US5166033A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Positive resist composition containing quinone diazide sulfonate ester of vinylphenol compounds or isopropenylphenol compounds
Assignee: Zeon Corp
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Filing: 1990-09-25
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Granted: 1992-11-24
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Expires: 2010-09-25
Abstract
Abstract Disclosed herein is a positive resist composition comprising an alkali-soluble phenolic resin and the quinonediazide sulfonate of at least one phenolic compound selected from vinylphenol compounds and isopropenylphenol compounds as a photosensitive agent. It is suitable for use in minute processing.
Inventors
- 👤 Masayuki Oie
- 👤 Shoji Kawata
- 👤 Takamasa Yamada
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 18:31
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/022; G03F7/0226
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
73 words
A positive resist composition comprising in admixture; (i) 100 parts by weight of an alkali-soluble phenolic resin; (ii) 1-100 parts by weight of a photosensitive ester reaction product of a quinonediazide sulfonic compound and at least one phenolic compound selected from the group consisting of vinylphenol, isopropenylphenol, ring-substituted products of vinylphenol or isopropenylphenol, dimers or trimers of vinylphenol or isopropenylphenol, and hydrogenated products thereof; and (iii) sufficient solvent to dissolve the foregoing components.
Claim 2
Dependent Claim
73 words
A positive resist composition comprising in admixture; (i) 100 parts by weight of an alkali-soluble phenolic resin; (ii) 1-100 parts by weight of a photosensitive ester reaction product of a quinonediazide sulfonic compound and at least one phenolic compound selected from the group consisting of vinylphenol, isopropenylphenol, ring-substituted products of vinylphenol or isopropenylphenol, dimers or trimers of vinylphenol or isopropenylphenol, and hydrogenated products thereof; and (iii) sufficient solvent to dissolve the foregoing components.
Claim 3
Dependent Claim
15 words
A composition as claimed in claim 1, wherein the quinonediazide sulfonate is an o-quinonediazide sulfonate.
Claim 4
Dependent Claim
23 words
A composition as claimed in clam 2, wherein the o-quinonediazide sulfonate is a 1,2-benzoquinone-diazide-4-sulfonate, a 1,2-naphthoquinonediazide-4-sulfonate, a 1,2-naphthoquinonediazide-5-sulfonate, a 2,1-naphthoquinone-diazide-4-sulfonate or a 2,1-naphthoquinonediazide-5-sulfonate.
Claim 5
Dependent Claim
26 words
A composition as claimed in claim 1, wherein the degree of esterification, as the quinonediazide sulfonate, of the --OH groups in the phenolic compound, is 50-100%.
Claim 6
Dependent Claim
14 words
A composition as claimed in claim 4, wherein the degree of esterification is 70-100%.
References Cited (Backward Citations)
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Cited
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Cited
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Cited
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-11-24 | 1996-05-25 | 1996-11-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-11-24 | 2000-05-25 | 2000-11-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-11-24 | 2004-05-25 | 2004-11-24 | $7700.00 | Window Closed / Lapsed |