US4727000A
Expired / Lapsed
US
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X-ray dispersive and reflective structures
Assignee: Ovonic Synthetic Materials Co Inc
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Filing: 1986-06-18
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Granted: 1988-02-23
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Expires: 2006-06-18
Abstract
Abstract X-ray dispersive and reflective structures and materials are provided which exhibit at least one third of the theoretical integral reflection coefficient for the structures in the range of interest without fluorescence or absorption edges. The materials can be thermally activated to control the desired properties, during or post deposition. The structures can be deposited by ion beam absorption techniques to form the structures in a precise manner. The index of the refraction of the structures can be continuously varying throughout the structures.
Inventors
- 👤 Stanford R. Ovshinsky
- 👤 John Keem
- 👤 Steven A. Flessa
- 👤 James L. Wood
- 👤 Keith L. Hart
- 👤 Lennard Sztaba
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 00:37
CPC Classifications
G; G21; G21K; G21K1/00; G21K1/06; G21K1/062; B; B82; B82Y; B82Y10/00; G21K2201/00; G21K2201/06; G21K2201/061; G21K2201/062; G21K2201/067; Y; Y10; Y10T; Y10T428/00; Y10T428/12; Y10T428/12493; Y10T428/12632; Y10T428/12674; Y10T428/12729; Y10T428/12771; Y10T428/12806; Y10T428/12826; Y10T428/1284; Y10T428/12847; Y10T428/12861; Y10T428/12875; Y10T428/12903; Y10T428/12944; Y10T428/12951; Y10T428/31504; Y10T428/31678
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
151 words
An X-ray dispersive structure having high reflectivity within a wavelength range of interest within a range of 8.34 Angstroms to 120 Angstroms, said structure comprising a plurality of sputter deposited substantially amorphous layer pairs formed on one another on a substrate, each layer pair consisting of a different material, the said two said different materials being characterized by chemically stable interfaces with the materials of the layer pair having: (1) a Pauling electronegativity difference therebetween less than 1.0 volts; (2) a covalent radius difference therebetween less than 1.00 Angstroms; and (3) a bond length difference therebetween less than 1.60 Angstroms; said layers having an interface roughness of less than 1.40 Angstroms therebetween; the adsorption edges and fluorescence of the materials of the structure being outside the wavelength range of interest and the individual layers and layer pairs having a constant d spacing as a function of thickness through the dispersive structure.
Claim 2
Dependent Claim
151 words
An X-ray dispersive structure having high reflectivity within a wavelength range of interest within a range of 8.34 Angstroms to 120 Angstroms, said structure comprising a plurality of sputter deposited substantially amorphous layer pairs formed on one another on a substrate, each layer pair consisting of a different material, the said two said different materials being characterized by chemically stable interfaces with the materials of the layer pair having: (1) a Pauling electronegativity difference therebetween less than 1.0 volts; (2) a covalent radius difference therebetween less than 1.00 Angstroms; and (3) a bond length difference therebetween less than 1.60 Angstroms; said layers having an interface roughness of less than 1.40 Angstroms therebetween; the adsorption edges and fluorescence of the materials of the structure being outside the wavelength range of interest and the individual layers and layer pairs having a constant d spacing as a function of thickness through the dispersive structure.
Claim 3
Dependent Claim
60 words
The X-ray dispersive structure of claim 1 wherein the wavelength range of interest is from 8.34 Angstroms to 18.3 Angstroms for the detection of one of aluminum, magnesium, sodium, and fluorine, and the layer pair is chosen from the group consisting of Ta:Mg, Ta:Ti; W:Si; W:Mg, W:Ti; W:V; Re:Si; Re:Mg; Re:Ti; Re:V; Nb:Si; Nb:Mg; Nb:Ti; Mo:Si; Mo:Mg; Mo:Ti; and Mo:Mg.
Claim 4
Dependent Claim
77 words
The X-ray dispersive structure of claim 1 wherein the wavelength range of interest is from 11.91 Angstroms to 31.6 Angstroms for the detection of one of sodium, fluorine, oxygen, and nitrogen, and the layer pair is chosen from the group consisting of (a) a metal chosen from the group consisting of Hf, Ta, W, Re, Pt, and Nb; and (b) a light component chosen from the group consisting of Si, Mg, C, B, and B 4 C.
Claim 5
Dependent Claim
74 words
The X-ray dispersive structure of claim 1 wherein the wavelength range of interest is from 18.3 Angstroms to 44.7 Angstroms for the detection of one of fluorine, oxygen, nitrogen, and carbon, and the layer pair is chosen from the group consisting of (a) a metal chosen from the group consisting of Hf, Ta, W, Re, Pt, Nb, and Mo; and (b) a light component chosen from the group consisting of Si, Mg, and B.
Claim 6
Dependent Claim
75 words
The X-ray dispersive structure of claim 1 wherein the wavelength range of interest is from 23.6 Angstroms to 67.6 Angstroms for the detection of one of oxygen, nitrogen, carbon, and boron, and the layer pair is chosen from the group consisting of (a) a metal chosen from the group consisting of Hf, Ta, W, Re, Pt, Cr, Cu, Ni, and Mn; and (b) a light component chosen from the group consisting of Si and Mg.
Claim 7
Dependent Claim
48 words
The X-ray dispersive structure of claim 1 wherein the wavelength range of interest is from 44.7 Angstroms to 118 Angstroms for the detection of one of carbon, boron, and berylium, and the layer pair is chosen from the group consisting of Co:Si; Cu:V; Ni:Si; Mn:V; Ti:V; and Fe:Si.
Claim 8
Dependent Claim
55 words
The X-ray dispersive structure of claim 1 wherein the wavelength range of interest is from 67.6 Angstroms to 118 Angstroms for the detection of one of boron and berylium, and the layer pair is chosen from Hf:Mg; Hf:Ti; Ta:Ti; Ta:V; W:B; W:V; Re:B; Pt:B; Pt:V; Nb:B; Nb:Ti; Nb:V; Mo:Si; Mo:Mg; Mo:Ti; Mo:V; Ti:V; and V:Mg.
Claim 9
Dependent Claim
20 words
The structure of claim 1 wherein: said layers are formed of two different materials, one material including at least silicon.
Claim 10
Dependent Claim
13 words
The structure of claim 8 wherein: said second material includes at least hafnium.
Claim 11
Dependent Claim
33 words
The structure as defined in claim 1 wherein: each of said layer pairs is formed of two different materials, one material forming each layer, one material being hafnium and one material being silicon.
Claim 12
Dependent Claim
37 words
The structure as defined in claim 1 wherein: each of said layer pairs is formed of two different materials, one material forming each layer, one material including at least rhenium and one material including at least silicon.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-02-22 | 1991-08-24 | 1992-02-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-02-22 | 1995-08-24 | 1996-02-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-02-22 | 1999-08-24 | 2000-02-23 | $7700.00 | Window Closed / Lapsed |