US4693933A
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US
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X-ray dispersive and reflective structures and method of making the structures
Assignee: ENGERY CONCERSION DEVICES Inc A DE CORP
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Filing: 1983-10-31
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Granted: 1987-09-15
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Expires: 2003-10-31
Abstract
Abstract X-ray dispersive and reflective structures and materials are provided which exhibit improved resolution and reflectivity in specific ranges of interest without substantial fluorescence or absorption edges. The structures are formed of metallic and non-metallic layer pairs and can include a buffer layer between each layer to prevent interdiffusion to stabilize the structures. The materials can be thermally activated to control the desired properties, during or post deposition. The structures can be deposited by ion beam absorption techniques to form the structures in a precise manner. The index of the refraction of the structures can be continuously varying throughout the structures.
Inventors
- 👤 John E. Keem
- 👤 Stanford R. Ovshinsky
- 👤 Steven A. Flessa
- 👤 James L. Wood
- 👤 Keith L. Hart
- 👤 Lennard Sztaba
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 21:07
CPC Classifications
G; G21; G21K; G21K1/00; G21K1/06; B; B82; B82Y; B82Y10/00; G21K1/062; G21K2201/00; G21K2201/06; G21K2201/061; G21K2201/062; G21K2201/067; Y; Y10; Y10T; Y10T428/00; Y10T428/26; Y10T428/261
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
125 words
An improved X-ray dispersive structure comprising: a plurality of layer pairs formed on one another, said layer pairs having X-ray dispersive properties over a predetermined range of interest, one layer of each of said layer pairs is a non-metallic material chosen from the group consisting of Si, C, B, and B 4 C and the second layer of each of said layer pairs is a metallic material, and a buffer layer formed of a material different from the materials forming the first and second layers, chosen from the group consisting of Si, Ge, and SiGe, and having a thickness of 1.3 Angstroms to 5 Angstroms between each metallic and non-metallic layer to provide control of interdiffusion or chemical interaction between said metallic and non-metallic layers.
Claim 2
Dependent Claim
125 words
An improved X-ray dispersive structure comprising: a plurality of layer pairs formed on one another, said layer pairs having X-ray dispersive properties over a predetermined range of interest, one layer of each of said layer pairs is a non-metallic material chosen from the group consisting of Si, C, B, and B 4 C and the second layer of each of said layer pairs is a metallic material, and a buffer layer formed of a material different from the materials forming the first and second layers, chosen from the group consisting of Si, Ge, and SiGe, and having a thickness of 1.3 Angstroms to 5 Angstroms between each metallic and non-metallic layer to provide control of interdiffusion or chemical interaction between said metallic and non-metallic layers.
Claim 3
Dependent Claim
15 words
The structure as defined in claim 1 wherein: said buffer layer is formed from Si.
Claim 4
Independent Claim
129 words
A method of making an improved X-ray dispersive structure comprising: forming a plurality of layer pairs on one another to have X-ray dispersive properties over a predetermined range of interest, forming one layer of each of said layer pairs of a non-metallic material chosen from the group consisting of Si, C, B and B 4 C, forming the second layer of each of said layer pairs from a metallic material, and forming a buffer layer formed of a material different from the materials, forming the first and second layers, chosen from the group consisting of Si, Ge, and SiGe, and having a thickness of 1.3 Angstroms to 5 Angstroms between each metallic and non-metallic layer to provide control of interdiffusion or chemical interaction between said metallic and non-metallic layers.
Claim 5
Independent Claim
129 words
A method of making an improved X-ray dispersive structure comprising: forming a plurality of layer pairs on one another to have X-ray dispersive properties over a predetermined range of interest, forming one layer of each of said layer pairs of a non-metallic material chosen from the group consisting of Si, C, B and B 4 C, forming the second layer of each of said layer pairs from a metallic material, and forming a buffer layer formed of a material different from the materials, forming the first and second layers, chosen from the group consisting of Si, Ge, and SiGe, and having a thickness of 1.3 Angstroms to 5 Angstroms between each metallic and non-metallic layer to provide control of interdiffusion or chemical interaction between said metallic and non-metallic layers.
Claim 6
Dependent Claim
14 words
The method as defined in claim 3 including: forming said buffer layer from Si.
Claim 7
Dependent Claim
65 words
An improved X-ray dispersive structure comprising: a plurality of layer pairs formed on one another, said layer pairs having X-ray dispersive properties over a predetermined range of interest, one layer of each of said layer pairs consisting essentially of boron and the second layer of each of said layer pairs is formed from a metallic material and said metallic material layer contains at least Hf.
Claim 8
Dependent Claim
65 words
An improved X-ray dispersive structure comprising: a plurality of layer pairs formed on one another, said layer pairs having X-ray dispersive properties over a predetermined range of interest, one layer of each of said layer pairs consisting essentially of boron and the second layer of each of said layer pairs is formed from a metallic material and said metallic material layer contains at least Hf.
Claim 9
Dependent Claim
17 words
The structure as defined in claim 5 wherein: said layer consisting essentially of boron further includes carbon.
Claim 10
Independent Claim
68 words
A method of making an improved X-ray dispersive structure comprising: forming a plurality of layer pairs on one another to have X-ray dispersive properties over a predetermined range of interest, including forming one layer of each of said layer pairs from essentially boron and forming the second layer of each of said layer pairs from a metallic material and forming said metallic material layer from at least Hf.
Claim 11
Independent Claim
68 words
A method of making an improved X-ray dispersive structure comprising: forming a plurality of layer pairs on one another to have X-ray dispersive properties over a predetermined range of interest, including forming one layer of each of said layer pairs from essentially boron and forming the second layer of each of said layer pairs from a metallic material and forming said metallic material layer from at least Hf.
Claim 12
Dependent Claim
19 words
The method as defined in claim 7 including: forming said layer consisting essentially of boron and including carbon therein.
Claim 13
Independent Claim
66 words
A method of making an improved X-ray dispersive structure comprising: forming a plurality of layer pairs on one another to have X-ray dispersive properties over a predetermined range of interest, including boron in one layer of each of said layer pairs and forming the second layer of each of said layer pairs from a metallic material, including forming said boron including layer from B 4 C.
Claim 14
Independent Claim
66 words
A method of making an improved X-ray dispersive structure comprising: forming a plurality of layer pairs on one another to have X-ray dispersive properties over a predetermined range of interest, including boron in one layer of each of said layer pairs and forming the second layer of each of said layer pairs from a metallic material, including forming said boron including layer from B 4 C.
Claim 15
Dependent Claim
19 words
The method as defined in claim 9 including: said predetermined range of interest including wavelengths of 9.75Å to 44.7Å.
Claim 16
Dependent Claim
62 words
An improved X-ray dispersive structure comprising: a plurality of layer pairs formed on one another, said layer pairs having X-ray dispersive properties over a predetermined range of interest, one layer of each of said layer pairs includes boron and the second layer of each of said layer pairs is formed from a metallic material, said boron including layer is B 4 C.
Claim 17
Dependent Claim
62 words
An improved X-ray dispersive structure comprising: a plurality of layer pairs formed on one another, said layer pairs having X-ray dispersive properties over a predetermined range of interest, one layer of each of said layer pairs includes boron and the second layer of each of said layer pairs is formed from a metallic material, said boron including layer is B 4 C.
Claim 18
Dependent Claim
19 words
The structure as defined in claim 11 wherein: said predetermined range of interest includes wavelengths of 9.75Å to 44.7Å.
Claim 19
Dependent Claim
98 words
An improved X-ray dispersive structure comprising: a plurality of layer pairs formed on one another, said layer pairs having X-ray dispersive properties over a predetermined range of interest, one layer of each of said layer pairs includes carbon and the second layer of each of said layer pairs is formed from a metallic material, said metallic material containing at least Hf and a buffer layer formed of a material selected from the group consisting of Si, Ge and SiGe and having a thickness of 1.3 Angstroms to 5 Angstroms between each said one layer and said second layer.
Claim 20
Dependent Claim
98 words
An improved X-ray dispersive structure comprising: a plurality of layer pairs formed on one another, said layer pairs having X-ray dispersive properties over a predetermined range of interest, one layer of each of said layer pairs includes carbon and the second layer of each of said layer pairs is formed from a metallic material, said metallic material containing at least Hf and a buffer layer formed of a material selected from the group consisting of Si, Ge and SiGe and having a thickness of 1.3 Angstroms to 5 Angstroms between each said one layer and said second layer.
Claim 21
Dependent Claim
13 words
The structure as defined in claim 13 wherein: said metallic material is Hf:W.
Claim 22
Dependent Claim
26 words
The structure as defined in claim 13 wherein: said metallic material layer includes at least one of the group consisting of Ta, Pt, Ir and Au.
Claim 23
Dependent Claim
19 words
The structure as defined in claim 13 wherein: said predetermined range of interest includes wavelengths of 9.75Å to 19Å.
Claim 24
Independent Claim
100 words
A method of making an improved X-ray dispersive structure comprising: forming a plurality of layer pairs on one another to have X-ray dispersive properties over a predetermined range of interest, including carbon 1n one layer of each of said layer pairs and forming the second layer of each of said layer pairs from a metallic material, said metallic material containing at least Hf and forming a buffer layer of a material selected from the group consisting of Si, Ge and SiGe and having a thickness of 1.3 Angstroms to 5 Angstroms between each said one layer and said second layer.
Claim 25
Independent Claim
100 words
A method of making an improved X-ray dispersive structure comprising: forming a plurality of layer pairs on one another to have X-ray dispersive properties over a predetermined range of interest, including carbon 1n one layer of each of said layer pairs and forming the second layer of each of said layer pairs from a metallic material, said metallic material containing at least Hf and forming a buffer layer of a material selected from the group consisting of Si, Ge and SiGe and having a thickness of 1.3 Angstroms to 5 Angstroms between each said one layer and said second layer.
Claim 26
Dependent Claim
15 words
The method as defined in claim 17 including: forming said metallic material layer of Hf:W.
Claim 27
Dependent Claim
27 words
The method as defined in claim 17 including: forming said metallic material layer from at least one of the group consisting of Ta, Pt, Ir and Au.
Claim 28
Dependent Claim
19 words
The method as defined in claim 17 including: said predetermined range of interest includes wavelengths of 9.75Å to 19Å.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1990-09-14 | 1991-03-16 | 1991-09-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-09-14 | 1995-03-16 | 1995-09-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-09-14 | 1999-03-16 | 1999-09-15 | $7700.00 | Window Closed / Lapsed |