US5322757A
Expired / Lapsed
US
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Positive photoresists comprising a novolak resin made from 2,3-dimethyl phenol,2,3,5-trimethylphenol and aldehyde with no meta-cresol present
Assignee: Olin Microelectronic Chemicals Inc
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Filing: 1993-03-24
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Granted: 1994-06-21
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Expires: 2013-03-24
Abstract
Abstract Improved photoresist compositions having high resolution and high thermal resistance, produced from certain novolak polymers and diazoquinone photosensitizers. The useful novolak polymers are formed from phenolic mixtures including 2,3,5-trimethyl phenol and/or 2,3-dimethyl phenol, and optional amounts of 2,6-dimethyl phenol, o-cresol and p-cresol.
Inventors
- 👤 Charles E. Ebersole
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:44
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/022; G03F7/023; G03F7/0233; G03F7/0236
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
85 words
A positive resist composition comprising an admixture of, on a solids basis, about 60% to about 95% by weight of novolak resin and about 5% to about 40% by weight of diazoquinone sensitizer; said novolak resin formed by the reaction of a phenolic mixture with aldehyde and wherein said phenolic mixture contains, based on the total weight of phenolic compounds present therein, from about 2% to about 60% by weight 2,3,5-trimethylphenol and about 2% to about 95% by weight of 2,3-dimethylphenol and contains no meta-cresol.
Claim 2
Dependent Claim
85 words
A positive resist composition comprising an admixture of, on a solids basis, about 60% to about 95% by weight of novolak resin and about 5% to about 40% by weight of diazoquinone sensitizer; said novolak resin formed by the reaction of a phenolic mixture with aldehyde and wherein said phenolic mixture contains, based on the total weight of phenolic compounds present therein, from about 2% to about 60% by weight 2,3,5-trimethylphenol and about 2% to about 95% by weight of 2,3-dimethylphenol and contains no meta-cresol.
Claim 3
Dependent Claim
32 words
The positive resist composition of claim 1 wherein said phenolic mixture contains, based on the total weight of phenolic compounds present therein, from about 20% to about 60% by weight of 2,3,5-trimethylphenol.
Claim 4
Dependent Claim
30 words
The positive resist composition of claim 1 wherein said phenolic mixture further contains, based on the total weight of phenolic compounds present therein, up to 15% by weight of 2,6-dimethylphenol.
Claim 5
Dependent Claim
30 words
The positive resist composition of claim 1 wherein said phenolic mixture further contains, based on the total weight of phenolic compounds present therein, up to 60% by weight of p-cresol.
Claim 6
Dependent Claim
30 words
The resist composition of claim 1 wherein said phenolic mixture further contains, based on the total weight of phenolic compounds contained therein, up to about 60% by weight of o-cresol.
Claim 7
Dependent Claim
20 words
The positive resist composition of claim 1 wherein said novolak resin has a molecular weight between about 1,000 to 6,000.
Claim 8
Dependent Claim
19 words
The positive resist composition of claim 1 wherein said novolak resin has a softening point above about 140° C.
Claim 9
Dependent Claim
23 words
The positive resist composition of claim 1 wherein the molar ratio of aldehyde to phenolic mixture is from about 1:1 to about 1.15:1.
Claim 10
Dependent Claim
12 words
The positive resist composition of claim 1 wherein said diazoquinone comprises 2,1,5-diazonaphtoquinone.
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| 3.5 Years (Year 4) | 1997-06-20 | 1997-12-20 | 1998-06-21 | $2000.00 | Window Closed / Lapsed |
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