US4386117A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Coating process using alkoxy substituted silicon-bearing reactant
Assignee: Individual
•
Filing: 1981-11-20
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Granted: 1983-05-31
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Expires: 2001-11-20
Abstract
Abstract An improved process for chemical vapor deposition of coatings of the type bearing silicon oxide or silicon oxide/tin oxide mixtures. The process involves the use of mono- or di-alkoxy terminated permethylpolysilanes, preferably monomethoxypentamethyldisilane, as a silicon-donating reactant. Also disclosed are novel transparent silicon-bearing coating compositions which can be formed by the improved process to have any desired refractive index value from about 1.44 to about 2.0.
Inventors
- 👤 Roy G. Gordon
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 02:13
CPC Classifications
C; C03; C03C; C03C17/00; C03C17/22; C03C17/23; C03C17/245; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/401; C23C16/402; C03C2217/00; C03C2217/20; C03C2217/21; C03C2217/213; C03C2217/23; C03C2218/00; C03C2218/10; C03C2218/15; C03C2218/152
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
71 words
In a process for making a silicon-oxide-bearing, transparent coating by reacting (a) silicon-bearing gas at elevated temperatures with (b) a gaseous oxidizing agent for oxidizing said silicon at the hot surface of an article to be coated, the improvement wherein said silicon-bearing gas comprises at least one silicon-bearing compound of the formula R(R.sub.2 Si).sub.n OR wherein R is any lower alkyl and n is any integer from 2 to about 10.
Claim 2
Dependent Claim
71 words
In a process for making a silicon-oxide-bearing, transparent coating by reacting (a) silicon-bearing gas at elevated temperatures with (b) a gaseous oxidizing agent for oxidizing said silicon at the hot surface of an article to be coated, the improvement wherein said silicon-bearing gas comprises at least one silicon-bearing compound of the formula R(R.sub.2 Si).sub.n OR wherein R is any lower alkyl and n is any integer from 2 to about 10.
Claim 3
Dependent Claim
13 words
A process as defined in claim 1 wherein n is 2 to 6.
Claim 4
Dependent Claim
11 words
A process as defined in claim 2 wherein R is methyl.
Claim 5
Dependent Claim
21 words
A process as defined in claims 1, 2, or 3 wherein the reaction is carried out at temperatures above 570° C.
Claim 6
Dependent Claim
30 words
A process as defined in claims 1, 2 or 3 wherein the reaction is carried out with reaction mixtures having an initial concentration of above 0.4% of said silicon-bearing compound.
Claim 7
Dependent Claim
36 words
A process as defined in claims 1, 2 or 3 wherein the reaction is carried out at temperatures above 570° C. and with reaction mixtures having an initial concentration of above 0.4% of said silicon-bearing compound.
Claim 8
Dependent Claim
28 words
A process as defined in claims 1, 2 or 3 wherein n is 2 to 6, wherein the reaction is carried out at a temperature above 570° C.
Claim 9
Dependent Claim
32 words
A process as defined in claims 1, 2 or 3 wherein, additionally, oxidizable tin-bearing gas is admixed with said silicon-bearing gas and wherein tin is co-deposited is said coating with said silicon.
Claim 10
Dependent Claim
45 words
A process as defined in claims 1, 2 or 3 wherein, additionally, an oxidizable tin-bearing gas is admixed with said silicon-bearing gas and wherein tin is co-deposited in said coating with said silicon and wherein said coating is carried out at temperatures above 570° C.
Claim 11
Dependent Claim
20 words
A process as defined in claims 1, 2 or 3 wherein said silicon-bearing compound is Me 5 Si 2 OMe.
Claim 12
Dependent Claim
23 words
A process as defined in claims 1, 2 or 3 wherein the coating deposition rate is between 60 and 150 angstroms per second.
Claim 13
Dependent Claim
50 words
A process as defined in claims 1, 2 or 3 wherein the reaction is carried out at temperatures above 570° C. or with reaction mixtures having an initial concentration of above 0.4% of said silicon-bearing compound, and wherein the coating deposition rate is between 60 and 150 angstroms per second.
Claim 14
Dependent Claim
71 words
In a process for making a silicon-oxide-bearing, transparent coating by reacting (a) silicon-bearing gas at elevated temperatures with (b) a gaseous oxidizing agent for oxidizing said silicon at the hot surface of an article to be coated, the improvement wherein said silicon-bearing gas comprises at least one silicon-bearing compound of the formula RO(R.sub.2 Si).sub.n OR wherein R is any lower alkyl and n is any integer from 2 to about 10.
Claim 15
Dependent Claim
71 words
In a process for making a silicon-oxide-bearing, transparent coating by reacting (a) silicon-bearing gas at elevated temperatures with (b) a gaseous oxidizing agent for oxidizing said silicon at the hot surface of an article to be coated, the improvement wherein said silicon-bearing gas comprises at least one silicon-bearing compound of the formula RO(R.sub.2 Si).sub.n OR wherein R is any lower alkyl and n is any integer from 2 to about 10.
Claim 16
Dependent Claim
13 words
A process as defined in claim 13 wherein n is 2 to 6.
Claim 17
Dependent Claim
15 words
A process as defined in claim 14 wherein R is methyl and n is 2.
Claim 18
Dependent Claim
22 words
A process as defined in claims 13, 14 or 15 wherein the reaction is carried out at temperatures above 570 degrees C.
Claim 19
Dependent Claim
30 words
A process as defined in claims 13, 14 or 15 wherein the reaction is carried out with reaction mixtures having an initial concentration of above 0.4% of said silicon-bearing compound.
References Cited (Backward Citations)
US4187336A
Cited
US4206252A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-05-30 | 1986-11-29 | 1987-05-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-05-30 | 1990-11-29 | 1991-05-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-05-30 | 1994-11-29 | 1995-05-31 | $7700.00 | Window Closed / Lapsed |