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US4454495A
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Layered ultra-thin coherent structures used as electrical resistors having low temperature coefficient of resistivity
Assignee: UNITED STATES OF AMERICAS AS REPRESENTED BY DEPARTMENT OF ENERGY
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Filing: 1982-08-31
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Granted: 1984-06-12
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Expires: 2002-08-31
Abstract
Abstract A thin film resistor having a controlled temperature coefficient of resistance (TCR) ranging from negative to positive degrees kelvin and having relatively high resistivity. The resistor is a multilayer superlattice crystal containing a plurality of alternating, ultra-thin layers of two different metals. TCR is varied by controlling the thickness of the individual layers. The resistor can be readily prepared by methods compatible with thin film circuitry manufacturing techniques.
Inventors
- 👤 Thomas R. Werner
- 👤 Charles M. Falco
- 👤 Ivan K. Schuller
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 17:25
CPC Classifications
H; H01; H01C; H01C7/00; H01C7/18; H01C7/008; Y; Y10; Y10S; Y10S505/00; Y10S505/825; Y10S505/881
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
93 words
A thin-film electrical resistor having a predetermined coefficient of resistance ranging from negative to positive ppm/K comprising: a coherent, multilayer crystal consisting of alternating layers of two metallic elements, the two elements being selected from the group of copper and niobium, nickel and tungsten and nickel and molybdenum, the layers being of about the same thickness, each layer consisting of a single crystalline element at least 2 Å in thickness to form a resistor having a negative temperature coefficient to resistance increasing to 0 and becoming positive as the layer thickness is increased.
Claim 2
Dependent Claim
93 words
A thin-film electrical resistor having a predetermined coefficient of resistance ranging from negative to positive ppm/K comprising: a coherent, multilayer crystal consisting of alternating layers of two metallic elements, the two elements being selected from the group of copper and niobium, nickel and tungsten and nickel and molybdenum, the layers being of about the same thickness, each layer consisting of a single crystalline element at least 2 Å in thickness to form a resistor having a negative temperature coefficient to resistance increasing to 0 and becoming positive as the layer thickness is increased.
Claim 3
Dependent Claim
16 words
The thin-film resistor of claim 1 wherein the crystal is at least 300 Å in thickness.
Claim 4
Dependent Claim
21 words
The thin-film resistor of claim 2 wherein individual layer thickness is from about 2 Å to about 50 Å in thickness.
Claim 5
Dependent Claim
15 words
The thin-film resistor of claim 3 wherein the resistor is composed of niobium and copper.
Claim 6
Dependent Claim
22 words
The thin-film resistor of claim 4 wherein the layer thickness is about 2 Å to 10 Å and the TCR is negative.
Claim 7
Dependent Claim
26 words
The thin-film resistor of claims 5 wherein the layer thickness is from about 10 to 11 Å in thickness, and the TCR is about 0 ppm/K.
Claim 8
Dependent Claim
21 words
The thin-film resistor of claim 6 wherein the layer thickness is greater than about 11 Å and the TCR is positive.
Claim 9
Dependent Claim
15 words
The thin-film resistor of claim 3 wherein the resistor is composed of nickel and molybdenum.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-06-12 | 1987-12-12 | 1988-06-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-06-12 | 1991-12-12 | 1992-06-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-06-12 | 1995-12-12 | 1996-06-12 | $7700.00 | Window Closed / Lapsed |