained substantially continuously while changing from the deposition gas to the second gas which is an inert gas.
Claim 21
Dependent Claim
22 words
The method of claim 10 wherein the plasma is maintained essentially continuously when the deposition gas is changed to the second gas.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-01-09 | 1998-07-11 | 1999-01-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-01-09 | 2002-07-11 | 2003-01-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-01-09 | 2006-07-11 | 2007-01-10 | $7700.00 | Window Closed / Lapsed |