US4529682A
Expired / Lapsed
US
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Positive photoresist composition with cresol-formaldehyde novolak resins
Assignee: Olin Microelectronic Chemicals Inc
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Filing: 1982-08-02
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Granted: 1985-07-16
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Expires: 2002-08-02
Abstract
Abstract Cresol-formaldehyde novolak resins made from a mixture containing meta- and paracresol or ortho-, meta- and paracresol in a ratio selected from a given range for use in fast positive photoresist compositions together with one or more sensitizing compounds. When dissolved in a mixture of organic solvents, the photoresist compositions are suitable for application as a thin coating to a substrate. After the coating has been dried, the coated substrate can be exposed to image-wise modulated actinic radiation and developed in alkaline solution, yielding a relief pattern of resist on substrate useful for a number of applications.
Inventors
- 👤 Medhat A. Toukhy
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 04:33
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/022; G03F7/023; G03F7/0233; G03F7/0236; C; C08; C08G; C08G8/00; C08G8/04; C08G8/08; C08G8/24; C08K; C08K5/00; C08K5/36; C08K5/41
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
95 words
A positive photoresist composition comprising and ester condensation product of (a) a naphthoquinone diazide sulfonyl compound, and (b) a cresol-formaldehyde novolak resin produced by condensing a mixture of cresol isomers with formaldehyde in the presence of acid, said mixture of cresols consisting essentially of percentages by weight of ortho-, meta- and paracresol whose values are within the area bounded by quadrilateral ABCD in FIG. 1, said resin having a softening point within the range of 110° to 145° C. wherein from about 4% to about 25% of hydroxy groups of the novolak resin are esterified.
Claim 2
Dependent Claim
95 words
A positive photoresist composition comprising and ester condensation product of (a) a naphthoquinone diazide sulfonyl compound, and (b) a cresol-formaldehyde novolak resin produced by condensing a mixture of cresol isomers with formaldehyde in the presence of acid, said mixture of cresols consisting essentially of percentages by weight of ortho-, meta- and paracresol whose values are within the area bounded by quadrilateral ABCD in FIG. 1, said resin having a softening point within the range of 110° to 145° C. wherein from about 4% to about 25% of hydroxy groups of the novolak resin are esterified.
Claim 3
Dependent Claim
23 words
The photoresist composition of claim 1, wherein the molar ratio of formaldehyde to cresols reacted to produce the novolak does not exceed 0.9:1.
Claim 4
Dependent Claim
21 words
The photoresist composition of claim 1, wherein the mixture of cresols comprises 47 percent metacresol and 53 percent paracresol by weight.
Claim 5
Dependent Claim
24 words
The photoresist composition of claim 1, wherein the mixture of cresols comprises 47 percent metacresol, 40 percent paracresol and 13 percent orthocresol by weight.
Claim 6
Dependent Claim
24 words
The photoresist composition of claim 1, wherein the mixture of cresols comprises 62 percent metacresol, 5 percent paracresol and 33 percent orthocresol by weight.
Claim 7
Dependent Claim
21 words
The photoresist composition of claim 1, wherein the mixture of cresols comprises 95 percent metacresol and 5 percent paracresol by weight.
Claim 8
Dependent Claim
21 words
The photoresist composition of claim 1, wherein the mixture of cresols comprises 50 percent metacresol and 50 percent paracresol by weight.
Claim 9
Dependent Claim
24 words
The photoresist composition of claim 1, wherein the mixture of cresols comprises 70 percent metacresol, 20 percent paracresol and 10 percent orthocresol by weight.
Claim 10
Dependent Claim
24 words
The photoresist composition of claim 1, wherein the mixture of cresols comprises 50 percent metacresol, 37.5 percent paracresol and 12.5 percent orthocresol by weight.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-07-15 | 1989-01-14 | 1989-07-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-07-15 | 1993-01-14 | 1993-07-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-07-15 | 1997-01-14 | 1997-07-16 | $7700.00 | Window Closed / Lapsed |