US5310603A
Expired / Lapsed
US
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Multi-layer reflection mirror for soft X-ray to vacuum ultraviolet ray
Assignee: Canon Inc
•
Filing: 1993-06-14
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Granted: 1994-05-10
•
Expires: 2013-06-14
Abstract
Abstract A multi-layer reflection mirror for soft X-ray to vacuum ultraviolet ray, comprises a substrate, a plurality of first layers, and a plurality of second layers formed on the substrate alternately with the first layers. The first layer primarily consists of at least one of single elements, such as ruthenium or of a boride, carbide, silicide, nitride oxide of a transition metal. The second layer primarily consists of at least one of compounds of carbon, silicon (e.g. carbide, nitride and oxide of silicon), boron (e.g. carbide, nitride and oxide of boron), beryllium (e.g. carbide, nitride and oxide of beryllium) and aluminum (e.g. carbide, nitride and oxide of aluminum).
Inventors
- 👤 Yasuaki Fukuda
- 👤 Yutaka Watanabe
- 👤 Shigetaro Ogura
- 👤 Takashi Iizuka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 23:52
CPC Classifications
G; G21; G21K; G21K1/00; G21K1/06; G21K1/062; B; B32; B32B; B32B15/00; B32B15/04; B32B15/08; B82; B82Y; B82Y10/00; G02; G02B; G02B5/00; G02B5/08; G02B5/0891; G02B5/20; G02B5/26; G21K2201/00; G21K2201/06; G21K2201/061; Y; Y10; Y10S; Y10S428/00; Y10S428/913
Claims Analysis
Total Claims: 62
Claim 1
Independent Claim
85 words
A reflection mirror, for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise hafnium boride and said second layers comprise beryllium.
Claim 2
Dependent Claim
85 words
A reflection mirror, for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise hafnium boride and said second layers comprise beryllium.
Claim 3
Dependent Claim
85 words
A reflection mirror, for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise tantalum nitride and said second layers comprise silicon.
Claim 4
Dependent Claim
85 words
A reflection mirror, for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise tantalum nitride and said second layers comprise silicon.
Claim 5
Dependent Claim
85 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise hafnium boride and said second layers comprise silicon.
Claim 6
Dependent Claim
85 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise hafnium boride and said second layers comprise silicon.
Claim 7
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise hafnium boride and said second layers comprise silicon carbide.
Claim 8
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise hafnium boride and said second layers comprise silicon carbide.
Claim 9
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise hafnium boride and said second layers comprise silicon nitride.
Claim 10
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise hafnium boride and said second layers comprise silicon nitride.
Claim 11
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise hafnium boride and said second layers comprise boron carbide.
Claim 12
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise hafnium boride and said second layers comprise boron carbide.
Claim 13
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said first layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise hafnium boride and said second layers comprise silicon oxide.
Claim 14
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said first layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise hafnium boride and said second layers comprise silicon oxide.
Claim 15
Dependent Claim
85 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise tantalum nitride and said second layers comprise beryllium.
Claim 16
Dependent Claim
85 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise tantalum nitride and said second layers comprise beryllium.
Claim 17
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise tantalum nitride and said second layers comprise silicon carbide.
Claim 18
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise tantalum nitride and said second layers comprise silicon carbide.
Claim 19
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise tantalum nitride and said second layers comprise boron carbide.
Claim 20
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise tantalum nitride and said second layers comprise boron carbide.
Claim 21
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise tantalum nitride and said second layers comprise silicon nitride.
Claim 22
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise tantalum nitride and said second layers comprise silicon nitride.
Claim 23
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise tantalum nitride and said second layers comprise silicon oxide.
Claim 24
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise tantalum nitride and said second layers comprise silicon oxide.
Claim 25
Dependent Claim
84 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise ruthenium and said second layers comprise silicon.
Claim 26
Dependent Claim
84 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise ruthenium and said second layers comprise silicon.
Claim 27
Dependent Claim
84 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise ruthenium and said second layers comprise beryllium.
Claim 28
Dependent Claim
84 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise ruthenium and said second layers comprise beryllium.
Claim 29
Dependent Claim
85 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise ruthenium and said second layers comprise silicon carbide.
Claim 30
Dependent Claim
85 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise ruthenium and said second layers comprise silicon carbide.
Claim 31
Dependent Claim
85 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise ruthenium and said second layers comprise boron carbide.
Claim 32
Dependent Claim
85 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise ruthenium and said second layers comprise boron carbide.
Claim 33
Dependent Claim
85 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise ruthenium and said second layers comprise silicon nitride.
Claim 34
Dependent Claim
85 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise ruthenium and said second layers comprise silicon nitride.
Claim 35
Dependent Claim
85 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise ruthenium and said second layers comprise silicon oxide.
Claim 36
Dependent Claim
85 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise ruthenium and said second layers comprise silicon oxide.
Claim 37
Dependent Claim
84 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise tungsten and said second layers comprise silicon.
Claim 38
Dependent Claim
84 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise tungsten and said second layers comprise silicon.
Claim 39
Dependent Claim
84 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise tungsten and said second layers comprise silicon.
Claim 40
Dependent Claim
84 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise tungsten and said second layers comprise silicon.
Claim 41
Dependent Claim
84 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise tungsten and said second layers comprise beryllium.
Claim 42
Dependent Claim
84 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise tungsten and said second layers comprise beryllium.
Claim 43
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise tungsten carbide and said second layers comprise silicon carbide.
Claim 44
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise tungsten carbide and said second layers comprise silicon carbide.
Claim 45
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise tungsten carbide and said second layers comprise boron carbide.
Claim 46
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise tungsten carbide and said second layers comprise boron carbide.
Claim 47
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise tungsten carbide and said second layers comprise silicon nitride.
Claim 48
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise tungsten carbide and said second layers comprise silicon nitride.
Claim 49
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise tungsten carbide and said second layers comprise silicon oxide.
Claim 50
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise tungsten carbide and said second layers comprise silicon oxide.
Claim 51
Dependent Claim
85 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise hafnium nitride and said second layers comprise silicon.
Claim 52
Dependent Claim
85 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise hafnium nitride and said second layers comprise silicon.
Claim 53
Dependent Claim
85 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise hafnium nitride and said second layers comprise beryllium.
Claim 54
Dependent Claim
85 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise hafnium nitride and said second layers comprise beryllium.
Claim 55
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise hafnium nitride and said second layers comprise silicon carbide.
Claim 56
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise hafnium nitride and said second layers comprise silicon carbide.
Claim 57
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise hafnium nitride and said second layers comprise boron carbide.
Claim 58
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise hafnium nitride and said second layers comprise boron carbide.
Claim 59
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise hafnium nitride and said second layers comprise silicon nitride.
Claim 60
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise hafnium nitride and said second layers comprise silicon nitride.
Claim 61
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise hafnium nitride and said second layers comprise silicon oxide.
Claim 62
Dependent Claim
86 words
A reflection mirror for soft X-ray to vacuum ultraviolet ray, comprising: a substrate, wherein said substrate has a planar surface polished to have a surface roughness of 10 Å (rms) or less; and a multi-layer film formed on said substrate, said multi-layer film having a plurality of first layers and a plurality of second layers, each of said second layers being alternately layered to each of said first layers on said substrate, wherein said first layers comprise hafnium nitride and said second layers comprise silicon oxide.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-05-09 | 1997-11-08 | 1998-05-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-05-09 | 2001-11-08 | 2002-05-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-05-09 | 2005-11-08 | 2006-05-10 | $7700.00 | Window Closed / Lapsed |