US4430183A
Expired / Lapsed
US
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Method of making coherent multilayer crystals
Assignee: United States Department of Energy
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Filing: 1982-09-27
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Granted: 1984-02-07
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Expires: 2002-09-27
Abstract
Abstract A new material consisting of a coherent multilayer crystal of two or more elements where each layer is composed of a single element. Each layer may vary in thickness from about 2 Å to 2500 Å. The multilayer crystals are prepared by sputter deposition under conditions which slow the sputtered atoms to near substrate temperatures before they contact the substrate.
Inventors
- 👤 Ivan K. Schuller
- 👤 Charles M. Falco
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 11:05
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3464; C30; C30B; C30B23/00; C30B23/02; C30B29/00; C30B29/60; C30B29/68; Y; Y10; Y10S; Y10S505/00; Y10S505/725; Y10S505/729; Y10S505/73; Y10S505/731
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
210 words
A process for forming a multilayer, superlattice crystal having parallel, ultrathin alternating layers of two different metal elements comprising: placing a substrate suitable for epitaxial growth into a vacuum vessel; removing the ambient gas from the vessel; establishing a pressure of sputtering gas of at least 5×10 -3 torr in the vessel; heating the substrate to about 150° to 450° C.; establishing two beams of sputtered atoms, one beam for each metal element of which the crystal is to be formed, the metals being elements which will grow epitaxially on each other; adjusting the thermal energy of the atoms in each beam so that the temperature of the atoms as they reach the substrate, is about the temperature of the surface of the substrate, whereby the atoms in the beam do not displace or eject atoms in layers already deposited on the surface but grow epitaxially on the layers to form a superlattice crystal structure; and alternately passing each beam of sputtered atoms over the the substrate to deposit alternate layers of the two metal atoms epitaxially on the surface and on each other, each layer being from 2 to 2500 angstroms in thickness, thereby forming a multilayer, superlattice crystal having parallel, ultrathin alternating layers of two different metal elements.
Claim 2
Dependent Claim
210 words
A process for forming a multilayer, superlattice crystal having parallel, ultrathin alternating layers of two different metal elements comprising: placing a substrate suitable for epitaxial growth into a vacuum vessel; removing the ambient gas from the vessel; establishing a pressure of sputtering gas of at least 5×10 -3 torr in the vessel; heating the substrate to about 150° to 450° C.; establishing two beams of sputtered atoms, one beam for each metal element of which the crystal is to be formed, the metals being elements which will grow epitaxially on each other; adjusting the thermal energy of the atoms in each beam so that the temperature of the atoms as they reach the substrate, is about the temperature of the surface of the substrate, whereby the atoms in the beam do not displace or eject atoms in layers already deposited on the surface but grow epitaxially on the layers to form a superlattice crystal structure; and alternately passing each beam of sputtered atoms over the the substrate to deposit alternate layers of the two metal atoms epitaxially on the surface and on each other, each layer being from 2 to 2500 angstroms in thickness, thereby forming a multilayer, superlattice crystal having parallel, ultrathin alternating layers of two different metal elements.
Claim 3
Dependent Claim
47 words
The process of claim 1 wherein the thermal energy of the atoms in each beam is adjusted by varying the distance between the source of the beam of atoms and the surface of the substrate and by varying the pressure of the sputtering gas in the vessel.
Claim 4
Dependent Claim
38 words
The process of claim 2 wherein the elements from which the crystal is formed are selected from the group consisting of Co, Ge, Si, Nb, Fe, Ag, Ni, Cu, Al, Mo, Ta, W, V, Ru, Au and Pd.
Claim 5
Dependent Claim
28 words
The process of claim 3 wherein the sputtering gun is a high rate sputtering gun capable of sputtering at a rate of 10 to 100 Å per second.
Claim 6
Dependent Claim
15 words
The process of claim 3 wherein the sputtering gun is a dc magnetron sputtering gun.
Claim 7
Dependent Claim
26 words
The process of claim 5 wherein the elements from which the crystal is formed are selected from the group consisting of Nb, Cu, Ni, and Ag.
References Cited (Backward Citations)
US3856647A
Cited
US4093349A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-02-06 | 1987-08-08 | 1988-02-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-02-06 | 1991-08-08 | 1992-02-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-02-06 | 1995-08-08 | 1996-02-07 | $7700.00 | Window Closed / Lapsed |