US5363794A
Expired / Lapsed
US
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Uniaxial thin film structures formed from oriented bilayers and multilayers
Assignee: Leland Stanford Junior University
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Filing: 1992-12-02
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Granted: 1994-11-15
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Expires: 2012-12-02
Abstract
Abstract A method for producing oriented, intermetallic, thin film structures having uniaxial magnetic, electronic, optical, and mechanical properties. Artificial superlattices (10) are assembled by sputter deposition of alternating layers of the component metals of the target intermetallic compound on an aligned substrate (16). Either single crystal substrates or crystallographically textured substrates may be used to induce alignment of the deposited layers (10, 12) in the method of the present invention. Annealing of the resulting superlattice (10) generates aligned, thin film intermetallic compounds (38) of the component metals at the interfaces (44) of the superlattice (10), the thin film intermetallic compounds having pronounced, uniaxial properties.
Inventors
- 👤 Bruce M. Lairson
- 👤 Bruce M. Clemens
- 👤 Mark R. Visokay
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 01:21
CPC Classifications
C; C23; C23C; C23C26/00; C30; C30B; C30B23/00; C30B23/02; C30B29/00; C30B29/60; C30B29/68
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
181 words
A method for making oriented thin films of an intermetallic compound having generally uniaxial magnetic, optical, electronic, and mechanical properties, the method comprising the steps of: selecting a substrate material having an alignment suitable for biasing the orientation of deposited materials; depositing a plurality of layers of a first metal having a first crystal structure onto the substrate material; depositing a plurality of layers of a second metal on top of the plurality of layers of the first metal, to form an interface between the first and second metals, the second metal having a second crystal structure such that an intermetallic compound formed by combining the first and second metals has a preferred orientation with respect to the interface; repeating the deposition of alternating pluralities of layers of first and second metals a selected number of times to produce a plurality of interfaces; and annealing the deposited layers to coherently precipitate an oriented thin film of the intermetallic compound formed from the combined first and second metals at each of the interfaces between the pluralities of first and second metal layers.
Claim 2
Independent Claim
181 words
A method for making oriented thin films of an intermetallic compound having generally uniaxial magnetic, optical, electronic, and mechanical properties, the method comprising the steps of: selecting a substrate material having an alignment suitable for biasing the orientation of deposited materials; depositing a plurality of layers of a first metal having a first crystal structure onto the substrate material; depositing a plurality of layers of a second metal on top of the plurality of layers of the first metal, to form an interface between the first and second metals, the second metal having a second crystal structure such that an intermetallic compound formed by combining the first and second metals has a preferred orientation with respect to the interface; repeating the deposition of alternating pluralities of layers of first and second metals a selected number of times to produce a plurality of interfaces; and annealing the deposited layers to coherently precipitate an oriented thin film of the intermetallic compound formed from the combined first and second metals at each of the interfaces between the pluralities of first and second metal layers.
Claim 3
Dependent Claim
16 words
The method of claim 1, wherein the substrate material is a textured polycrystalline or amorphous material.
Claim 4
Dependent Claim
14 words
The method of claim 1, wherein the substrate material is a single crystal material.
Claim 5
Dependent Claim
12 words
The method of claim 3, wherein the single crystal material is MgO.
Claim 6
Dependent Claim
34 words
The method of claim 1, wherein the coherent precipitate of the combined first and second metals has an L1 0 crystal structure having its c-axis aligned perpendicular to the plane of the thin film.
Claim 7
Dependent Claim
16 words
The method of claim 5, wherein the first and second plurality of layers are deposited epitaxially.
Claim 8
Dependent Claim
16 words
The method of claim 6, wherein the first and second metals are Fe and Pt, respectively.
Claim 9
Dependent Claim
33 words
The method of claim 7, wherein the total thickness of the plurality of Fe layers is approximately 23 Angstroms and the total thickness of the plurality of Pt layers is approximately 29.5 Angstroms.
Claim 10
Dependent Claim
27 words
The oriented thin film of L1 0 PtFe having its c-axis aligned perpendicular to the plane of the thin film, produced by the method of claim 7.
Claim 11
Independent Claim
143 words
A method for making oriented thin films of an intermetallic compound having generally uniaxial magnetic, optical, electronic, and mechanical properties, the method comprising the steps of: selecting a substrate material having an alignment suitable for biasing the orientation of deposited materials; depositing alternating pluralities of layers of first and second metals onto the substrate material, to form a plurality of interfaces between the first and second metals, the first and second metals having first and second crystal structures, respectively, such that an intermetallic compound formed by combining the first and second metals has a preferred orientation with respect to the plurality of interfaces; and annealing the deposited layers to coherently precipitate an oriented thin film of the intermetallic compound formed from the combined first and second metals at each of the plurality of interfaces between the pluralities of first and second metal layers.
Claim 12
Independent Claim
143 words
A method for making oriented thin films of an intermetallic compound having generally uniaxial magnetic, optical, electronic, and mechanical properties, the method comprising the steps of: selecting a substrate material having an alignment suitable for biasing the orientation of deposited materials; depositing alternating pluralities of layers of first and second metals onto the substrate material, to form a plurality of interfaces between the first and second metals, the first and second metals having first and second crystal structures, respectively, such that an intermetallic compound formed by combining the first and second metals has a preferred orientation with respect to the plurality of interfaces; and annealing the deposited layers to coherently precipitate an oriented thin film of the intermetallic compound formed from the combined first and second metals at each of the plurality of interfaces between the pluralities of first and second metal layers.
Claim 13
Dependent Claim
34 words
The method of claim 10, wherein the coherent precipitate of the combined first and second metals has an L1 0 crystal structure having its c-axis oriented perpendicular to the plane of the thin film.
Claim 14
Dependent Claim
16 words
The method of claim 11 wherein the first and second metals are Co and Pt, respectively.
Claim 15
Dependent Claim
33 words
The method of claim 12, wherein the total thickness of the plurality of Co layers is approximately 13 Angstroms and the total thickness of the plurality of Pt layers is approximately 15 Angstroms.
Claim 16
Dependent Claim
27 words
The oriented thin film of L1 0 PtCo having its c-axis aligned perpendicular to the plane of the thin film, produced by the method of claim 12.
Claim 17
Dependent Claim
31 words
The method of claim 1, wherein the first and second metals are selected from the group of metal pairs consisting of Fe--Ni, Fe--Pd, Ni--Pd, Ni--Pt, Pd--Co, Co--Ni, Cu--Au, Pt--Co and Cr--Pd.
Claim 18
Dependent Claim
53 words
The method of claim 1, wherein annealing the sample comprises the substeps of: subjecting the sample to reduced pressures of between 1×10 -6 Torr and 1×10 -7 Torr; heating the sample to between 450° C. and 675° C.; and maintaining the sample at the elevated temperature for between 12 hours and 16 hours.
Claim 19
Dependent Claim
16 words
The method of claim 1, wherein the annealing step comprises subjecting the sample to laser heating.
Claim 20
Dependent Claim
17 words
The method of claim 1, wherein the annealing step comprises subjecting the sample to rapid thermal annealing.
Claim 21
Dependent Claim
18 words
The method of claim 1, wherein the annealing step comprises heating the sample in an inert gas ambient.
Claim 22
Dependent Claim
16 words
The method of claim 1, wherein the first and second metals are first and second alloys.
Claim 23
Dependent Claim
39 words
The method of claim 1, wherein an underlayer of Pt is deposited on the substrate prior to deposition of the plurality of layers of the first metal, to allow deposition of the first and second metals at lower temperatures.
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