Patent US5326406A successfully refreshed from Google Patents.
US5326406A
Expired / Lapsed
US
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Method of cleaning semiconductor substrate and apparatus for carrying out the same
Assignee: Kawasaki Microelectronics Inc
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Filing: 1992-07-30
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Granted: 1994-07-05
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Expires: 2012-07-30
Abstract
Abstract A semiconductor wafer is placed in a reaction chamber and a cleaning gas is introduced into the reaction chamber. Then, the cleaning gas is excited by irradiation with light rays or heating to produce reactive radicals and a natural oxide film formed on the semiconductor wafer is first removed by the reactive radicals to expose a raw semiconductor wafer surface and then the exposed raw wafer surface is etched by the reactive radicals. Since the natural oxide film is first removed, the exposed raw surface of semiconductor wafer can be etched uniformly over the whole surface, and therefore the highly flat and perfectly crystalline surface can be obtained. It is preferable to introduce a chlorine fluoride series gas such as chlorine trifluoride gas in the cleaning gas. Then, the natural oxide film can be effectively removed by hydrogen fluorine radicals which are produced by irradiating the chloride fluoride series gas with ultraviolet rays.
Inventors
- 👤 Yoshio Kaneko
- 👤 Munetaka Koda
- 👤 Tadayoshi Shiraishi
- 👤 Takehiro Murakami
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:16
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/10; H10P70/18; B; B08; B08B; B08B7/00; B08B7/0035; B08B7/0057; H10P70/12; H10P72/00; H10P72/04; H10P72/0402; H10P72/0404
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
104 words
A method of cleaning a semiconductor wafer comprising the steps of: introducing the semiconductor wafer having a natural oxide film formed on a surface of the semiconductor wafer into a reaction chamber; and cleaning the surface of the semiconductor wafer by introducing a cleaning gas including at least a chlorine fluoride series gas into the reaction chamber and exciting the cleaning gas within the reaction chamber to produce reactive radicals and removing the natural oxide film formed on the semiconductor wafer with the reactive radicals to expose a raw surface of the semiconductor wafer, and etching the exposed raw surface of the semiconductor wafer.
Claim 2
Independent Claim
104 words
A method of cleaning a semiconductor wafer comprising the steps of: introducing the semiconductor wafer having a natural oxide film formed on a surface of the semiconductor wafer into a reaction chamber; and cleaning the surface of the semiconductor wafer by introducing a cleaning gas including at least a chlorine fluoride series gas into the reaction chamber and exciting the cleaning gas within the reaction chamber to produce reactive radicals and removing the natural oxide film formed on the semiconductor wafer with the reactive radicals to expose a raw surface of the semiconductor wafer, and etching the exposed raw surface of the semiconductor wafer.
Claim 3
Dependent Claim
19 words
A method according to claim 1, wherein during said cleaning step, said cleaning gas is irradiated with radiation rays.
Claim 4
Dependent Claim
13 words
A method according to claim 2, wherein said radiation rays include ultraviolet rays.
Claim 5
Dependent Claim
28 words
A method according to claim 2, wherein said cleaning gas is irradiated with radiation rays having different wavelengths such that the excitation is performed in a multi-step manner.
Claim 6
Dependent Claim
134 words
A method according to claim 3, wherein said cleaning step includes a first cleaning step in which a first cleaning gas containing a chlorine fluoride series gas and a hydrogen gas is introduced into the reaction chamber, irradiating the first cleaning gas with ultraviolet rays to produce hydrogen fluoride radicals, and removing the natural oxide film formed on the surface of semiconductor wafer by said hydrogen fluoride radicals to expose a raw surface of the semiconductor surface; and a second cleaning step in which a second cleaning gas containing a chlorine fluoride series gas is introduced into the gas cleaning chamber, the second cleaning gas is irradiated with ultraviolet rays to produce fluorine radicals and chlorine radicals, and said raw surface of the semiconductor wafer is etched by said fluorine radicals and chlorine radicals.
Claim 7
Dependent Claim
34 words
A method according to claim 5, wherein said chlorine fluoride series gas is selected from the group consisting of ClF, ClF 2 , ClF 3 , ClF 5 and Cl 2 F 6 .
Claim 8
Dependent Claim
111 words
A method according to claim 6, wherein during said first cleaning step, a chlorine trifluoride gas and the hydrogen gas are introduced into the reaction chamber at partial pressures of 1 to 100 Tort and 200 to 300 Torr, respectively, these gases are excited by irradiating them with the ultraviolet rays having a wavelength of 150 to 350 nm, and said semiconductor wafer is kept at the room temperature; and during said second cleaning step a chlorine trifluoride gas is introduced into the reaction chamber at a pressure of 1 to 100 Torr and said semiconductor wafer is kept at a temperature within a range from room temperature to 300° C.
Claim 9
Dependent Claim
47 words
A method according to claim 6, wherein said cleaning step further includes a third cleaning step in which a hydrogen gas is introduced into the reaction chamber to remove chloride compounds remaining on the semiconductor wafer surface and terminate the semiconductor wafer surface with the hydrogen gas.
Claim 10
Dependent Claim
48 words
A method according to claim 5, wherein each of said irradiating steps in the first and second cleaning steps is performed by irradiating said first cleaning gas with the ultraviolet rays and visible light rays or ultraviolet rays having wavelengths different from that of other said ultraviolet rays.
Claim 11
Dependent Claim
76 words
A method according to claim 3, wherein said cleaning step includes introducing the cleaning gas containing a chlorine fluoride series gas and a hydrogen chloride gas into the reaction chamber, irradiating said cleaning gas with the ultraviolet rays to produce hydrogen fluoride radicals and chlorine radicals, removing the natural oxide film by said hydrogen fluoride radicals to expose the raw surface of semiconductor wafer and etching said raw surface of semiconductor wafer with said chlorine radicals.
Claim 12
Dependent Claim
91 words
A method according to claim 10, wherein said chlorine fluoride series gas is selected from the group consisting of ClF, ClF 2 , ClF 3 , ClF 5 and Cl 2 F 6 , and said chlorine fluoride series gas and the hydrogen chloride gas are introduced into the reaction chamber at partial pressures of 10 -3 to 10 Torr and 10 -1 to 100 Torr, respectively and are irradiated with the ultraviolet rays having a wavelength of 150 to 350 nm, and said semiconductor wafer is kept at room temperature.
Claim 13
Dependent Claim
47 words
A method according to claim 10, wherein said irradiating step in the cleaning step is carried out by irradiating said cleaning gas with the ultraviolet rays and visible light rays or ultraviolet rays having a wavelength which is different from that of others of said ultraviolet rays.
Claim 14
Dependent Claim
31 words
A method according to claim 1, wherein said cleaning step is further performed by heating the semiconductor wafer within the reaction chamber to produce the reactive radicals by a thermal reaction.
Claim 15
Dependent Claim
125 words
A method according to claim 13, wherein said cleaning step includes a first cleaning step in which the cleaning gas containing a chlorine fluoride series gas and a hydrogen or hydrogen chloride gas is introduced into the gas cleaning chamber, the semiconductor wafer is heated to produce hydrogen fluoride radicals by a thermal reaction, and the natural oxide film is removed by said hydrogen fluoride radicals to expose the raw surface of semiconductor wafer; and a second cleaning step in which the chlorine fluoride series gas is introduced into the reaction chamber, the semiconductor wafer is heated to produce fluorine radicals and chlorine radicals by a thermal reaction, and the raw surface of the semiconductor wafer is etched by said fluorine radicals and chlorine radicals.
Claim 16
Dependent Claim
104 words
A method according to claim 14, wherein said chlorine fluoride series gas is selected from the group consisting of ClF, ClF 2 , ClF 3 , ClF 5 and Cl 2 F 6 , during said first cleaning steps, said semiconductor wafer is heated at a temperature of 100° to 600° C. and the chlorine fluoride series gas and hydrogen or hydrogen chloride gas are introduced into the reaction chamber at partial pressures of 10 -3 to 10 Torr and 1 to 500 Torr, respectively, and during said second cleaning step said semiconductor wafer is heated at a temperature of 100° to 300° C.
Claim 17
Dependent Claim
29 words
A method according to claim 5, wherein prior to the step of introducing the semiconductor wafer into the reaction chamber, the semiconductor wafer is cleaned with a cleaning liquid.
Claim 18
Dependent Claim
23 words
A method according to claim 16, wherein said semiconductor wafer is cleaned with a pure water which is heated or at room temperature.
Claim 19
Dependent Claim
53 words
A method according to claim 16, wherein said semiconductor wafer is cleaned with a cleaning agent liquid selected from the group consisting of NH 4 OH/H 2 O 2 /H 2 O, HCl/H 2 O 2 /H 2 O, H 2 SO 4 /H 2 O 2 and HF/H 2 O 2 .
Claim 20
Dependent Claim
143 words
A method according to claim 3, wherein said gas cleaning step includes a first gas cleaning step for introducing a hydrofluoric acid gas into said reaction chamber to remove the natural oxide film on the surface of the semiconductor wafer such that the raw surface of the semiconductor wafer is exposed; a second gas cleaning step for introducing a cleaning gas containing a chlorine fluoride series gas into said reaction chamber, and irradiating the cleaning gas with ultraviolet rays to produce fluorine radicals and chlorine radicals and etching said raw surface of the semiconductor wafer with said fluorine radicals and said chlorine radicals; and a third gas cleaning step for introducing a hydrogen gas into said reaction chamber and irradiating the hydrogen with the ultraviolet rays to produce hydrogen radicals and etching the raw surface of the semiconductor wafer with said hydrogen radicals.
Claim 21
Dependent Claim
92 words
A method according to claim 19, wherein during said first cleaning step steam is introduced into the reaction chamber and the semiconductor wafer is heated at a temperature of 100° to 300° C. during said second gas cleaning step, a chlorine trifluoride gas is irradiated with radiation rays having at least two different wavelengths including ultraviolet rays having a wavelength of 150 to 350 nm, and between said first and second cleaning steps, a hydrogen gas is introduced into the reaction chamber to terminate the semiconductor wafer surface with the hydrogen gas.
Claim 22
Independent Claim
99 words
A method of cleaning a semiconductor wafer comprising the steps of: introducing a semiconductor wafer having a natural oxide film formed on a surface of the semiconductor wafer into a reaction chamber; introducing a cleaning gas into the reaction chamber; exciting the cleaning gas within the reaction chamber in a multi-step manner by selectively irradiating the cleaning gas with radiations having different wavelengths to produce reactive radicals; removing the natural oxide film on the semiconductor wafer with the reactive radicals to expose a raw surface of the semiconductor wafer; and etching the exposed raw surface of the semiconductor wafer.
Claim 23
Independent Claim
99 words
A method of cleaning a semiconductor wafer comprising the steps of: introducing a semiconductor wafer having a natural oxide film formed on a surface of the semiconductor wafer into a reaction chamber; introducing a cleaning gas into the reaction chamber; exciting the cleaning gas within the reaction chamber in a multi-step manner by selectively irradiating the cleaning gas with radiations having different wavelengths to produce reactive radicals; removing the natural oxide film on the semiconductor wafer with the reactive radicals to expose a raw surface of the semiconductor wafer; and etching the exposed raw surface of the semiconductor wafer.
Claim 24
Dependent Claim
56 words
A method according to claim 21, further comprising the steps of introducing a chlorine gas into the reaction chamber at a pressure of 1×10 -2 Torr and selectively irradiating the chlorine gas with first radiation rays having a wavelength of 150 to 350 nm and second radiation rays having a wavelength of 400 to 600 nm.
Claim 25
Independent Claim
163 words
An apparatus for cleaning a semiconductor wafer having a natural oxide film formed thereon comprising: a wet cleaning chamber for cleaning a semiconductor wafer with a pure water or a cleaning agent liquid; a gas cleaning chamber for cleaning the semiconductor wafer with reactive radicals; communicating means for communicating said wet cleaning chamber and said gas cleaning chamber with each other; shutter means for selectively closing said communicating means; first transporting means for introducing the semiconductor wafer into said wet cleaning chamber; second transporting means for transporting the semiconductor wafer between said wet cleaning chamber and said gas cleaning chamber via said communicating means; means for supplying the cleaning liquid into said wet cleaning chamber; means for introducing a cleaning gas into said gas cleaning chamber; means for exciting the cleaning gas within the gas cleaning chamber to produce reactive radicals and remove the natural oxide film formed on the semiconductor wafer; and means for etching the exposed surface of the semiconductor wafer.
Claim 26
Independent Claim
163 words
An apparatus for cleaning a semiconductor wafer having a natural oxide film formed thereon comprising: a wet cleaning chamber for cleaning a semiconductor wafer with a pure water or a cleaning agent liquid; a gas cleaning chamber for cleaning the semiconductor wafer with reactive radicals; communicating means for communicating said wet cleaning chamber and said gas cleaning chamber with each other; shutter means for selectively closing said communicating means; first transporting means for introducing the semiconductor wafer into said wet cleaning chamber; second transporting means for transporting the semiconductor wafer between said wet cleaning chamber and said gas cleaning chamber via said communicating means; means for supplying the cleaning liquid into said wet cleaning chamber; means for introducing a cleaning gas into said gas cleaning chamber; means for exciting the cleaning gas within the gas cleaning chamber to produce reactive radicals and remove the natural oxide film formed on the semiconductor wafer; and means for etching the exposed surface of the semiconductor wafer.
Claim 27
Dependent Claim
68 words
An apparatus according to claim 23, wherein said means for supplying the cleaning liquid comprises at least one spray nozzle for ejecting the cleaning liquid against the semiconductor wafer, a cleaning liquid tank for containing said cleaning liquid, said cleaning liquid tank being arranged outside the wet cleaning chamber, a pipe for coupling said spray nozzle with said cleaning liquid tank and a pump inserted in said pipe.
Claim 28
Independent Claim
144 words
An apparatus for cleaning a semiconductor wafer with reactive radicals comprising: a gas cleaning chamber for cleaning a semiconductor wafer with reactive radicals; means for introducing the semiconductor wafer into said gas cleaning chamber; means for introducing a cleaning gas into said gas cleaning chamber; and radiation emitting means including at least two light sources, each emitting light rays having different wavelengths; and control means for controlling said radiation emitting means such that said at least two light sources are operated independently from each other, a first one of said light sources used to excite the cleaning gas within the gas cleaning chamber to produce reactive radicals which remove a natural oxide film on said semiconductor wafer and a second one of said light sources used to excite the cleaning gas to produce reactive radicals which etch an exposed surface of said semiconductor wafer.
Claim 29
Independent Claim
144 words
An apparatus for cleaning a semiconductor wafer with reactive radicals comprising: a gas cleaning chamber for cleaning a semiconductor wafer with reactive radicals; means for introducing the semiconductor wafer into said gas cleaning chamber; means for introducing a cleaning gas into said gas cleaning chamber; and radiation emitting means including at least two light sources, each emitting light rays having different wavelengths; and control means for controlling said radiation emitting means such that said at least two light sources are operated independently from each other, a first one of said light sources used to excite the cleaning gas within the gas cleaning chamber to produce reactive radicals which remove a natural oxide film on said semiconductor wafer and a second one of said light sources used to excite the cleaning gas to produce reactive radicals which etch an exposed surface of said semiconductor wafer.
Claim 30
Dependent Claim
53 words
An apparatus according to claim 25, wherein said first light source comprises a xenon lamp which emits light rays having a wavelength of 400 to 600 nm, and said second light source comprises an ultra high pressure mercury vapor discharge lamp which emits ultrasonic rays having a wavelength of 150 to 350 nm.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-07-04 | 1998-01-03 | 1998-07-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-07-04 | 2002-01-03 | 2002-07-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-07-04 | 2006-01-03 | 2006-07-05 | $7700.00 | Window Closed / Lapsed |