US5372908A
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Photosensitive composition comprising a polysilane and an acid forming compound
Assignee: Toshiba Corp
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Filing: 1992-07-08
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Granted: 1994-12-13
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Expires: 2012-07-08
Abstract
Abstract A photosensitive composition comprises a polysilane having a repeating unit represented by formula (1) and a compound which generates an acid upon exposure to light: <IMAGE> (1) wherein each of R1 and R2 independently represents a hydrogen atom, a substituted or nonsubstituted alkyl group having 1 to 18 carbon atoms, a substituted or nonsubstituted aryl group having 6 to 18 carbon atoms, or a substituted or nonsubstituted aralkyl group having 7 to 22 carbon atoms. This photosensitive composition exhibits a high-sensitivity, and can be formed into a polysilane film pattern having a high-resolution, when it is subjected to exposure to Deep UV light, an EB, an X-ray, or the like, hard baking, and development under appropriate conditions. When an aromatic ring substituted by a hydroxyl group, a substituted or nonsubstituted alkoxyl group, or a substituted or nonsubstituted siloxyl group is introduced in one of side chains R1 and R2 of the polysilane, development using an alkaline solution can be employed.
Inventors
- 👤 Shuji Hayase
- 👤 Yoshihiko Nakano
- 👤 Yukihiro Mikogami
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 22:38
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/075; G03F7/0754; C; C08; C08L; C08L83/00; C08L83/16; G03F7/039; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/114; Y10S430/115; Y10S430/12; Y10S430/122; Y10S430/126; Y10S430/127
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
126 words
A photosensitive composition including a mixture of a polysilane and a compound which generates an acid upon exposure to light, said polysilane having a repeating unit represented by formula (1): ##STR21## wherein each of R 1 and R 2 independently represents a hydrogen atom, a substituted or nonsubstituted alkyl group having 1 to 18 carbon atoms, a substituted or nonsubstituted aryl group having 6 to 18 carbon atoms, or a substituted or nonsubstituted aralkyl group having 7 to 22 carbon atoms, and with said compound which generates anacid upon exposure to light being at least one selected from the group consisting of a sulfonium salt, an iodonium salt, a nitrobenzyl compound, and a naphthoquinonediazide compound represented by the formula given below: ##STR22## where, R represents: ##STR23##
Claim 2
Dependent Claim
126 words
A photosensitive composition including a mixture of a polysilane and a compound which generates an acid upon exposure to light, said polysilane having a repeating unit represented by formula (1): ##STR21## wherein each of R 1 and R 2 independently represents a hydrogen atom, a substituted or nonsubstituted alkyl group having 1 to 18 carbon atoms, a substituted or nonsubstituted aryl group having 6 to 18 carbon atoms, or a substituted or nonsubstituted aralkyl group having 7 to 22 carbon atoms, and with said compound which generates anacid upon exposure to light being at least one selected from the group consisting of a sulfonium salt, an iodonium salt, a nitrobenzyl compound, and a naphthoquinonediazide compound represented by the formula given below: ##STR22## where, R represents: ##STR23##
Claim 3
Dependent Claim
32 words
The composition according to claim 1, wherein the compound which generates the acid upon exposure to light is the naphthoquinonediazide compound represented by the formula given below: ##STR24## where, R represents: ##STR25##
Claim 4
Dependent Claim
27 words
The composition according to claim 1, wherein at least one of R 1 and R 2 represents an aryl group substituted by at least one hydroxyl group.
Claim 5
Dependent Claim
30 words
The composition according to claim 1, wherein at least one of R 1 and R 2 represents an aryl group substituted by at least one substituted or nonsubstituted alkoxyl group.
Claim 6
Dependent Claim
30 words
The composition according to claim 1, wherein at least one of R 1 and R 2 represents an aryl group substituted by at least one substituted or nonsubstituted siloxyl group.
Claim 7
Dependent Claim
31 words
The composition according to claim 1, wherein at least one of R 1 and R 2 represents an aralkyl group containing an aromatic ring substituted by at least one hydroxyl group.
Claim 8
Dependent Claim
34 words
The composition according to claim 1, wherein at least one of R 1 and R 2 represents an aralkyl group containing an aromatic ring substituted by at least one substituted or nonsubstituted alkoxyl group.
Claim 9
Dependent Claim
34 words
The composition according to claim 1, wherein at least one of R 1 and R 2 represents an aralkyl group containing an aromatic ring substituted by at least one substituted or nonsubstituted siloxyl group.
Claim 10
Dependent Claim
66 words
The composition according to claim 1, wherein the polysilane is a mixture of a polysilane having an aromatic ring substituted by a hydroxyl group in at least one of R 1 and R 2 and a polysilane having an aromatic ring substituted by a substituted or nonsubstituted alkoxyl group or a substituted or nonsubstituted siloxyl group in at least one R 1 and R 2 .
Claim 11
Dependent Claim
23 words
The composition according to claim 1, wherein an average molecular weight of the polysilane falls within a range of about 1,000 to 500,000.
Claim 12
Dependent Claim
21 words
The composition according to claim 1, wherein the compound which generates the acid upon exposure to light is a sulfonium salt.
Claim 13
Dependent Claim
21 words
The composition according to claim 1, wherein the compound which generates the acid upon exposure to light is an iodonium salt.
Claim 14
Dependent Claim
21 words
The composition according to claim 1, wherein the compound which generates the acid upon exposure to light is a nitrobenzyl compound.
Claim 15
Dependent Claim
35 words
The composition according to claim 1, wherein about 0.01 to 30 parts by weight of the compound which generates the acid upon exposure to light is mixed with 100 parts by weight of the polysilane.
Claim 16
Dependent Claim
34 words
The composition according to claim 14, wherein about 0.5 to 5 parts by weight of the compound which generates the acid upon exposure to light is mixed with parts by weight of the polysilane.
Claim 17
Dependent Claim
34 words
The composition according to claim 4, wherein about 0.01 to 30 parts by weight of the compound which generates the acid upon exposure to light is mixed with parts by weight of the polysilane.
Claim 18
Dependent Claim
34 words
The composition according to claim 5, wherein about 0.01 to 30 parts by weight of the compound which generates the acid upon exposure to light is mixed with parts by weight of the polysilane.
Claim 19
Dependent Claim
34 words
The composition according to claim 7, wherein about 0.01 to 30 parts by weight of the compound which generates the acid upon exposure to light is mixed with parts by weight of the polysilane.
Claim 20
Dependent Claim
35 words
The composition according to claim 8, wherein about 0.01 to 30 parts by weight of the compound which generates the acid upon exposure to light is mixed with 100 parts by weight of the polysilane.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-12-12 | 1998-06-13 | 1998-12-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-12-12 | 2002-06-13 | 2002-12-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-12-12 | 2006-06-13 | 2006-12-13 | $7700.00 | Window Closed / Lapsed |