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US5314573A
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US
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Dry etching polysilicon using a bromine-containing gas
Assignee: Tokyo Electron Ltd
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Filing: 1992-05-20
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Granted: 1994-05-24
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Expires: 2012-05-20
Abstract
Abstract The present invention provides a dry etching method for achieving a satisfactory anisotropic etching of, for example, a semiconductor wafer, particularly, a polysilicon layer formed on the wafer. In the present invention, a mixed gas comprising a first gas containing Br and a second gas containing a halogen element other than Br, e.g., a mixed gas consisting of a HBr gas and a HCl gas, is introduced into a vacuum chamber. The mixed gas is converted into plasma by applying a high frequency power to an upper electrode 5. The plasma region is irradiated, as desired, with an ultraviolet light. The semiconductor wafer is etched with the plasma. The etching is carried out under optimum conditions. For example, the surface temperature of the semiconductor wafer, i.e., workpiece, is maintained at a level falling within a range of between 70° C. and 120° C. Also, the flow rate ratio of the mixed gas is suitably controlled.
Inventors
- 👤 Fumihiko Higuchi
- 👤 Yoshio Fukasawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 05:00
CPC Classifications
C; C23; C23F; C23F1/00; C23F1/10; C23F1/12; H; H10; H10P; H10P50/00; H10P50/20; H10P50/26; H10P50/264; H10P50/266; H10P50/267; H10P50/268
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
116 words
A dry etching method, comprising the steps of: disposing a workpiece having an exposed polysilicon layer on the upper surface of a lower electrode disposed to face an upper electrode within an etching apparatus; and supplying a mixed gas comprising a first gas containing bromine and a second gas containing a halogen element other than bromine in a plasma discharge region over the workpiece, RF power being applied to the upper electrode so as to form a plasma of the mixed gas in said discharge region and to permit the exposed polysilicon layer of the workpiece to be etched with the plasma, said plasma discharge region being irradiated with ultraviolet light when said workpiece is etched.
Claim 2
Dependent Claim
116 words
A dry etching method, comprising the steps of: disposing a workpiece having an exposed polysilicon layer on the upper surface of a lower electrode disposed to face an upper electrode within an etching apparatus; and supplying a mixed gas comprising a first gas containing bromine and a second gas containing a halogen element other than bromine in a plasma discharge region over the workpiece, RF power being applied to the upper electrode so as to form a plasma of the mixed gas in said discharge region and to permit the exposed polysilicon layer of the workpiece to be etched with the plasma, said plasma discharge region being irradiated with ultraviolet light when said workpiece is etched.
Claim 3
Dependent Claim
25 words
The dry etching method according to claim 1, wherein the surface temperature of the workpiece is between 70° C. and 120° during the etching treatment.
Claim 4
Dependent Claim
40 words
The dry etching method according to claim 1, wherein the workpiece is fixed to the upper surface of the lower electrode by a mechanical clamping means, and the temperature of the lower electrode is between 60° C. and 100° C.
Claim 5
Dependent Claim
49 words
The dry etching method according to claim 1, wherein the workpiece is fixed to the upper surface of the lower electrode by an electrostatic chuck means, and the temperature of the lower electrode is maintained at a level falling within a range of between 60° C. and 100° C.
Claim 6
Dependent Claim
65 words
The dry etching method according to claim 1, wherein the workpiece is in the form of a disk, the lower electrode is in the form of a disk having a diameter 1 to 1.47 times as large as that of the workpiece, and the clearance between the upper electrode and the lower electrode is maintained at 6 mm to 8 mm during the etching treatment.
Claim 7
Dependent Claim
65 words
The dry etching method according to claim 1, wherein the workpiece is in the form of a disk having a diameter of 150 mm, the lower electrode is in the form of a disk having a diameter of 150 to 220 mm, and the clearance between the upper electrode and the lower electrode is maintained at 6 mm to 8 mm during the etching treatment.
Claim 8
Dependent Claim
31 words
The dry etching method according to claim 1, wherein the first gas consists of a HBr gas and the second gas consists of a HCl gas or a Cl 2 gas.
Claim 9
Dependent Claim
27 words
The dry etching method according to claim 7, wherein the flow rate ratio (HBr)/(HBr+(Hcl or Cl 2 )) falls within a range of between 5 and 50%.
Claim 10
Dependent Claim
41 words
The dry etching method according to claim 1, wherein a high frequency power per unit area of the workpiece of 0.85 to 1.41 W/cm 2 at a frequency of 13.56 MHz is applied between the upper electrode and the lower electrode.
Claim 11
Dependent Claim
44 words
The dry etching method according to claim 2, wherein a cooling gas is circulated through a clearance between the workpiece and the lower electrode for keeping the surface temperature of the workpiece to fall within a range of between 70° C. and 120° C.
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