US5260150A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Photo-mask with light shielding film buried in substrate
Assignee: Sharp Corp
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Filing: 1990-12-20
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Granted: 1993-11-09
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Expires: 2010-12-20
Abstract
Abstract A photo-mask comprises a light-permeable substrate, a plurality of light-shielding films that are disposed on the substrate, the light-shielding films forming a mask pattern, and a light-permeable protective film that is disposed over the surface of the substrate including the light-shielding films so as to protect the light-shielding films.
Inventors
- 👤 Kenji Ohta
- 👤 Junji Hirokane
- 👤 Akira Shibata
- 👤 Yoshiyuki Nagahara
- 👤 Kazuo Van
- 👤 Michinobu Mieda
- 👤 Tetsuya Inui
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 11:26
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/38; G03F1/48; G11; G11B; G11B7/00; G11B7/24; G11B7/26; G11B7/261; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/24851; Y10T428/24868; Y10T428/24917
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
63 words
A photo-mask comprising a light-permeable structure, a light-shielding film buried in said substrate so that the top surface of said light-shielding film projects from the top surface of said substrate, said light-shielding film forming a mask pattern, and a light-permeable protective film overlaying the surface of said substrate and said light-shielding film, wherein said light-permeable protective film is made of a dielectric substance.
Claim 2
Dependent Claim
63 words
A photo-mask comprising a light-permeable structure, a light-shielding film buried in said substrate so that the top surface of said light-shielding film projects from the top surface of said substrate, said light-shielding film forming a mask pattern, and a light-permeable protective film overlaying the surface of said substrate and said light-shielding film, wherein said light-permeable protective film is made of a dielectric substance.
Claim 3
Dependent Claim
18 words
A photo-mask according to claim 1, further comprising a conductive film overlaying the substrate and the light-shielding film.
Claim 4
Dependent Claim
17 words
A photo-mask according to claim 1, wherein said light-permeable protective film is made of a conductive substance.
Claim 5
Dependent Claim
26 words
A photo-mask according to claim 3, wherein said conductive substance is one selected from the group consisting of Ta, Ti, Mo, AuCr, and InO 2 .
Claim 6
Dependent Claim
26 words
A photo-mask according to claim 1, wherein said light-shielding film is made of a metal selected from the group consisting of Ta, Ti, Cr, and Mo.
Claim 7
Dependent Claim
23 words
A photo-mask according to claim 1, wherein said light-shielding film is made of Ta and has a thickness of 2 to 10 μm.
Claim 8
Dependent Claim
14 words
A photo-mask according to claim 1, wherein said dielectric substance is SiO 2 .
Claim 9
Dependent Claim
39 words
A photo-mask comprising a light-permeable substrate and a light-shielding film forming a mask-pattern, the light-shielding film being buried in said substrate so that the top surface of said light shielding film projects from the top surface of said substrate.
Claim 10
Dependent Claim
39 words
A photo-mask comprising a light-permeable substrate and a light-shielding film forming a mask-pattern, the light-shielding film being buried in said substrate so that the top surface of said light shielding film projects from the top surface of said substrate.
Claim 11
Dependent Claim
16 words
A photo-mask according to claim 8, wherein said light-shielding film is made of a conductive substance.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-11-08 | 1997-05-10 | 1997-11-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-11-08 | 2001-05-10 | 2001-11-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-11-08 | 2005-05-10 | 2005-11-09 | $7700.00 | Window Closed / Lapsed |