US5286519A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Fluid dispersion head
Assignee: LSI Corp
•
Filing: 1992-03-24
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Granted: 1994-02-15
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Expires: 2012-03-24
Abstract
Abstract A fluid distribution head of this invention includes a chamber for fluid flow including a perforated plate. The perforated plate is internally supported by a structural support to avoid deformation of the plate.
Inventors
- 👤 Michael Vukelic
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:12
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C30; C30B; C30B25/00; C30B25/02; C30B25/14
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
221 words
A method for chemical vapor deposition comprising: (a) providing a fluid, said fluid including at least one substance to be deposited onto a substrate, to an intake aperture of a fluid deposition head, the fluid deposition head consisting essentially of: (i) a chamber for fluid flow being defined by a relatively rigid housing having an aperture at one end of the housing for the intake of a fluid, and a perforated outlet plate at an opposite end of the housing for the discharge of fluids; (ii) a single, non-perforated baffle plate disposed within the chamber between the aperture and the perforated outlet plate, said baffle plate acting to disperse the fluid which enters the chamber, said baffle plate supported exclusively by a first support structure disposed within the housing and extending between an interior area of the baffle plate and the housing, the first support structure having a one end fixed to the housing and another opposite end fixed to the baffle plate; and (iii) a second support structure, distinct from the first support structure, disposed within the chamber, and extending between the housing and an interior area of the outlet plate; wherein fluid provided at the intake aperture is distributed substantially evenly across the perforated outlet plate; and (b) depositing the fluid from the outlet plate evenly onto the substrate.
Claim 2
Independent Claim
221 words
A method for chemical vapor deposition comprising: (a) providing a fluid, said fluid including at least one substance to be deposited onto a substrate, to an intake aperture of a fluid deposition head, the fluid deposition head consisting essentially of: (i) a chamber for fluid flow being defined by a relatively rigid housing having an aperture at one end of the housing for the intake of a fluid, and a perforated outlet plate at an opposite end of the housing for the discharge of fluids; (ii) a single, non-perforated baffle plate disposed within the chamber between the aperture and the perforated outlet plate, said baffle plate acting to disperse the fluid which enters the chamber, said baffle plate supported exclusively by a first support structure disposed within the housing and extending between an interior area of the baffle plate and the housing, the first support structure having a one end fixed to the housing and another opposite end fixed to the baffle plate; and (iii) a second support structure, distinct from the first support structure, disposed within the chamber, and extending between the housing and an interior area of the outlet plate; wherein fluid provided at the intake aperture is distributed substantially evenly across the perforated outlet plate; and (b) depositing the fluid from the outlet plate evenly onto the substrate.
Claim 3
Dependent Claim
21 words
A method, according to claim 1, wherein: the chemical vapor deposition process is a low pressure chemical vapor deposition (LPCVD) process.
Claim 4
Dependent Claim
24 words
A method, according to claim 1, wherein: the chemical vapor deposition process deposits a layer of one or more materials onto a silicon wafer.
Claim 5
Dependent Claim
24 words
A method, according to claim 1, wherein: the chemical vapor deposition process deposits a layer of one or more materials onto an integrated circuit.
Claim 6
Dependent Claim
12 words
A method, according to claim 1, wherein: the fluid is a gas.
Claim 7
Dependent Claim
33 words
A method, according to claim 1, wherein: the substance to be deposited is selected from the group consisting of silane based oxides, doped oxides, TEOS oxides, nitrides, oxynitrides, tungsten, and UV transparent nitrides.
Claim 8
Dependent Claim
16 words
A method, according to claim 1, wherein: the second support structure is at least one rod.
Claim 9
Dependent Claim
17 words
A method, according to claim 1, wherein: the second support structure is at least one planar member.
Claim 10
Dependent Claim
23 words
A method, according to claim 1, wherein: the depositing step is conducted at a temperature between about 200° C. and about 600° C.
Claim 11
Dependent Claim
36 words
A method, according to claim 7, wherein: the second support structure is a plurality of rods extending from an interior area of the outlet plate to a back wall at the one end of the housing.
Claim 12
Dependent Claim
33 words
A method, according to claim 10, wherein: there are provided a plurality of rods extending from evenly-spaced positions on the interior area of the outlet plate to the back wall of the housing.
Claim 13
Dependent Claim
33 words
A method, according to claim 1, wherein: the second support structure is at least one planar member extending between a side wall of the housing and an interior area of the outlet plate.
Claim 14
Dependent Claim
33 words
A method, according to claim 12, wherein: the second support structure is two diametrically-opposed planar members extending between a side wall of the housing and two diametrically-opposed interior areas of the outlet plate.
Claim 15
Independent Claim
210 words
A method for depositing a desired substance on a silicon wafer comprising: (a) placing a silicon wafer in a chemical vapor deposition chamber; and (b) delivering a vapor including the desired substance to be deposited upon the silicon wafer to the vapor deposition chamber by means of a fluid deposition head, said fluid deposition head consisting essentially of: (i) a chamber for fluid flow being defined by a relatively rigid housing having an aperture at one end of the housing for the intake of a fluid, and a perforated outlet plate at an opposite end of the housing for the discharge of fluids; (ii) a single, non-perforated baffle plate disposed within the chamber between the aperture and the perforated outlet plate, said baffle plate acting to disperse the fluid which enters the chamber, said baffle plate supported exclusively by a first support structure disposed within the housing and extending between an interior area of the baffle plate and the housing, the first support structure having a one end fixed to the housing and another opposite end fixed to the baffle plate; and (iii) a second support structure, distinct from the first support structure, disposed within the chamber, and extending between the housing and an interior area of the outlet plate.
Claim 16
Independent Claim
210 words
A method for depositing a desired substance on a silicon wafer comprising: (a) placing a silicon wafer in a chemical vapor deposition chamber; and (b) delivering a vapor including the desired substance to be deposited upon the silicon wafer to the vapor deposition chamber by means of a fluid deposition head, said fluid deposition head consisting essentially of: (i) a chamber for fluid flow being defined by a relatively rigid housing having an aperture at one end of the housing for the intake of a fluid, and a perforated outlet plate at an opposite end of the housing for the discharge of fluids; (ii) a single, non-perforated baffle plate disposed within the chamber between the aperture and the perforated outlet plate, said baffle plate acting to disperse the fluid which enters the chamber, said baffle plate supported exclusively by a first support structure disposed within the housing and extending between an interior area of the baffle plate and the housing, the first support structure having a one end fixed to the housing and another opposite end fixed to the baffle plate; and (iii) a second support structure, distinct from the first support structure, disposed within the chamber, and extending between the housing and an interior area of the outlet plate.
Claim 17
Dependent Claim
15 words
A method, according to claim 14, wherein: said silicon wafer further comprises an integrated circuit.
Claim 18
Dependent Claim
32 words
A method, according to claim 14, wherein: the substance to be deposited is selected from the group consisting of silane based oxides, doped oxides, TEOS oxides, nitrides, oxynitrides and UV transparent nitrides.
Claim 19
Dependent Claim
27 words
A method, according to claim 14, further comprising: removing the silicon wafer from the chemical vapor deposition chamber after the desired substance is deposited on the wafer.
Claim 20
Dependent Claim
16 words
A method, according to claim 14, wherein: the second support structure is at least one rod.
Claim 21
Dependent Claim
17 words
A method, according to claim 14, wherein: the second support structure is at least one planar member.
Claim 22
Dependent Claim
34 words
A method, according to claim 14, wherein: the chemical vapor deposition chamber is maintained at a temperature between about 200° C. and about 600° C. for the duration of a chemical vapor deposition process.
Claim 23
Dependent Claim
12 words
A method, according to claim 14, wherein: the fluid is a gas.
Claim 24
Dependent Claim
12 words
A method, according to claim 14, wherein: the fluid is a vapor.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-02-14 | 1997-08-16 | 1998-02-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-02-14 | 2001-08-16 | 2002-02-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-02-14 | 2005-08-16 | 2006-02-15 | $7700.00 | Window Closed / Lapsed |