US5173452A
Expired / Lapsed
US
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Process for the vapor deposition of polysilanes photoresists
Assignee: Individual
•
Filing: 1991-01-02
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Granted: 1992-12-22
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Expires: 2011-01-02
Abstract
Abstract Disclosed is a process for forming a film comprising a polysilane composition on a substrate. The film is formed by vapor deposition directly on a substrate, thus avoiding the cumbersome steps ordinarily encountered in preparing and applying polysilanes by conventional spin application techniques. The film is used in a lithographic process for forming an image on a substrate.
Inventors
- 👤 David M. Dobuzinsky
- 👤 Mark C. Hakey
- 👤 Steven J. Holmes
- 👤 David V. Horak
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 09:19
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/16; G03F7/167; G03F7/004; G03F7/075; G03F7/0754; Y; Y10; Y10S; Y10S148/00; Y10S148/137; Y10S438/00; Y10S438/942; Y10S438/948
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
55 words
A process for forming a film on a substrate, comprising exposing said substrate to the vapor of a polymerizable silane monomer in the substantial absence of oxygen and under such conditions as to deposit on said substrate a film which is photosensitive and comprises a polysilane composition having a chemical backbone characterized by sillicon-silicon bonding.
Claim 2
Dependent Claim
55 words
A process for forming a film on a substrate, comprising exposing said substrate to the vapor of a polymerizable silane monomer in the substantial absence of oxygen and under such conditions as to deposit on said substrate a film which is photosensitive and comprises a polysilane composition having a chemical backbone characterized by sillicon-silicon bonding.
Claim 3
Dependent Claim
70 words
The process of claim 1, wherein said polymerizable silane monomer has the formula ##STR3## wherein: R is H; C 1 -C 4 alkyl, alkenyl, alkynyl, alkoxy or alkyl silyl; aryl; or amino; R' is H; C 1 -C 4 alkyl, alkenyl, alkynyl, alkoxy or alkyl silyl; aryl; amino; halo; or methyl halo; and R" is H; C 1 -C 4 alkyl, alkenyl, alkynyl, alkoxy or alkyl silyl; aryl; or amino.
Claim 4
Dependent Claim
35 words
The process of claim 2, wherein: R is C 1 -C 3 alkyl; R' is C 1 -C 4 alkyl, trimethyl silyl, aryl, fluoro or methyl fluoro; and R" is C 1 -C 3 alkyl.
Claim 5
Dependent Claim
12 words
The process of claim 3, wherein said polymerizable silane monomer is pentamethylmethoxydisilane.
Claim 6
Dependent Claim
15 words
The process of claim 1, wherein said substrate is silicon dioxide coated silicon or silicon.
Claim 7
Dependent Claim
76 words
A process for forming a film on a substrate, comprising exposing said substrate to the vapor of a polymerizable silane monomer under such conditions as to deposit on said substrate a film comprising a polysilane composition, wherein said polymerizable silane monomer is heated to a temperature ranging from about 300° to about 650° C. at a pressure ranging from about 50 mtorr to about 100 torr for a period of about 1 to about 20 minutes.
Claim 8
Dependent Claim
76 words
A process for forming a film on a substrate, comprising exposing said substrate to the vapor of a polymerizable silane monomer under such conditions as to deposit on said substrate a film comprising a polysilane composition, wherein said polymerizable silane monomer is heated to a temperature ranging from about 300° to about 650° C. at a pressure ranging from about 50 mtorr to about 100 torr for a period of about 1 to about 20 minutes.
Claim 9
Dependent Claim
27 words
The process of claim 6, wherein said temperature ranges from about 500° to about 600° C. and said pressure ranges from about 2 to about 5 torr.
Claim 10
Dependent Claim
78 words
A process for forming an image on a substrate, said process comprising the steps of: exposing said substrate to the vapor of a polymerizable silane monomer in the substantial absence of oxygen and under such conditions as to deposit on said substrate a film which is photosensitive and comprises a polysilane composition having a chemical backbone characterized by silicon-silicon bonding; exposing said film in a predetermined pattern to radiation; and removing the radiation exposed portions of said film.
Claim 11
Dependent Claim
78 words
A process for forming an image on a substrate, said process comprising the steps of: exposing said substrate to the vapor of a polymerizable silane monomer in the substantial absence of oxygen and under such conditions as to deposit on said substrate a film which is photosensitive and comprises a polysilane composition having a chemical backbone characterized by silicon-silicon bonding; exposing said film in a predetermined pattern to radiation; and removing the radiation exposed portions of said film.
Claim 12
Dependent Claim
70 words
The process of claim 8, wherein said polymerizable silane monomer has the formula ##STR4## wherein: R is H; C 1 -C 4 alkyl, alkenyl, alkynyl, alkoxy or alkyl silyl; aryl; or amino; R' is H; C 1 -C 4 alkyl, alkenyl, alkynyl, alkoxy or alkyl silyl; aryl; amino; halo; or methyl halo; and R" is H; C 1 -C 4 alkyl, alkenyl, alkynyl, alkoxy or alkyl silyl; aryl; or amino.
Claim 13
Dependent Claim
35 words
The process of claim 9, wherein: R is C 1 -C 3 alkyl; R' is C 1 -C 4 alkyl, trimethyl silyl, aryl, fluoro or methyl fluoro; and R" is C 1 -C 3 alkyl.
Claim 14
Dependent Claim
12 words
The process of claim 10, wherein said polymerizable silane monomer is pentamethylmethoxydisilane.
Claim 15
Dependent Claim
15 words
The process of claim 8, wherein said substrate is silicon dioxide coated silicon or silicon.
Claim 16
Dependent Claim
99 words
A process for forming an image on a substrate, said process comprising the steps of: exposing said substrate to the vapor of a polymerizable silane monomer under such conditions as to deposit on said substrate a film comprising a polysilane composition, wherein said polymerizable silane monomer is heated to a temperature ranging from about 200° to about 650° C. at a pressure ranging from about 50 mtorr to about 100 torr for a period of about 1 to about 20 minutes; exposing said film in a predetermined pattern to radiation; and removing the radiation exposed portions of said film.
Claim 17
Dependent Claim
99 words
A process for forming an image on a substrate, said process comprising the steps of: exposing said substrate to the vapor of a polymerizable silane monomer under such conditions as to deposit on said substrate a film comprising a polysilane composition, wherein said polymerizable silane monomer is heated to a temperature ranging from about 200° to about 650° C. at a pressure ranging from about 50 mtorr to about 100 torr for a period of about 1 to about 20 minutes; exposing said film in a predetermined pattern to radiation; and removing the radiation exposed portions of said film.
Claim 18
Dependent Claim
27 words
The process of claim 13, wherein said temperature ranges from about 500° to about 600° C. and said pressure ranges from about 2 to about 5 torr.
Claim 19
Dependent Claim
156 words
A process for forming an image on a substrate, said method comprising the steps of: exposing said substrate to the vapor of a polymerizable silane monomer, which is heated to a temperature ranging from about 500° to about 600° C. at a pressure ranging from about 2 to about 5 torr, in the substantial absence of oxygen, so as to deposit on said substrate a film which is photosensitive and comprises a polysilane composition, said polymerizable silane monomer having the formula ##STR5## wherein: R is H; C 1 -C 4 alkyl, alkenyl, alkynyl, alkoxy or alkyl silyl; aryl; or amino; R' is H; C 1 -C 4 alkyl, alkenyl, alkynyl, alkoxy or alkyl silyl; aryl; amino; halo; or methyl halo; and R" is H; C 1 -C 4 alkyl, alkenyl, alkynyl, alkoxy or alkyl silyl; aryl; or amino; exposing said film in a predetermined pattern to radiation; and removing the radiation exposed portions of said film.
Claim 20
Dependent Claim
156 words
A process for forming an image on a substrate, said method comprising the steps of: exposing said substrate to the vapor of a polymerizable silane monomer, which is heated to a temperature ranging from about 500° to about 600° C. at a pressure ranging from about 2 to about 5 torr, in the substantial absence of oxygen, so as to deposit on said substrate a film which is photosensitive and comprises a polysilane composition, said polymerizable silane monomer having the formula ##STR5## wherein: R is H; C 1 -C 4 alkyl, alkenyl, alkynyl, alkoxy or alkyl silyl; aryl; or amino; R' is H; C 1 -C 4 alkyl, alkenyl, alkynyl, alkoxy or alkyl silyl; aryl; amino; halo; or methyl halo; and R" is H; C 1 -C 4 alkyl, alkenyl, alkynyl, alkoxy or alkyl silyl; aryl; or amino; exposing said film in a predetermined pattern to radiation; and removing the radiation exposed portions of said film.
Claim 21
Dependent Claim
35 words
The process of claim 15, wherein: R is C 1 -C 3 alkyl; R' is C 1 -C 4 alkyl, trimethyl silyl, aryl, fluoro or methyl fluoro; and R" is C 1 -C 3 alkyl.
Claim 22
Dependent Claim
23 words
The process of claim 16, wherein said film is exposed to radiation having a wavelength ranging from about 240 to about 260 nanometers.
Claim 23
Dependent Claim
22 words
The process of claim 17, wherein said polymerizable silane monomer is pentamethylmethoxydisilane, and said substrate is silicon dioxide coated silicon or silicon.
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