US5238705A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Carbonaceous protective films and method of depositing the same
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1989-07-17
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Granted: 1993-08-24
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Expires: 2009-07-17
Abstract
Abstract Diamond films are formed by chemical vapor reation. Nitrogen or halogen compound gas is inputted to the reaction chamber together with a reactive gas of hydrocarbon. The resistivity, transparency and hardness of the deposited films can be controlled by adjusting the introduction rate of the halogen or nitrogen.
Inventors
- 👤 Shigenori Hayashi
- 👤 Toshiji Hamatani
- 👤 Shunpei Yamazaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 01:03
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/26; C23C16/27; C23C16/274; C23C16/278; C30; C30B; C30B25/00; C30B25/02; C30B25/10; C30B25/105; C30B29/00; C30B29/02; C30B29/04
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
88 words
A method of forming a carbonaceous protective film on an electric device comprising: placing said electric device in a reaction chamber; inputting a carbon compound gas and an additive compound gas comprising NF 3 ; inputting electrical energy to said gases in order to decompose said gases and carry out plasma deposition of said carbonaceous protective film on said electric device; and adjusting the amount of at least said additive gas with respect to the carbon compound gas to adjust the electrical conductivity of said carbonaceous protective film.
Claim 2
Independent Claim
88 words
A method of forming a carbonaceous protective film on an electric device comprising: placing said electric device in a reaction chamber; inputting a carbon compound gas and an additive compound gas comprising NF 3 ; inputting electrical energy to said gases in order to decompose said gases and carry out plasma deposition of said carbonaceous protective film on said electric device; and adjusting the amount of at least said additive gas with respect to the carbon compound gas to adjust the electrical conductivity of said carbonaceous protective film.
Claim 3
Dependent Claim
13 words
The method of claim 1 wherein said carbon compound gas is a hydrocarbon.
Claim 4
Dependent Claim
30 words
The method of claim 1 where the amount of the additive gas with respect to the carbon compound gas is adjusted by adjusting the flow rate of the additive gas.
Claim 5
Independent Claim
88 words
A method of forming a carbonaceous protective film on an electric device comprising: placing said electric device in a reaction chamber; inputting a carbon compound gas and an additive compound gas comprising NF 3 ; inputting electrical energy to said gases in order to decompose said gases and carry out plasma deposition of said carbonaceous protective film on said electric device; and adjusting the amount of at least said additive gas with respect to the carbon compound gas to adjust the light transmissivity of said carbonaceous protective film.
Claim 6
Independent Claim
88 words
A method of forming a carbonaceous protective film on an electric device comprising: placing said electric device in a reaction chamber; inputting a carbon compound gas and an additive compound gas comprising NF 3 ; inputting electrical energy to said gases in order to decompose said gases and carry out plasma deposition of said carbonaceous protective film on said electric device; and adjusting the amount of at least said additive gas with respect to the carbon compound gas to adjust the light transmissivity of said carbonaceous protective film.
Claim 7
Dependent Claim
13 words
The method of claim 4 wherein said carbon compound gas is a hydrocarbon.
Claim 8
Dependent Claim
30 words
The method of claim 4 where the amount of the additive gas with respect to the carbon compound gas is adjusted by adjusting the flow rate of the additive gas.
Claim 9
Independent Claim
87 words
A method of forming a carbonaceous protective film on an electric device comprising: placing said elective device in a reaction chamber; inputting a carbon compound gas and an additive compound gas comprising NF 3 ; inputting electrical energy to said gases in order to decompose said gases and carry out plasma deposition of said carbonaceous protective film on said electric device; and adjusting the amount of at least said additive gas with respect to the carbon compound gas to adjust the hardness of said carbonaceous protective film.
Claim 10
Independent Claim
87 words
A method of forming a carbonaceous protective film on an electric device comprising: placing said elective device in a reaction chamber; inputting a carbon compound gas and an additive compound gas comprising NF 3 ; inputting electrical energy to said gases in order to decompose said gases and carry out plasma deposition of said carbonaceous protective film on said electric device; and adjusting the amount of at least said additive gas with respect to the carbon compound gas to adjust the hardness of said carbonaceous protective film.
Claim 11
Dependent Claim
13 words
The method of claim 7 wherein said carbon compound gas is a hydrocarbon.
Claim 12
Dependent Claim
29 words
The method of claim 7 where the amount of additive gas with respect to the carbon compound gas is adjusted by adjusting the flow rate of the additive gas.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-08-23 | 1997-02-22 | 1997-08-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-08-23 | 2001-02-22 | 2001-08-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-08-23 | 2005-02-22 | 2005-08-24 | $7700.00 | Window Closed / Lapsed |