Patent US5342734A successfully refreshed from Google Patents.
US5342734A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Deep UV sensitive photoresist resistant to latent image decay
Assignee: Morton International LLC
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Filing: 1992-05-13
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Granted: 1994-08-30
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Expires: 2012-05-13
Abstract
Abstract A positive working deep UV sensitive photoresist which provides improved critical dimension stability during prolonged periods of post exposure delay before baking comprises an acid stable polymer which is insoluble in water but normally soluble in an aqueous alkaline medium, a photoinitiator which generates acid upon exposure to actinic radiation, and a mixed carbonate ester of tertiary butyl alcohol and a polyhydric phenol which is an acid labile compound which inhibits the dissolution of the normally soluble polymer in said alkaline medium.
Inventors
- 👤 Richard M. Lazarus
- 👤 John J. Grunwald
- 👤 Chava Gal
- 👤 Shulamit Hirsch
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 17:10
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/039; G03F7/0045; G03F7/0042; H; H10; H10P; H10P76/00; H10P76/20; H10P76/204; H10P76/2041
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
64 words
A positive working photoresist composition comprising, in admixture: a polymer insoluble in water but normally soluble in an aqueous alkaline medium; a photoinitiator which generates an acid upon exposure to actinic radiation; and a mixed carbonate ester of tertiary butyl alcohol and a polyhydric phenol which is an acid labile compound which inhibits the dissolution of the normally soluble polymer in said alkaline medium.
Claim 2
Dependent Claim
64 words
A positive working photoresist composition comprising, in admixture: a polymer insoluble in water but normally soluble in an aqueous alkaline medium; a photoinitiator which generates an acid upon exposure to actinic radiation; and a mixed carbonate ester of tertiary butyl alcohol and a polyhydric phenol which is an acid labile compound which inhibits the dissolution of the normally soluble polymer in said alkaline medium.
Claim 3
Dependent Claim
13 words
The composition of claim 1 wherein the polymer is a poly (vinyl phenol).
Claim 4
Dependent Claim
12 words
The composition of claim 1 wherein the photoinitiator is a triarylsulfonium salt.
Claim 5
Dependent Claim
12 words
The composition of claim 3 wherein the salt is a hexafluoroantimonate salt.
Claim 6
Dependent Claim
11 words
The composition of claim 1 wherein the polyhydric phenol is pyrogallol.
Claim 7
Dependent Claim
19 words
The composition of claim 1 wherein the polyhydric phenol is a product of the condensation of acetone and pyrogallol.
Claim 8
Dependent Claim
11 words
The composition of claim 6 wherein the polyhydric phenol is hexahydrospirobiindene.
Claim 9
Dependent Claim
22 words
The composition of claim 1 wherein the carbonate ester is from about 3% to about 5% by weight of the total weight.
Claim 10
Dependent Claim
25 words
The composition of claim 1 wherein the polyhydric phenol is selected from the group consisting of pyrogallol, resorcinol, catechol, hydroquinone, phloroglucinol, hydroxyhydroquinone, trihydroxybenzophenone, and tetrahydroxybenzophenone.
Claim 11
Dependent Claim
67 words
A positive working photoresist composition comprising, in admixture: an acid stable polymer insoluble in water but normally soluble in an aqueous alkaline medium; a triarylsulfonium salt which generates an acid upon exposure to actinic radiation; and a mixed carbonate ester of tertiary butyl alcohol and a polyhydric phenol which is an acid labile compound which inhibits the dissolution of the normally soluble polymer in said alkaline medium.
Claim 12
Dependent Claim
67 words
A positive working photoresist composition comprising, in admixture: an acid stable polymer insoluble in water but normally soluble in an aqueous alkaline medium; a triarylsulfonium salt which generates an acid upon exposure to actinic radiation; and a mixed carbonate ester of tertiary butyl alcohol and a polyhydric phenol which is an acid labile compound which inhibits the dissolution of the normally soluble polymer in said alkaline medium.
Claim 13
Dependent Claim
11 words
The composition of claim 10 wherein the polyhydric phenol is pyrogallol.
Claim 14
Dependent Claim
19 words
The composition of claim 10 wherein the polyhydric phenol is the product of the condensation of acetone and pyrogallol.
Claim 15
Dependent Claim
11 words
The composition of claim 12 wherein the polyhydric phenol is hexahydrospirobiindene.
Claim 16
Dependent Claim
30 words
A radiation sensitive composition comprising: compound which forms an acid under the action of actinic radiation; and an acid labile carbonate ester of tertiary butyl alcohol and a polyhydric phenol.
Claim 17
Dependent Claim
30 words
A radiation sensitive composition comprising: compound which forms an acid under the action of actinic radiation; and an acid labile carbonate ester of tertiary butyl alcohol and a polyhydric phenol.
Claim 18
Dependent Claim
11 words
The composition of claim 14 wherein the polyhydric phenol is pyrogallol.
Claim 19
Dependent Claim
14 words
The composition of claim 14 wherein the acid forming compound is a triarylsulfonium salt.
Claim 20
Dependent Claim
12 words
The composition of claim 16 wherein the salt is a hexafluoroantimonate salt.
Claim 21
Dependent Claim
59 words
A radiation sensitive recording material which comprises a support and a recording layer thereon, said recording layer comprising, in admixture: an acid stable polymer insoluble in water but normally soluble in an aqueous alkaline medium; a photoinitiator which generates an acid upon exposure to actinic radiation; and a mixed carbonate ester of tertiary butyl alcohol and a polyhydric phenol.
Claim 22
Dependent Claim
59 words
A radiation sensitive recording material which comprises a support and a recording layer thereon, said recording layer comprising, in admixture: an acid stable polymer insoluble in water but normally soluble in an aqueous alkaline medium; a photoinitiator which generates an acid upon exposure to actinic radiation; and a mixed carbonate ester of tertiary butyl alcohol and a polyhydric phenol.
Claim 23
Dependent Claim
12 words
The recording material of claim 18 wherein the polyhydric phenol is pyrogallol.
Claim 24
Dependent Claim
18 words
The recording material of claim 18 wherein the polyhydric phenol is a condensation product of acetone and pyrogallol.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-08-29 | 1998-02-28 | 1998-08-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-08-29 | 2002-02-28 | 2002-08-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-08-29 | 2006-02-28 | 2006-08-30 | $7700.00 | Window Closed / Lapsed |