US4871581A
Expired / Lapsed
US
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Carbon deposition by ECR CVD using a catalytic gas
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1988-07-08
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Granted: 1989-10-03
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Expires: 2008-07-08
Abstract
Abstract A material consisting mainly of carbon can be formed on a surface by virtue of a microwave energy. A catalyst gas is introduced into a reaction chamber for ECR CVD, along with a carbon compound gas. The catalyst gas consists of a gaseous compound of germanium such as GeH 4 and GeF 4 .
Inventors
- 👤 Shumpei Yamazaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 03:57
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/511; C23C16/22; C23C16/26; Y; Y10; Y10T; Y10T428/00; Y10T428/30
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
93 words
A method of depositing a material consisting mainly of carbon comprising the steps of: placing an object for deposition in a reaction chamber; introducing a carbon compound gas into said reaction chamber; and inputting a power to said reaction chamber in order to decompose said carbon compound gas and deposit the carbon product of the decomposition on the surface of said object, wherein a catalytic gas is introduced into said reaction chamber in order to expedite the deposition of said carbon product, said catalytic gas being the halide or the hydride of germanium.
Claim 2
Independent Claim
93 words
A method of depositing a material consisting mainly of carbon comprising the steps of: placing an object for deposition in a reaction chamber; introducing a carbon compound gas into said reaction chamber; and inputting a power to said reaction chamber in order to decompose said carbon compound gas and deposit the carbon product of the decomposition on the surface of said object, wherein a catalytic gas is introduced into said reaction chamber in order to expedite the deposition of said carbon product, said catalytic gas being the halide or the hydride of germanium.
Claim 3
Dependent Claim
12 words
The method of claim 1, wherein said input power is microwave power.
Claim 4
Dependent Claim
17 words
The method of claim 2, wherein the frequency of said microwave is not lower than 500 MHz.
Claim 5
Dependent Claim
28 words
The method of claim 3, wherein said carbon compound gas is diluted with hydrogen or a gaseous oxide or is introduced together with hydrogen or a gaseous oxide.
Claim 6
Dependent Claim
27 words
The method of claim 4, wherein said catalytic gas is diluted with hydrogen or a gaseous oxide or is introduced together with hydrogen or a gaseous oxide.
Claim 7
Dependent Claim
24 words
The method of claim 5, wherein said reaction chamber is subjected to a magnetic field substantially in the propagating direction of said microwave energy.
Claim 8
Dependent Claim
21 words
The method of claim 1, wherein said carbon product is deposited to form a non-fibrous, non-filamentary diamond coating on said object.
Claim 9
Independent Claim
155 words
A method of depositing a material consisting mainly of carbon comprising the steps of: placing an object for deposition in a reaction chamber; introducing a carbon compound gas into said reaction chamber; and inputting a power to said reaction chamber in order to decompose said carbon compound gas and deposit the carbon product of the decomposition on the surface of said object, wherein a catalytic gas is introduced into said reaction chamber in order to expedite the deposition of said carbon product, said input power is microwave power with the frquency of said microwave not being lower than 500 MHz; said carbon compound gas is diluted with hydrogen or a gaseous oxide or is introduced together with hydrogen or a gaseous oxide, said catalytic gas is diluted with hydrogen or a gaseous oxide or is introduced together with hydrogen or a gaseous oxide, and said catalytic gas is the halide or the hydride of germanium.
Claim 10
Independent Claim
155 words
A method of depositing a material consisting mainly of carbon comprising the steps of: placing an object for deposition in a reaction chamber; introducing a carbon compound gas into said reaction chamber; and inputting a power to said reaction chamber in order to decompose said carbon compound gas and deposit the carbon product of the decomposition on the surface of said object, wherein a catalytic gas is introduced into said reaction chamber in order to expedite the deposition of said carbon product, said input power is microwave power with the frquency of said microwave not being lower than 500 MHz; said carbon compound gas is diluted with hydrogen or a gaseous oxide or is introduced together with hydrogen or a gaseous oxide, said catalytic gas is diluted with hydrogen or a gaseous oxide or is introduced together with hydrogen or a gaseous oxide, and said catalytic gas is the halide or the hydride of germanium.
References Cited (Backward Citations)
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JPS5918197A
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JPS61132507A
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JPS61266618A
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1992-10-02 | 1993-04-03 | 1993-10-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-10-02 | 1997-04-03 | 1997-10-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-10-02 | 2001-04-03 | 2001-10-03 | $7700.00 | Window Closed / Lapsed |