US5240878A
Expired / Lapsed
US
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Method for forming patterned films on a substrate
Assignee: International Business Machines Corp
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Filing: 1991-04-26
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Granted: 1993-08-31
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Expires: 2011-04-26
Abstract
Abstract A method of forming patterned films on a semiconductor substrate 10 includes the steps of depositing a hardened photo resist underlay 30 onto the substrate, then depositing a polyether sulfone release layer 32, then depositing a photo sensitive resist layer 34 and exposing an etching a metallization pattern 36, 38 to the substrate 10. The structure is then blanket deposited with a conductive layer 40 to thereby create a conductive contact stud 42. The film layer 40 and resist layer 34 are removed by dissolving the polyether sulfone layer 32 in an NMP solution and the photo resist underlayer 30 is then removed using a selective photo resist stripper composition.
Inventors
- 👤 John A. Fitzsimmons
- 👤 Janos Havas
- 👤 Margaret J. Lawson
- 👤 Edward J. Leonard
- 👤 Bryan N. Rhoads
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 18:31
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/094; H; H10; H10P; H10P76/00; H10P76/20; H10P76/202; Y; Y10; Y10S; Y10S148/00; Y10S148/10; Y10S438/00; Y10S438/942; Y10S438/948; Y10S438/95; Y10S438/951
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
155 words
A method of forming patterned films onto a semiconductor substrate comprising the steps of: a) depositing a first layer of a first material, wherein said first material is comprised of an organic polymeric masking material; b) conditioning said first layer to be thermally stable under deposition conditions required for film formation and to have a first mechanical bonding strength with a release material, the conditioned first layer further being soluble in a stripper solution; c) depositing a release layer of said release material onto said first layer; d) patterning a film pattern through said first and said release layers; e) depositing a film layer to thereby form film onto the semiconductor substrate in the said film pattern; f) removing all layers above said conditioned first layer by applying an adhesive backed tape to said film layer and applying a pulling force to said tape; and, g) dissolving said conditioned first layer in said stripper solution.
Claim 2
Independent Claim
155 words
A method of forming patterned films onto a semiconductor substrate comprising the steps of: a) depositing a first layer of a first material, wherein said first material is comprised of an organic polymeric masking material; b) conditioning said first layer to be thermally stable under deposition conditions required for film formation and to have a first mechanical bonding strength with a release material, the conditioned first layer further being soluble in a stripper solution; c) depositing a release layer of said release material onto said first layer; d) patterning a film pattern through said first and said release layers; e) depositing a film layer to thereby form film onto the semiconductor substrate in the said film pattern; f) removing all layers above said conditioned first layer by applying an adhesive backed tape to said film layer and applying a pulling force to said tape; and, g) dissolving said conditioned first layer in said stripper solution.
Claim 3
Independent Claim
155 words
A method of forming patterned films onto a semiconductor substrate comprising the steps of: a) depositing a first layer of a first material; b) conditioning said first layer to be thermally stable under deposition conditions required for film formation and to have a first mechanical bonding strength with a release material, the conditioned first layer further being soluble in a stripper solution, wherein said stripper solution is comprised of N-alkyl-2-pyrrolidone, 1,2-propanediol and tetraalkylammonium hydroxide; c) depositing a release layer of said release material onto said first layer; d) patterning a film pattern through said first and said release layers; e) depositing a film layer to thereby form film onto the semiconductor substrate in the said film pattern; f) removing all layers above said conditioned first layer by applying an adhesive backed tape to said film layer and applying a pulling force to said tape; and, g) dissolving said conditioned first layer in said stripper solution.
Claim 4
Independent Claim
155 words
A method of forming patterned films onto a semiconductor substrate comprising the steps of: a) depositing a first layer of a first material; b) conditioning said first layer to be thermally stable under deposition conditions required for film formation and to have a first mechanical bonding strength with a release material, the conditioned first layer further being soluble in a stripper solution, wherein said stripper solution is comprised of N-alkyl-2-pyrrolidone, 1,2-propanediol and tetraalkylammonium hydroxide; c) depositing a release layer of said release material onto said first layer; d) patterning a film pattern through said first and said release layers; e) depositing a film layer to thereby form film onto the semiconductor substrate in the said film pattern; f) removing all layers above said conditioned first layer by applying an adhesive backed tape to said film layer and applying a pulling force to said tape; and, g) dissolving said conditioned first layer in said stripper solution.
Claim 5
Independent Claim
181 words
A method of forming patterned films onto a semiconductor substrate comprising the steps of: a) depositing a first layer of a first material; b) conditioning said first layer to be thermally stable under deposition conditions required for film formation and to have a first mechanical bonding strength with a release material, the conditioned first layer further being soluble in a stripper solution, wherein said stripper solution is comprised of: i) 60-90% by weight of a N-alkyl-2-pyrrolidone; ii) 10-40% by weight of a 1,2-propanediol; iii) a sufficient amount of a tetraalkylammonium hydroxide to provide a solution being from 0.1 to 0.22N; c) depositing a release layer of said release material onto said first layer; d) patterning a film pattern through said first and said release layers; e) depositing a film layer to thereby form film onto the semiconductor substrate in the said film pattern; f) removing all layers above said conditioned first layer by applying an adhesive backed tape to said film layer and applying a pulling force to said tape; and, g) dissolving said conditioned first layer in said stripper solution.
Claim 6
Independent Claim
181 words
A method of forming patterned films onto a semiconductor substrate comprising the steps of: a) depositing a first layer of a first material; b) conditioning said first layer to be thermally stable under deposition conditions required for film formation and to have a first mechanical bonding strength with a release material, the conditioned first layer further being soluble in a stripper solution, wherein said stripper solution is comprised of: i) 60-90% by weight of a N-alkyl-2-pyrrolidone; ii) 10-40% by weight of a 1,2-propanediol; iii) a sufficient amount of a tetraalkylammonium hydroxide to provide a solution being from 0.1 to 0.22N; c) depositing a release layer of said release material onto said first layer; d) patterning a film pattern through said first and said release layers; e) depositing a film layer to thereby form film onto the semiconductor substrate in the said film pattern; f) removing all layers above said conditioned first layer by applying an adhesive backed tape to said film layer and applying a pulling force to said tape; and, g) dissolving said conditioned first layer in said stripper solution.
Claim 7
Independent Claim
152 words
A method of forming patterned films onto a semiconductor substrate comprising the steps of: a) depositing a first layer of a first material; b) conditioning said first layer to be thermally stable under deposition conditions required for film formation and to have a first mechanical bonding strength with a release material, the conditioned first layer further being soluble in a stripper solution; c) depositing a release layer of said release material onto said first layer, wherein said release material is comprised of polyether sulfone; d) patterning a film pattern through said first and said release layers; e) depositing a film layer to thereby form film onto the semiconductor substrate in the said film pattern; f) removing all layers above said conditioned first layer by applying an adhesive backed tape to said film layer and applying a pulling force to said tape; and, g) dissolving said conditioned first layer in said stripper solution.
Claim 8
Independent Claim
152 words
A method of forming patterned films onto a semiconductor substrate comprising the steps of: a) depositing a first layer of a first material; b) conditioning said first layer to be thermally stable under deposition conditions required for film formation and to have a first mechanical bonding strength with a release material, the conditioned first layer further being soluble in a stripper solution; c) depositing a release layer of said release material onto said first layer, wherein said release material is comprised of polyether sulfone; d) patterning a film pattern through said first and said release layers; e) depositing a film layer to thereby form film onto the semiconductor substrate in the said film pattern; f) removing all layers above said conditioned first layer by applying an adhesive backed tape to said film layer and applying a pulling force to said tape; and, g) dissolving said conditioned first layer in said stripper solution.
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