US4871646A
Expired / Lapsed
US
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Polysilane compound and photosensitive composition
Assignee: Toshiba Corp
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Filing: 1988-05-13
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Granted: 1989-10-03
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Expires: 2008-05-13
Abstract
Abstract Disclosed are a polysilane containing a unit represented by the following formulas I, II, or III, and a photosensitive composition consisting of the polysilane. ##STR1##
Inventors
- 👤 Shizu Hayase
- 👤 Rumiko Horiguchi
- 👤 Yasunobu Onishi
- 👤 Toru Ushirogouchi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 14:37
CPC Classifications
G; G03; G03C; G03C1/00; G03C1/72; C; C08; C08G; C08G77/00; C08G77/60; C08L; C08L83/00; C08L83/16; G03F; G03F7/00; G03F7/004; G03F7/075; G03F7/0754
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
161 words
A polysilane containing at least one unit selected from the group consisting of units represented by the following formulas I, II, and III: ##STR79## wherein R 1 represents a substituted or nonsubstituted alkyl or aryl group and R 2 represents a substituted or nonsubstituted alkylene or arylene group; ##STR80## wherein R 3 to R 5 represent the following: R 3 : a substituted or nonsubstituted alkyl or aryl group; R 4 : An alkylene group having 1 to 10 carbon atoms; and R 5 : a halogenated alkyl group; ##STR81## wherein R 6 to R 11 represent the following: R 6 , R 9 and R 10 : an alkyl group having 1 to 10 carbon atoms or a substituted or nonsubstituted aryl group; R 7 and R 8 : hydrogen and an alkyl group having 1 to 10 carbon atoms or a substituted or nonsubstituted aryl group; and R 11 : an alkylene group having 1 to 5 carbon atoms.
Claim 2
Dependent Claim
161 words
A polysilane containing at least one unit selected from the group consisting of units represented by the following formulas I, II, and III: ##STR79## wherein R 1 represents a substituted or nonsubstituted alkyl or aryl group and R 2 represents a substituted or nonsubstituted alkylene or arylene group; ##STR80## wherein R 3 to R 5 represent the following: R 3 : a substituted or nonsubstituted alkyl or aryl group; R 4 : An alkylene group having 1 to 10 carbon atoms; and R 5 : a halogenated alkyl group; ##STR81## wherein R 6 to R 11 represent the following: R 6 , R 9 and R 10 : an alkyl group having 1 to 10 carbon atoms or a substituted or nonsubstituted aryl group; R 7 and R 8 : hydrogen and an alkyl group having 1 to 10 carbon atoms or a substituted or nonsubstituted aryl group; and R 11 : an alkylene group having 1 to 5 carbon atoms.
Claim 3
Dependent Claim
9 words
A photosensitive composition comprising a polysilane of claim 1.
Claim 4
Dependent Claim
91 words
A photosensitive composition comprising a polysilane containing at least one unit selected from the group of units represented by the following formulas I and II: ##STR82## wherein R 1 represents a substituted or nonsubstituted alkyl or aryl group and R 2 represents a substituted or nonsubstituted alkylene or arylene group; ##STR83## wherein R 3 to R 5 represent the following: R 3 : a substituted or nonsubstituted alkyl or aryl group; R 4 : An alkylene group having 1 to 10 carbon atoms; and R 5 : a halogenated alkyl group.
Claim 5
Dependent Claim
91 words
A photosensitive composition comprising a polysilane containing at least one unit selected from the group of units represented by the following formulas I and II: ##STR82## wherein R 1 represents a substituted or nonsubstituted alkyl or aryl group and R 2 represents a substituted or nonsubstituted alkylene or arylene group; ##STR83## wherein R 3 to R 5 represent the following: R 3 : a substituted or nonsubstituted alkyl or aryl group; R 4 : An alkylene group having 1 to 10 carbon atoms; and R 5 : a halogenated alkyl group.
Claim 6
Dependent Claim
14 words
A composition according to claim 3, further comprising a negative or positive type sensitizer.
Claim 7
Dependent Claim
24 words
A composition according to claim 4, wherein said sensitizer has sensitivity with respect to a g-line (wavelength): 436 nm) of a mercury emission spectrum.
Claim 8
Dependent Claim
18 words
A composition according to claim 5, wherein said sensitizer is bis (1-naphthoquinone-2-diazido-5-sulfonic acid)-2,3,4-trihydroxybenzophenone ester or tri(1-naphtoquinone-2-diazido-5-sulfonic acid)-2,3,4,4'-tetrahydroxybenzophenone ester.
Claim 9
Dependent Claim
28 words
A composition according to claim 4, wherein the content of said sensitizer is 5 to 100 parts by weight with respect to 100 parts by weight of polysilane.
Claim 10
Dependent Claim
12 words
A composition according to claim 3, further comprising an alkali soluble resin.
Claim 11
Dependent Claim
16 words
A composition according to claim 8, wherein said alkali soluble resin contains a phenolic hydroxyl group.
Claim 12
Dependent Claim
35 words
A composition according to claim 8, wherein the content of said alkali soluble resin is 5 to 100 parts by weight with respect to 100 parts by weight of the polysilane as a main component.
Claim 13
Dependent Claim
14 words
A polysilane according to claim 1, containing at least one unit of formula I.
Claim 14
Dependent Claim
13 words
A polysilane according to claim 1, containing at least one unit formula II.
Claim 15
Dependent Claim
14 words
A polysilane according to claim 1, containing at least one unit of formula III.
Claim 16
Dependent Claim
9 words
A photosensitive composition comprising the polysilane of claim 11.
Claim 17
Dependent Claim
9 words
A photosensitive composition comprising the polysilane of claim 12.
Claim 18
Dependent Claim
9 words
A photosensitive composition comprising the polysilane of claim 13.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-10-02 | 1993-04-03 | 1993-10-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-10-02 | 1997-04-03 | 1997-10-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-10-02 | 2001-04-03 | 2001-10-03 | $7700.00 | Window Closed / Lapsed |