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US5262642A
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Scanning tunneling optical spectrometer
Assignee: Northwestern University
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Filing: 1992-02-26
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Granted: 1993-11-16
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Expires: 2012-02-26
Abstract
Abstract A scanning tunneling optical spectrometer, and corresponding method, for measuring spectral response of a tunneling probe-sample junction over the range of optical frequencies enabling determination of characteristics of and imaging of subsurface structures with nanometer resolutions. A tunneling probe is positioned adjacent the sample with a bias voltage applied and an optical source is employed to direct modulated optical radiation onto the sample probe junction to generate photoexcited tunneling current without interference from tunneling current variations caused by thermal heating by the optical radiation. The optical source is frequency scanned over a selected frequency range and the photoexcited tunneling current is detected employing phase detection thereby permitting measurement of properties of such materials as semiconductors, buried semiconductor structures, and other organic or inorganic photoconductors. Scanning tunneling optical microscopy is provided by scanning the surface of the sample thereby permitting imaging of subsurface structures.
Inventors
- 👤 Bruce W. Wessels
- 👤 Ling Q. Qian
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 05:34
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/18; G01Q60/22; B; B82; B82Y; B82Y20/00; B82Y35/00; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/861; Y10S977/868
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
145 words
A scanning tunneling optical spectrometer for measuring the properties of a sample having a surface comprising: a mounting stage for mounting the sample; a fine pointed probe positionable adjacent to sample sufficiently close to the sample to permit flow of tunneling current between the sample and the probe; electrical bias circuit connected to the probe and the sample to generate a bias tunneling current; modulated optical bias source for radiating the sample with monochromatic optical radiation modulated with a modulating signal to generate photoexcited tunneling current which is detectable without substantial interference by any tunneling current variations caused by thermal heating of the sample by the radiation; and detecting means, coupled to the probe, for detecting a photo-excited tunneling current substantially independent of the bias tunneling current without substantial interference from tunneling current variations caused by thermal heating of the sample by the optical radiation.
Claim 2
Dependent Claim
145 words
A scanning tunneling optical spectrometer for measuring the properties of a sample having a surface comprising: a mounting stage for mounting the sample; a fine pointed probe positionable adjacent to sample sufficiently close to the sample to permit flow of tunneling current between the sample and the probe; electrical bias circuit connected to the probe and the sample to generate a bias tunneling current; modulated optical bias source for radiating the sample with monochromatic optical radiation modulated with a modulating signal to generate photoexcited tunneling current which is detectable without substantial interference by any tunneling current variations caused by thermal heating of the sample by the radiation; and detecting means, coupled to the probe, for detecting a photo-excited tunneling current substantially independent of the bias tunneling current without substantial interference from tunneling current variations caused by thermal heating of the sample by the optical radiation.
Claim 3
Dependent Claim
34 words
The spectrometer of claim 1 wherein the optical bias source comprises a source of monochromatic optical radiation and means for modulating the monochromatic radiation with the modulating signal having at least one selected frequency.
Claim 4
Dependent Claim
28 words
The spectrometer of claim 2 wherein the source of monochromatic optical radiation comprises means for scanning the frequency of the monochromatic optical radiation over a selected frequency range.
Claim 5
Dependent Claim
33 words
The spectrometer of claim 1 wherein the optical radiation is sufficiently low in intensity to minimize thermal heating of the sample by the optical radiation sufficiently to avoid corrupting the photoexcited tunneling current.
Claim 6
Dependent Claim
38 words
The spectrometer of claim 1 wherein the modulating signal has a frequency selected to permit the photoexcited tunneling current to be substantially separable from tunneling current variations caused by thermal heating of the sample by the optical radiation.
Claim 7
Dependent Claim
38 words
The spectrometer of claim 3 wherein the optical bias source comprises means for performing a continuous frequency scan over the selected range of frequencies and further comprising means for recording the photoexcited tunneling current detected during the scanning.
Claim 8
Dependent Claim
30 words
The spectrometer of claim 6 wherein the range of frequencies is selected such that the photon energy of the optical radiation substantially corresponds to a band gap of the sample.
Claim 9
Dependent Claim
22 words
The spectrometer of claim 2 wherein the detecting means comprises a phase sensitive detector which is coupled to the means for modulating.
Claim 10
Dependent Claim
46 words
The spectrometer of claim 8 further comprising a feedback system coupled to the probe and the detecting means, and wherein the means for modulating comprises a chopper for chopping the optical radiation at a modulating signal frequency sufficiently high to avoid interfering with the feedback system.
Claim 11
Dependent Claim
17 words
The spectrometer of claim 9 wherein the modulating signal frequency is between 100 hertz and 40 kilohertz.
Claim 12
Dependent Claim
50 words
The spectrometer of claim 1 further comprising means for scanning the fine pointed probe over at least a portion of the surface of the sample and means for recording the detected photoexcited tunneling current in the form of an image thereby permitting detection and imaging of surface and buried structures.
Claim 13
Dependent Claim
12 words
The spectrometer of claim 1 wherein the sample comprises an inorganic photoconductor.
Claim 14
Dependent Claim
12 words
The spectrometer of claim 1 wherein the sample comprises an organic photoconductor.
Claim 15
Independent Claim
99 words
A method for measurement of spectral response of photoexcited tunneling current of a sample comprising: providing a sample to be measured; positioning a fine tipped probe adjacent to the sample sufficiently close to the sample to permit flow of tunneling current between the sample and the probe; biasing the sample and probe to generate tunneling current; irradiating the sample with modulated monochromatic optical radiation to generate photoexcited tunneling current which is detectable without substantial interference from any tunneling current variations caused by the thermal heating of the sample by the monochromatic optical radiation; and detecting the photoexcited tunneling current.
Claim 16
Independent Claim
99 words
A method for measurement of spectral response of photoexcited tunneling current of a sample comprising: providing a sample to be measured; positioning a fine tipped probe adjacent to the sample sufficiently close to the sample to permit flow of tunneling current between the sample and the probe; biasing the sample and probe to generate tunneling current; irradiating the sample with modulated monochromatic optical radiation to generate photoexcited tunneling current which is detectable without substantial interference from any tunneling current variations caused by the thermal heating of the sample by the monochromatic optical radiation; and detecting the photoexcited tunneling current.
Claim 17
Dependent Claim
19 words
The method of claim 14 wherein the modulated monochromatic optical radiation is frequency scanned over a selected frequency range.
Claim 18
Dependent Claim
34 words
The method of claim 14 wherein the optical radiation is sufficiently low in intensity to minimize thermal heating of the sample by the optical radiation sufficiently to avoid interfering with the photoexcited tunneling current.
Claim 19
Dependent Claim
46 words
The method of claim 14 wherein the modulated monochromatic optical radiation is modulated with a modulating signal at a frequency selected to permit the photoexcited tunneling current to be substantially separable from tunneling current variations caused by thermal heating of the sample by the optical radiation.
Claim 20
Dependent Claim
35 words
The method of claim 14 further comprising the steps of scanning the fine tipped probe over at least a portion of the sample and recording the photoexcited tunneling current in the form of an image.
Claim 21
Dependent Claim
22 words
The method of claim 17 wherein the step of detecting further comprises separating the photoexcited tunneling current from other tunneling current components.
Claim 22
Dependent Claim
26 words
The method of claim 19 wherein the step of separating comprises phase sensitive detection of the photoexcited tunneling current using the modulating signal as a reference.
Claim 23
Dependent Claim
165 words
A scanning tunneling optical spectrometer for measuring the properties of a sample having a surface comprising: a mounting stage for mounting the sample; a fine pointed probe positionable adjacent to sample sufficiently close to the sample to permit flow of tunneling current between the sample and the probe; electrical bias circuit connected to the probe and the sample to generate a bias tunneling current; optical bias source for radiating the sample with monochromatic optical radiation to generate photoexcited tunneling current; means for modulating the monochromatic radiation with at least one selected modulating signal having a frequency high enough to permit the photoexcited tunneling current to be substantially separated from the bias tunneling current including variation caused by thermal heating of the sample by the optical radiation; and detecting means, coupled to the probe, for detecting a photoexcited tunneling current substantially separate from the bias tunneling current, said bias tunneling current including tunneling current variations caused by thermal heating of the sample by the optical radiation.
Claim 24
Dependent Claim
165 words
A scanning tunneling optical spectrometer for measuring the properties of a sample having a surface comprising: a mounting stage for mounting the sample; a fine pointed probe positionable adjacent to sample sufficiently close to the sample to permit flow of tunneling current between the sample and the probe; electrical bias circuit connected to the probe and the sample to generate a bias tunneling current; optical bias source for radiating the sample with monochromatic optical radiation to generate photoexcited tunneling current; means for modulating the monochromatic radiation with at least one selected modulating signal having a frequency high enough to permit the photoexcited tunneling current to be substantially separated from the bias tunneling current including variation caused by thermal heating of the sample by the optical radiation; and detecting means, coupled to the probe, for detecting a photoexcited tunneling current substantially separate from the bias tunneling current, said bias tunneling current including tunneling current variations caused by thermal heating of the sample by the optical radiation.
Claim 25
Dependent Claim
38 words
The spectrometer of claim 21 wherein the optical bias source comprises means for performing a continuous frequency scan over a selected range of frequencies and further comprising means for recording the photoexcited tunneling current detected during the scanning.
Claim 26
Dependent Claim
22 words
The spectrometer of claim 21 wherein the detecting means comprises a phase sensitive detector which is coupled to the means for modulating.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-11-15 | 1997-05-17 | 1997-11-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-11-15 | 2001-05-17 | 2001-11-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-11-15 | 2005-05-17 | 2005-11-16 | $7700.00 | Window Closed / Lapsed |