Abstract According to this invention, an impurity for forming a P-well region and an impurity for forming an N-channel stopper are sequentially doped in an N-channel region, and an impurity for forming an N-well region and an impurity for forming a P-channel stopper are sequentially doped in a P-channel region. After these impurities are diffused by annealing, an impurity for adjusting a threshold voltage is doped in the entire surface of the resultant structure. As described above, since the doping of these impurities can be performed by steps using a total of two masks, the steps in fabricating a complementary semiconductor device are simple. In addition, since the impurities for forming the well regions and the channel stoppers are diffused by annealing, a large margin against punch through in an element isolation region can be obtained. Furthermore, since the impurity for adjusting a threshold voltage is doped after annealing is performed, diffusion of this impurity is suppressed, thereby minimizing gate swing and the like.
A method of fabricating a complementary semiconductor device having a region of a first conductivity type and a region of a second conductivity type, comprising the steps of: doping an impurity for forming said region of the first conductivity type and an impurity for forming a channel stopper in said region of the first conductivity type in a region in which said region of the first conductivity type is to be formed; doping an impurity for forming said region of the second conductivity type and an impurity for forming a channel stopper in said region of the second conductivity type in a region in which said region of the second conductivity type is to be formed; performing annealing for diffusing said doped impurities; and doping an impurity for adjusting a threshold voltage in entire surfaces of said region of the first conductivity type and said region of the second conductivity type after the annealing is performed.
Claim 2
Independent Claim
156 words
A method of fabricating a complementary semiconductor device having a region of a first conductivity type and a region of a second conductivity type, comprising the steps of: doping an impurity for forming said region of the first conductivity type and an impurity for forming a channel stopper in said region of the first conductivity type in a region in which said region of the first conductivity type is to be formed; doping an impurity for forming said region of the second conductivity type and an impurity for forming a channel stopper in said region of the second conductivity type in a region in which said region of the second conductivity type is to be formed; performing annealing for diffusing said doped impurities; and doping an impurity for adjusting a threshold voltage in entire surfaces of said region of the first conductivity type and said region of the second conductivity type after the annealing is performed.
Claim 3
Dependent Claim
41 words
A method according to claim 1, further comprising the step of doping an impurity for suppressing a short channel effect in said region in which said region of the second conductivity type is to be formed before the annealing is performed.
Claim 4
Dependent Claim
42 words
A method according to claim 1, further comprising the step of doping an impurity for adjusting a threshold voltage in advance in said region in which said region of the second conductivity type is to be formed before the annealing is performed.
Claim 5
Dependent Claim
44 words
A method according to claim 1, wherein the impurity which is doped in the entire surfaces of said region of the first conductivity type and said region of the second conductivity type to adjust a threshold voltage after the annealing is performed is boron.