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Patent US5306647A successfully refreshed from Google Patents.
US5306647A
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Method for manufacturing a solar cell from a substrate wafer
Assignee: Siemens AG
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Filing: 1992-12-30
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Granted: 1994-04-26
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Expires: 2012-12-30
Abstract
Abstract A self-supporting layer of n-doped monocrystalline silicon is stripped from a substrate wafer of n-doped, monocrystalline silicon by electrochemical etching for manufacturing a solar cell. Holes are formed in the substrate wafer by electrochemical etching, particularly in a fluoride-containing, acidic electrolyte wherein the substrate wafer is connected as an anode. When a depth of the holes that essentially corresponds to the thickness of the self-supporting layer is reached, the process parameters of the etching are modified such that the self-supporting layer is stripped as a consequence of the holes growing together. The solar cell is manufactured from the self-supporting layer, and the method can be applied repeatedly on the same substrate wafer for stripping a plurality of self-supporting layers.
Inventors
- 👤 Volker Lehmann
- 👤 Reinhard Stengl
- 👤 Hermann Wendt
- 👤 Wolfgang Hoenlein
- 👤 Josef Willer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 13:27
CPC Classifications
H; H10; H10F; H10F71/00; H10F71/121; H10F19/00; H10F19/10; H10F77/00; H10F77/10; H10F77/14; H10F77/148; H10P; H10P50/00; H10P50/60; H10P50/61; H10P50/613; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02E10/547; Y02P; Y02P70/00; Y02P70/50
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
137 words
A method for manufacturing a solar cell from a substrate wafer, comprising the steps of: (a) stripping a self-supporting layer of n-doped, monocrystalline silicon by electrochemical etching from a substrate wafer of n-doped, monocrystalline silicon, said stripping comprising the steps of --: (1) forming holes in a first surface of the substrate wafer by electrochemical etching; (2) modifying the process parameters of the etching when a depth of the holes which essentially corresponds to thickness of the self-supporting layer has been reached such that the cross section of the holes is enlarged and further such that the self-supporting layer is stripped as a result of the holes growing together; (b) producing at least one pn-junction in the self-supporting layer; and (c) providing the self-supporting with contacts such that the pn-junction may be connected as a solar cell.
Claim 2
Independent Claim
137 words
A method for manufacturing a solar cell from a substrate wafer, comprising the steps of: (a) stripping a self-supporting layer of n-doped, monocrystalline silicon by electrochemical etching from a substrate wafer of n-doped, monocrystalline silicon, said stripping comprising the steps of --: (1) forming holes in a first surface of the substrate wafer by electrochemical etching; (2) modifying the process parameters of the etching when a depth of the holes which essentially corresponds to thickness of the self-supporting layer has been reached such that the cross section of the holes is enlarged and further such that the self-supporting layer is stripped as a result of the holes growing together; (b) producing at least one pn-junction in the self-supporting layer; and (c) providing the self-supporting with contacts such that the pn-junction may be connected as a solar cell.
Claim 3
Dependent Claim
66 words
The method of claim 1 further comprising the steps of: implementing said electrochemical etching in a fluoride-containing, acidic electrolyte with which the first surface is in contact; and applying an electrical voltage between the substrate wafer and the electrolyte such that the substrate wafer is connected as an anode and such that a predetermined current density that influences the etching erosion flows in the substrate wafer.
Claim 4
Dependent Claim
15 words
The method of claim 1 wherein the holes are formed perpendicular to the first surface.
Claim 5
Dependent Claim
14 words
The method of claim 1 wherein the substrate wafer is a <100> oriented wafer.
Claim 6
Dependent Claim
35 words
The method of claim 1 further comprising the step of: illuminating the substrate wafer through a second surface lying opposite the first surface in order to set the predetermined current density in the substrate wafer.
Claim 7
Dependent Claim
34 words
The method of claim 1 further comprising the step of: generating a surface topology defining the arrangement of the holes at the first surface of the substrate wafer before the formation of the holes.
Claim 8
Dependent Claim
18 words
The method of claim 6 wherein the surface topology is composed of regularly arranged depressions on the surface.
Claim 9
Dependent Claim
38 words
The method of claim 6 further comprising the steps of: producing the surface topology by forming a photoresist mask on the first surface of the substrate wafer; and alkaline etching of the first surface of the substrate wafer.
Claim 10
Dependent Claim
79 words
The method of claim 6 further comprising the steps of: producing the surface topology by electrochemical etching in the electrolyte by producing an illumination pattern on the first surface using a light source having a wavelength less than 100 nm; and setting the current density in the substrate wafer such that an anodic minority carrier current that effects an etching erosion of the first surface locally flows over the substrate wafer only at illuminated locations of the illumination pattern.
Claim 11
Dependent Claim
17 words
The method of claim 1 wherein the electrolyte contains between one percent and fifty percent hydrofluoric acid.
Claim 12
Dependent Claim
13 words
The method of claim 10 wherein the electrolyte additionally contains an oxidation agent.
Claim 13
Dependent Claim
23 words
The method of claim 1 further comprising the step of: increasing the current density in the substrate wafer for stripping the self-supporting layer.
Claim 14
Dependent Claim
24 words
The method of claim 1 further comprising the step of: reducing the concentration of the fluoride in the electrolyte for stripping the self-supporting layer.
Claim 15
Dependent Claim
60 words
The method of claim 1 further comprising the steps of: stripping at least one further, self-supporting layer from the substrate wafer by electrochemical etching after the stripping of the self-supporting layer; producing at least one pn-junction in the further self-supporting layer; and providing the further self-supporting layer with contacts such that the pn-junction can be connected as a solar cell.
Claim 16
Dependent Claim
48 words
The method of claim 1 further comprising the steps of: coating the self-supporting layer with a layer of boro-phosphorus-silicate glass to produce the pn-junction in the self-supporting layer; and diffusing boron from the layer of boro-phosphorus-silicate glass to produce a p + -doped region in the self-supporting layer.
Claim 17
Dependent Claim
45 words
The method of claim 15 wherein the layer of boro-phosphorus-silicate glass covers the entire surface of the self-supporting layer and the p + -doped region covers the entire surface of the self-supporting layer and the self-supporting layer further comprises a n-doped region in its interior.
Claim 18
Dependent Claim
89 words
The method of claim 16 further comprising the steps of: providing the self-supporting layer with a resist layer after the removal of the layer of boro-phosphorus-silicate glass, said resist layer covering all surfaces of the p + -doped region except the first surface of the self-supporting layer and an upper part of the holes in a region of the first surface; and selectively etching the part of the p + -doped region not covered by the resist layer such that the n-doped region is uncovered at the first surface.
Claim 19
Dependent Claim
30 words
The method of claim 17 further comprising the steps of: providing the p + -doped region with a passivation layer of thermal silicon dioxide before application of the resist layer.
Claim 20
Dependent Claim
27 words
The method of claim 17 wherein the uncovered parts of the n-doped region are provided with an n + -doping in the region of the first surface.
Claim 21
Dependent Claim
74 words
The method of claim 17 further comprising the steps of: applying at least one contact for the connection of the n-doped region onto the first surface after removal of the resist layer; and applying at least one contact for the connection of the p + -doped region onto a structured surface lying opposite the first surface, said two contacts being applied such that light can enter into the self-supporting layer through the structured surface.
References Cited (Backward Citations)
US3969746A
Cited
US4137123A
Cited
US4255208A
Cited
US4727047A
Cited
DE3122771A1
Cited
US4303463A
Cited
US4338481A
Cited
US4461671A
Cited
DE3225118A1
Cited
US4425408A
Cited
US4447289A
Cited
US4409423A
Cited
US4717630A
Cited
EP0296348A1
Cited
US4824489A
Cited
US5081049A
Cited
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