Patent US5320680A successfully refreshed from Google Patents.
US5320680A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Primary flow CVD apparatus comprising gas preheater and means for substantially eddy-free gas flow
Assignee: ASML US Inc
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Filing: 1991-04-25
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Granted: 1994-06-14
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Expires: 2011-04-25
Abstract
Abstract A chemical vapor deposition apparatus comprising a hot wall reaction tube, one or more reaction gas preheaters, a reaction gas exhaust outlet, and substantially eddy free reaction gas flow control means for passing reaction gases in a substantially laminar flow from a preheater to the exhaust outlet. The gas flow control means includes a tube flange positioned to be in a substantially eddy free relationship with the end of the wafer boat zone, the flange having a curved surface means extending from the end of the wafer boat zone to the outer tube for directing the reaction gas flow out of or into the reaction zone while maintaining the gas in a state of substantially laminar flow. One reaction gas preheater comprises a first heating tube having a removable baffle. A second reaction gas preheater comprises a two wall cylindrical heater with inner surface deformations. The two wall cylindrical heater and the heating tube each can have a plurality of gas injector ports with central axes positioned to cause immediate mixing of gases injected therefrom. An alternate reaction gas preheater comprises the passageway formed by concentric vacuum and reaction chamber tubes.
Inventors
- 👤 Arthur J. Learn
- 👤 Dale R. Du Bois
- 👤 Nicholas E. Miller
- 👤 Richard A. Seilheimer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 11:39
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45502; C23C16/45504; C23C16/448; C23C16/452; C23C16/45514
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
219 words
A chemical vapor deposition apparatus comprising a hot wall reaction tube means, a reaction gas preheater means, a reaction gas exhaust outlet, and substantially eddy-free reaction gas flow control means for passing reaction gases in a substantially laminar flow from the preheater means to the exhaust outlet, the hot wall reaction tube means enclosing a wafer boat zone for receiving a wafer boat preloaded with a stack of parallel substrates to be coated, with the wafer surfaces being substantially perpendicular to the central axis of the reaction tube, the wafer boat zone having an upstream end and a downstream end, wherein the hot wall reaction tube means is enclosed in an outer tube defining a vacuum chamber, the reaction tube and the outer tube having a space therebetween with an inlet opening communicating with the downstream end of the wafer boat zone and comprising the exhaust outlet, and wherein the gas flow control means includes a downstream tube flange positioned to be in a substantially eddy free relationship with the downstream end of the wafer boat zone, the flange having a curved surface means extending from the downstream end of the wafer boat zone to the outer tube for directing the reaction gas flow into the exhaust outlet while maintaining the gas in a state of substantially laminar flow.
Claim 2
Dependent Claim
219 words
A chemical vapor deposition apparatus comprising a hot wall reaction tube means, a reaction gas preheater means, a reaction gas exhaust outlet, and substantially eddy-free reaction gas flow control means for passing reaction gases in a substantially laminar flow from the preheater means to the exhaust outlet, the hot wall reaction tube means enclosing a wafer boat zone for receiving a wafer boat preloaded with a stack of parallel substrates to be coated, with the wafer surfaces being substantially perpendicular to the central axis of the reaction tube, the wafer boat zone having an upstream end and a downstream end, wherein the hot wall reaction tube means is enclosed in an outer tube defining a vacuum chamber, the reaction tube and the outer tube having a space therebetween with an inlet opening communicating with the downstream end of the wafer boat zone and comprising the exhaust outlet, and wherein the gas flow control means includes a downstream tube flange positioned to be in a substantially eddy free relationship with the downstream end of the wafer boat zone, the flange having a curved surface means extending from the downstream end of the wafer boat zone to the outer tube for directing the reaction gas flow into the exhaust outlet while maintaining the gas in a state of substantially laminar flow.
Claim 3
Dependent Claim
239 words
A chemical vapor deposition apparatus comprising a hot wall reaction tube means, a reaction gas preheater means, a reaction gas exhaust outlet, and substantially eddy-free reaction gas flow control means for passing reaction gases in a substantially laminar flow from the preheater means to the exhaust outlet, the hot wall reaction tube means enclosing a wafer boat zone for receiving a wafer boat preloaded with a stack of parallel substrates to be coated, with the wafer surfaces being substantially perpendicular to the central axis of the reaction tube, the wafer boat zone having an upstream end and a downstream end, wherein the hot wall reaction tube means is enclosed in an outer tube defining a vacuum chamber, the reaction tube and the outer tube having a space therebetween comprising an inlet gas passageway and with an inlet opening communicating with the upstream end of the wafer boat zone and comprising the reaction gas inlet, the inlet gas passageway comprising a reaction gas preheater means, and wherein the gas flow control means includes a upstream tube flange positioned to be in a substantially eddy free relationship with the upstream end of the wafer boat zone, the flange having a curved surface means extending from the upstream end of the wafer boat zone to the outer tube for directing the reaction gas flow from an the inlet gas supply passageway while maintaining the gas in a state of substantially laminar flow.
Claim 4
Dependent Claim
239 words
A chemical vapor deposition apparatus comprising a hot wall reaction tube means, a reaction gas preheater means, a reaction gas exhaust outlet, and substantially eddy-free reaction gas flow control means for passing reaction gases in a substantially laminar flow from the preheater means to the exhaust outlet, the hot wall reaction tube means enclosing a wafer boat zone for receiving a wafer boat preloaded with a stack of parallel substrates to be coated, with the wafer surfaces being substantially perpendicular to the central axis of the reaction tube, the wafer boat zone having an upstream end and a downstream end, wherein the hot wall reaction tube means is enclosed in an outer tube defining a vacuum chamber, the reaction tube and the outer tube having a space therebetween comprising an inlet gas passageway and with an inlet opening communicating with the upstream end of the wafer boat zone and comprising the reaction gas inlet, the inlet gas passageway comprising a reaction gas preheater means, and wherein the gas flow control means includes a upstream tube flange positioned to be in a substantially eddy free relationship with the upstream end of the wafer boat zone, the flange having a curved surface means extending from the upstream end of the wafer boat zone to the outer tube for directing the reaction gas flow from an the inlet gas supply passageway while maintaining the gas in a state of substantially laminar flow.
Claim 5
Dependent Claim
185 words
A chemical vapor deposition apparatus comprising a hot wall reaction tube means, a reaction gas preheater means, a reaction gas exhaust outlet, and substantially eddy-free reaction gas flow control means for passing reaction gases in a substantially laminar flow from the preheater means to the exhaust outlet, the hot wall reaction tube means enclosing a wafer boat zone for receiving a wafer boat preloaded with a stack of parallel substrates to be coated, with the wafer surfaces being substantially perpendicular to the central axis of the reaction tube, the wafer boat zone having an upstream end and a downstream end, the reaction gas preheater means comprising a removable two wall cylindrical heater with inner surface deformations providing a surface area selected to transfer a predetermined amount of heat to reaction gas passing over the internal surface deformations and a heating tube having a removable baffle with a surface area selected to transfer a predetermined amount of heat to reaction gas passing over the surface of the baffle, wherein the two wall cylindrical heater and the heating tube each have a plurality of gas injector ports.
Claim 6
Dependent Claim
185 words
A chemical vapor deposition apparatus comprising a hot wall reaction tube means, a reaction gas preheater means, a reaction gas exhaust outlet, and substantially eddy-free reaction gas flow control means for passing reaction gases in a substantially laminar flow from the preheater means to the exhaust outlet, the hot wall reaction tube means enclosing a wafer boat zone for receiving a wafer boat preloaded with a stack of parallel substrates to be coated, with the wafer surfaces being substantially perpendicular to the central axis of the reaction tube, the wafer boat zone having an upstream end and a downstream end, the reaction gas preheater means comprising a removable two wall cylindrical heater with inner surface deformations providing a surface area selected to transfer a predetermined amount of heat to reaction gas passing over the internal surface deformations and a heating tube having a removable baffle with a surface area selected to transfer a predetermined amount of heat to reaction gas passing over the surface of the baffle, wherein the two wall cylindrical heater and the heating tube each have a plurality of gas injector ports.
Claim 7
Dependent Claim
37 words
A chemical vapor deposition apparatus of claim 3 wherein the outlet ports of the cylindrical heater and the outlet ports of the heating tube each have central axes positioned to cause immediate mixing of gases injected therefrom.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-06-13 | 1997-12-13 | 1998-06-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-06-13 | 2001-12-13 | 2002-06-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-06-13 | 2005-12-13 | 2006-06-14 | $7700.00 | Window Closed / Lapsed |