US4745169A
Expired / Lapsed
US
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Alkali-soluble siloxane polymer, silmethylene polymer, and polyorganosilsesquioxane polymer
Assignee: Hitachi Ltd
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Filing: 1986-05-05
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Granted: 1988-05-17
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Expires: 2006-05-05
Abstract
Abstract There are provided an alkali-soluble siloxane polymer, an alkali-soluble silmethylene polymer, and an alkali-soluble polyorganosilsesquioxane polymer. They are useful as a photoresist for the fabrication of semiconductor devices. They are suitable for dry etching because of their superior resistance to oxygen plasmas.
Inventors
- 👤 Hisashi Sugiyama
- 👤 Kazuo Nate
- 👤 Takashi Inoue
- 👤 Akiko Mizushima
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 15:34
CPC Classifications
C; C08; C08G; C08G77/00; C08G77/60; C08G77/04; C08G77/14; G; G03; G03F; G03F7/00; G03F7/004; G03F7/075; G03F7/0757
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
55 words
An alkali-soluble siloxane polymer in which more than 40% of the siloxane units is composed of the unit represented by the formula (1): ##STR16## where R 1 is a hydrogen or a monovalent organic group other than aromatic groups; R 2 and R 3 are each a hydrogen, a chlorine, or a monovalent organic group.
Claim 2
Dependent Claim
55 words
An alkali-soluble siloxane polymer in which more than 40% of the siloxane units is composed of the unit represented by the formula (1): ##STR16## where R 1 is a hydrogen or a monovalent organic group other than aromatic groups; R 2 and R 3 are each a hydrogen, a chlorine, or a monovalent organic group.
Claim 3
Dependent Claim
36 words
An alkali-soluble siloxane polymer as set forth in claim 1, wherein R 1 is methyl group, R 2 and R 3 are each hydrogen, and the OH group is at the p-position of the benzene ring.
Claim 4
Dependent Claim
78 words
an alkali-soluble silmethylene polymer composed of the constitutional unit represented by the formula (2). ##STR17## where R 1 , R 2 , and R 3 are each a hydrogen or a monovalent organic group; R 4 is an alkyl group; l is 1 or 2; the OH groups and OR 4 groups are at arbitrary positions on the benzene ring, m and n are positive integers and m+n is 2 to 200 and n/(m+n) is greater than 0.4.
Claim 5
Dependent Claim
78 words
an alkali-soluble silmethylene polymer composed of the constitutional unit represented by the formula (2). ##STR17## where R 1 , R 2 , and R 3 are each a hydrogen or a monovalent organic group; R 4 is an alkyl group; l is 1 or 2; the OH groups and OR 4 groups are at arbitrary positions on the benzene ring, m and n are positive integers and m+n is 2 to 200 and n/(m+n) is greater than 0.4.
Claim 6
Dependent Claim
47 words
An alkali-soluble silmethylene polymer as set forth in claim 3, wherein R 1 , R 2 , and R 4 are methyl groups, R 3 is hydrogen, l is 1, and the OH group and OR 4 group are each on the p-position of the benzene ring.
Claim 7
Dependent Claim
47 words
An alkali-soluble polyorganosilsesquioxane polymer represented by the formula (3): ##STR18## where R 1 and R 2 are the same or different organic groups, and n is a positive integer representing a degree of polymerization, and more than 40% of R 1 and R 2 are hydroxybenzyl groups.
Claim 8
Dependent Claim
47 words
An alkali-soluble polyorganosilsesquioxane polymer represented by the formula (3): ##STR18## where R 1 and R 2 are the same or different organic groups, and n is a positive integer representing a degree of polymerization, and more than 40% of R 1 and R 2 are hydroxybenzyl groups.
Claim 9
Dependent Claim
29 words
An alkali-soluble polyorganosilsesquioxane polymer as set forth in claim 5, wherein R 1 and R 2 are each p-hydroxybenzyl group and p-methoxybenzyl group, and n is 8 to 200.
Claim 10
Dependent Claim
27 words
An alkali-soluble polyorganosilsesquioxane polymer as set forth in claim 5, wherein R 1 and R 2 are each a p-hydroxybenzyl group, and n is 8 to 200.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-05-17 | 1991-11-16 | 1992-05-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-05-17 | 1995-11-16 | 1996-05-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-05-17 | 1999-11-16 | 2000-05-17 | $7700.00 | Window Closed / Lapsed |